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Methods of forming a layer for barrier applications in an interconnect structure

US7618893 - Nov 17, 2009

Field effect transistors with dielectric source drain halo regions and reduced miller capacitance

US7618853 - Nov 17, 2009

Detection of arcing events in wafer plasma processing through monitoring of trace gas concentrations

US20090280581 - Nov 12, 2009

Methods for etching carbon nano-tube films for use in non-volatile memories

US20090278112 - Nov 12, 2009

Method for manufacturing soi substrate

US7615456 - Nov 10, 2009

Plasma processing method and computer readable storage medium

US20090275207 - Nov 05, 2009

Cmos-compatible bulk-micromachining process for single-crystal mems/nems devices

US20090275162 - Nov 05, 2009

Semiconductor device

US7608545 - Oct 27, 2009

Passive elements, articles, packages, semiconductor composites, and methods of manufacturing same

US7605092 - Oct 20, 2009

Methods for fabricating device features having small dimensions

US7601645 - Oct 13, 2009

Method and apparatus for plasma processing

US7601619 - Oct 13, 2009

Method for manufacturing semiconductor device

US7601601 - Oct 13, 2009

Plasma composition for selective high-k etch

US7598184 - Oct 06, 2009

Slot machine having feature in setting sequence in which symbols are rearranged on defined areas to specific sequence pattern and control method of the slot machine

US20090247269 - Oct 01, 2009

Gaming machine

US20090247268 - Oct 01, 2009

Bonus with proximity of occurrence related to base game outcomes or payback percentage

US20090247267 - Oct 01, 2009

Slot machine enabling player to easily recognize gap from another player in terms required bet amount in game, and playing method thereof

US20090247265 - Oct 01, 2009

Multi-solution bone cements and methods of making the same

US20090239970 - Sep 24, 2009

Plasma etchimg method and plasma etching apparatus

US20090233450 - Sep 17, 2009

Plasma etching method

US20090233446 - Sep 17, 2009

Led with substrate modifications for enhanced light extraction and method of making same

US20090233394 - Sep 17, 2009

Photoresist strip method for low-k dielectrics

US7585777 - Sep 08, 2009

Etch rate and critical dimension uniformity by selection of focus ring material

US20090221150 - Sep 03, 2009

Plasma etching method, plasma etching apparatus and computer-readable storage medium

US20090221148 - Sep 03, 2009

Plasma processing apparatus and plasma processing method

US20090215274 - Aug 27, 2009

Substrate processing method

US20090209108 - Aug 20, 2009

Methods and apparatus for wafer area pressure control in an adjustable gap plasma chamber

US20090204342 - Aug 13, 2009

Plasma etching method, plasma etching apparatus and computer-readable storage medium

US20090203219 - Aug 13, 2009

Plasma etching method and computer-readable storage medium

US20090203218 - Aug 13, 2009

Substrate processing method and substrate processing apparatus

US20090197423 - Aug 06, 2009

Process for removing high stressed film using lf or hf bias power and capacitively coupled vhf source power with enhanced residue capture

US20090197419 - Aug 06, 2009

Substrate processing apparatus

US20090197418 - Aug 06, 2009

Method of etching amorphous silicon layer and method of manufacturing liquid crystal display using the same

US20090191655 - Jul 30, 2009

Selective etching of mems using gaseous halides and reactive co-etchants

US7566664 - Jul 28, 2009

Boron doped shell for mems device

US7563720 - Jul 21, 2009

Dual damascene process

US7563719 - Jul 21, 2009

Dry-etching method and apparatus

US20090181545 - Jul 16, 2009

Method of forming bonding pad opening

US20090181542 - Jul 16, 2009

Method of manufacturing nonvolatile semiconductor memory device

US7560386 - Jul 14, 2009

Method of etching a high aspect ratio contact

US20090176375 - Jul 09, 2009

Pattern forming method, semiconductor device manufacturing apparatus and storage medium

US20090176374 - Jul 09, 2009

Method for fabrication of floating gate in semiconductor device

US20090176320 - Jul 09, 2009

Systems and methods for interconnect metallization using a stop-etch layer

US7557046 - Jul 07, 2009

Method of etching a dielectric layer to form a contact hole and a via hole and damascene method

US7557025 - Jul 07, 2009

Method for producing a solar cell

US7556741 - Jul 07, 2009

Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium

US20090170335 - Jul 02, 2009

Copper discoloration prevention following bevel etch process

US20090170334 - Jul 02, 2009

Shallow trench isolation etch process

US20090170333 - Jul 02, 2009

Method of forming a bottle-shaped trench by ion implantation

US20090170331 - Jul 02, 2009

Etch with high etch rate resist mask

US20090163035 - Jun 25, 2009

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Current-status (17)

Process (12)

Plasma (12)

Method AND apparatus (10)

Method OF manufacturing (6)

Semiconductor device (5)

Method OF forming (5)