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Measurement of thin films using fourier amplitude

US7612891 - Nov 03, 2009

Methods and devices for measuring tear film and diagnosing tear disorders

US20090201465 - Aug 13, 2009

Interferometric measurement of dlc layer on magnetic head

US20090185193 - Jul 23, 2009

Method of characterizing transparent thin-films using differential optical sectioning interference microscopy

US7545510 - Jun 09, 2009

Photothermal conversion measurement apparatus, photothermal conversion measurement method, and sample cell

US7522287 - Apr 21, 2009

Apparatus for measuring thickness of a substrate

US20090051924 - Feb 26, 2009

Method for determining optimal resist thickness

US7492465 - Feb 17, 2009

System and method for thickness measurement

US7477408 - Jan 13, 2009

Dual polarization interferometers for measuring opposite sides of a workpiece

US7471396 - Dec 30, 2008

Tear film measurement

US20080316499 - Dec 25, 2008

Optical sensor for extreme environments

US20080297808 - Dec 04, 2008

Measuring the shape, thickness variation, and material inhomogeneity of a wafer

US20080285053 - Nov 20, 2008

Reduced coherence symmetric grazing incidence differential interferometer

US20080278732 - Nov 13, 2008

Methods and devices for measuring tear film and diagnosing tear disorders

US20080273171 - Nov 06, 2008

System, apparatus, and method for determining temperature/thickness of an object using light interference measurements

US7446881 - Nov 04, 2008

Gas analyzing apparatus and substrate processing system

US20080236747 - Oct 02, 2008

Interferometer for determining characteristics of an object surface, including processing and calibration

US7428057 - Sep 23, 2008

Optically balanced instrument for high accuracy measurement of dimensional change

US7426039 - Sep 16, 2008

Interferometry systems and methods

US7417743 - Aug 26, 2008

Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method

US7411684 - Aug 12, 2008

Process control monitors for interferometric modulators

US7403323 - Jul 22, 2008

Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

US7403289 - Jul 22, 2008

Method and apparatus for measuring thickness of thin article

US7403288 - Jul 22, 2008

Method for optically testing semiconductor devices

US7400411 - Jul 15, 2008

Characterization of materials with optically shaped acoustic waveforms

US7387027 - Jun 17, 2008

Temperature/thickness measuring apparatus, temperature/thickness measuring method, temperature/thickness measuring system, control system and control method

US7379189 - May 27, 2008

Process control monitors for interferometric modulators

US7369252 - May 06, 2008

System capable of determining applied and anodized coating thickness of a coated-anodized product

US7365860 - Apr 29, 2008

Method and system for monitoring component consumption

US7353141 - Apr 01, 2008

Phase measuring method and apparatus for measuring characterization of optical thin films

US7327467 - Feb 05, 2008

Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

US7315382 - Jan 01, 2008

In-situ critical dimension measurement

US7301645 - Nov 27, 2007

Method and system for on-line measurement of thickness and birefringence of thin plastic films

US7298492 - Nov 20, 2007

Thickness measurement of moving webs and seal integrity system using dual interferometer

US20070229846 - Oct 04, 2007

Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method

US20070229845 - Oct 04, 2007

Method of and apparatus for measuring layer thicknesses and layer homogeneities in containers

US20070229844 - Oct 04, 2007

Wavelength determining apparatus, method and program for thin film thickness monitoring light

US20070223008 - Sep 27, 2007

Apparatus for inspecting a ball-bumped wafer

US20070201032 - Aug 30, 2007

Coating thickness gauge

US20070195331 - Aug 23, 2007

Semiconductor fabricating apparatus with function of determining etching processing state

US7259866 - Aug 21, 2007

Process control monitors for interferometric modulators

US7259865 - Aug 21, 2007

Method and apparatus for performing highly accurate thin film measurements

US20070182970 - Aug 09, 2007

Method and system for measuring thin films

US7251043 - Jul 31, 2007

Device for high-accuracy measurement of dimensional changes

US7239397 - Jul 03, 2007

Method of and device for thickness measurements of thin films

US20070146725 - Jun 28, 2007

Method and system for monitoring component consumption

US7233878 - Jun 19, 2007

Method and apparatus for measuring thickness of a material

US7233401 - Jun 19, 2007

Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method

US7230720 - Jun 12, 2007

Multi-cavity fabry-perot interferometric thin-film sensor with built-in temperature compensation

US20070115480 - May 24, 2007

Self referencing heterodyne reflectometer and method for implementing

US20070109551 - May 17, 2007

items / page

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Thickness (18)

Film (15)

Measurements (15)

Method and apparatus (9)

Processing (9)

Method and system (8)