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Self referencing heterodyne reflectometer and method for implementing
US7589843
-
Sep 15, 2009
Measuring thickness of a device layer using reflectance and transmission profiles of baseline devices
US7586622
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Sep 08, 2009
Method of measuring micro-structure, micro-structure measurement apparatus, and micro-structure analytical system
US7580134
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Aug 25, 2009
Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring system
US7573582
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Aug 11, 2009
Method and system for analyzing low-coherence interferometry signals for information about thin film structures
US7564566
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Jul 21, 2009
System and method for brewster angle straddle interferometry
US7551294
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Jun 23, 2009
Self referencing heterodyne reflectometer and method for implementing
US7545503
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Jun 09, 2009
Method and apparatus for measuring thickness and optical properties of a thin-film on a substrate
US7492467
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Feb 17, 2009
Ellipsometric investigation of very thin films
US7483148
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Jan 27, 2009
Scanning interferometry for thin film thickness and surface measurements
US7468799
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Dec 23, 2008
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Film (4)
Thickness (4)
Measurements (2)
Self-referencing-heterodyne-reflectometer-implementing - self referencing heterodyne reflectometer implementing (2)