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current-us-classification:355/75
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Method and system for active purging of pellicle volumes
US7619718
-
Nov 17, 2009
Reticle pod with isolation system
US7607543
-
Oct 27, 2009
Mask transport system configured to transport a mask into and out of a lithographic apparatus
US20090262327
-
Oct 22, 2009
Near-field exposure mask, near-field exposure apparatus, and near-field exposure method
US7605908
-
Oct 20, 2009
Method for distortion correction in a microlithographic projection exposure apparatus
US7605905
-
Oct 20, 2009
Lithographic apparatus and device manufacturing method
US7602489
-
Oct 13, 2009
Substrate-holding technique
US7602476
-
Oct 13, 2009
Double exposure lithography using low temperature oxide and uv cure process
US20090253078
-
Oct 08, 2009
Method of preparing p-type doped zno or znmgo
US20090246948
-
Oct 01, 2009
Transparent original reading apparatus and illuminating apparatus for reading apparatus
US7595918
-
Sep 29, 2009
Lithographic apparatus and device manufacturing method
US7593096
-
Sep 22, 2009
Lithographic apparatus having a chuck with a visco-elastic damping layer
US20090231567
-
Sep 17, 2009
Stage device, exposure apparatus, and method of manufacturing device
US7589823
-
Sep 15, 2009
Projector
US20090219505
-
Sep 03, 2009
Substrate conveyor apparatus, substrate conveyance method and exposure apparatus
US20090219504
-
Sep 03, 2009
System and method for an adjusting optical proximity effect for an exposure apparatus
US20090213349
-
Aug 27, 2009
Lithographic apparatus and device manufacturing method
US7576832
-
Aug 18, 2009
Sheet paper identification device and method
US7574033
-
Aug 11, 2009
Method and apparatus for maskless photolithography
US7573561
-
Aug 11, 2009
Document reading device
US7570400
-
Aug 04, 2009
Imaging system and method to enable scanning a variety of types of media objects
US7570397
-
Aug 04, 2009
Lithographic apparatus with gas bearing supply mechanism and device manufacturing method
US7567339
-
Jul 28, 2009
Lithographic apparatus and device manufacturing method
US7564536
-
Jul 21, 2009
Seamless exposure with projection system comprises array of micromirrors with predefined reflectivity variations
US7564535
-
Jul 21, 2009
Mask, exposure apparatus and device manufacturing method
US20090170014
-
Jul 02, 2009
Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device
USRE40774
-
Jun 23, 2009
Contact material and system for ultra-clean applications
US7551265
-
Jun 23, 2009
Exposure apparatus
US7551264
-
Jun 23, 2009
Original cover closer
US20090153833
-
Jun 18, 2009
Chuck plate assembly with cooling means
US7548304
-
Jun 16, 2009
Cooling assembly for a stage
US7548303
-
Jun 16, 2009
Lithographic apparatus and device manufacturing method
US7545481
-
Jun 09, 2009
Reticle, exposure apparatus, and methods for measuring the alignment state thereof
US7545480
-
Jun 09, 2009
Exposure process and apparatus using glass photomasks
US7538853
-
May 26, 2009
Exposure apparatus
US20090128795
-
May 21, 2009
Moving/guiding apparatus and exposure apparatus using the same
US7535552
-
May 19, 2009
System and method for improvement of alignment and overlay for microlithography
US7535549
-
May 19, 2009
Dual-sided substrate measurement apparatus and methods
US7528937
-
May 05, 2009
Substrate container with pressure equalization
US7528936
-
May 05, 2009
Lithographic apparatus, device manufacturing method, and device manufactured thereby
US7528935
-
May 05, 2009
Lithographic apparatus and device manufacturing method utilizing a mems mirror with large deflection using a non-linear spring arrangement
US7528933
-
May 05, 2009
Container and exposure apparatus having the same
US7525644
-
Apr 28, 2009
Lithographic apparatus, and mechanism
US7525643
-
Apr 28, 2009
Lithographic apparatus and exposure method
US7525636
-
Apr 28, 2009
Substrate transport apparatus with automated alignment
US7522267
-
Apr 21, 2009
Lithographic apparatus, stage apparatus and device manufacturing method
US20090086180
-
Apr 02, 2009
Positioning stage, bump forming apparatus equipped with the positioning stage, and bump forming method performed using the positioning stage
US7508495
-
Mar 24, 2009
Projection exposure system and method of manufacturing a miniaturized device
US7508488
-
Mar 24, 2009
Apparatus and method for mounting pellicle
US20090073415
-
Mar 19, 2009
Lithographic apparatus and device manufacturing method
US7505114
-
Mar 17, 2009
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Apparatus and method (22)
System and method (5)
Substrate (4)
Alignment (3)
Reading (2)
Reticle (2)
Pellicle (2)
Object (2)
Mechanism (2)
Container (2)
Positioning (2)
Exposure-apparatus (2)
Assembly (2)
Process (2)