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current-us-classification:355/63
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Piezoelectric-actuator driving device and exposure apparatus including the same
US20090092929
-
Apr 09, 2009
Method for improving an optical imaging property of a projection objective of a microlithographic projection exposure apparatus
US20090002661
-
Jan 01, 2009
Evaporation control using coating
US7351348
-
Apr 01, 2008
Auto focus system
US20080062396
-
Mar 13, 2008
Microphotonic maskless lithography
US20080014534
-
Jan 17, 2008
Objective, optical analyzer, method of driving optical analyzer, and microscope
US7274433
-
Sep 25, 2007
Lithographic apparatus and device manufacturing method
US7224436
-
May 29, 2007
Lithographic apparatus, device manufacturing method and a substrate
US7175968
-
Feb 13, 2007
Lithographic apparatus, device manufacturing method, and device manufactured thereby
US7145641
-
Dec 05, 2006
Lithographic apparatus and device manufacturing method
US7113259
-
Sep 26, 2006
Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus
US7113257
-
Sep 26, 2006
Lithographic apparatus and device manufacturing method
US7081943
-
Jul 25, 2006
Writing device and writing method
US7014986
-
Mar 21, 2006
Gradient immersion lithography
US6954256
-
Oct 11, 2005
Illumination apparatus, illumination-controlling method, exposure apparatus, device fabricating method
US6934009
-
Aug 23, 2005
Immersion lithography
US6781670
-
Aug 24, 2004
Laser output control method, laser apparatus and exposure apparatus
US6731377
-
May 04, 2004
Method and apparatus to easily measure reticle blind positioning with an exposure apparatus
US20040043198
-
Mar 04, 2004
Scatterometry based active control of exposure conditions
US6602727
-
Aug 05, 2003
Automated periodic focus and exposure calibration of a lithography stepper
US6501534
-
Dec 31, 2002
Aperture for an exposure apparatus for forming a fine pattern on a semiconductor wafer
US6391677
-
May 21, 2002
Imaging optical system and image forming apparatus
US6226129
-
May 01, 2001
Apparatus for producing photographic prints
US6072562
-
Jun 06, 2000
Photo-processing apparatus
US5956128
-
Sep 21, 1999
Pattern forming method, projection exposure system, and semiconductor device fabrication method
US5863712
-
Jan 26, 1999
Best focus determining method
US5750294
-
May 12, 1998
Photographic copier having different magnifications
US5440370
-
Aug 08, 1995
Lens loading apparatus
US5329337
-
Jul 12, 1994
Short range object photographing device
US5293242
-
Mar 08, 1994
Lens shift device for a photographic printer
US5218404
-
Jun 08, 1993
Lithographic device with a suspended object table
US5150153
-
Sep 22, 1992
Image forming apparatus
US5111237
-
May 05, 1992
Projecting apparatus
US5078487
-
Jan 07, 1992
Projection optical system
US4757354
-
Jul 12, 1988
Optical recording head and belt positioning apparatus
US4703334
-
Oct 27, 1987
Planetary camera
US4620784
-
Nov 04, 1986
Slide supporting assembly for color-slide duplicator
US4497574
-
Feb 05, 1985
Apparatus and method for producing a selected enlargement of a graphic image
US4479712
-
Oct 30, 1984
Alignment structure
US4432638
-
Feb 21, 1984
Apparatus for making a copy in one of three sizes of x-ray film
US4365892
-
Dec 28, 1982
Apparatus and method for resizing artwork
US4355889
-
Oct 26, 1982
Close-up copy photography apparatus
US4310231
-
Jan 12, 1982
Optical projection system having a photorepetition function
US4295735
-
Oct 20, 1981
Image forming optical system
US4294538
-
Oct 13, 1981
Photographic printing or enlarging apparatus
US4239382
-
Dec 16, 1980
Apparatus and method for producing an enlargement of a graphic image
US4220410
-
Sep 02, 1980
Apparatus for making color slides from black-and-white art using regular and color film rolls
US4208124
-
Jun 17, 1980
Enlarger lens system having stop-value scale illuminating mechanism
US4183661
-
Jan 15, 1980
Microfilm camera
US4165934
-
Aug 28, 1979
Adjustment device for photographic enlarging or reproducing apparatus
US4097144
-
Jun 27, 1978
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Apparatus and method (13)
Exposure (9)
Forming (5)
Image (5)
Optical system - image forming (5)
Lens (3)
Focus (3)
Immersion lithography (2)
Copy (2)
Positioning (2)
Film - apparatus for making (2)
Camera (2)
Assembly (2)
Object (2)
Photographic printing (2)