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Surface shape measurement apparatus and exposure apparatus

US20090286172 - Nov 19, 2009

Generating model signals for interferometry

US7619746 - Nov 17, 2009

Ultra precision profile measuring method

US7616324 - Nov 10, 2009

Interferometer with multiple modes of operation for determining characteristics of an object surface

US7616323 - Nov 10, 2009

Imaging optical system configured with through the lens optics for producing control information

US7612892 - Nov 03, 2009

Moire shape measurement apparatus using liquid crystal display panel

US20090268212 - Oct 29, 2009

Contour sensor incorporating mems mirrors

US20090262363 - Oct 22, 2009

High-definition vertical-scan interferometry

US7605925 - Oct 20, 2009

Data driver circuit for a dynamic random access memory (dram) controller or the like and method therefor

US20090245010 - Oct 01, 2009

System and method for providing voltage power gating

US20090245008 - Oct 01, 2009

Multiple channel interferometric surface contour measurement system

US7595892 - Sep 29, 2009

Measurement of the top surface of an object with/without transparent thin films in white light interferometry

US7595891 - Sep 29, 2009

Measuring method, measuring system, inspecting method, inspecting system, exposure method and exposure system, in which information as to the degree of the flatness of an object is pre-obtained

US7593100 - Sep 22, 2009

Methods and systems for interferometric analysis of surfaces and related applications

US7586620 - Sep 08, 2009

Apparatus and method for measuring surface topography of an object

US20090213386 - Aug 27, 2009

Method of measuring micro-structure, micro-structure measurement apparatus, and micro-structure analytical system

US7580134 - Aug 25, 2009

Interferometric apparatus for measuring moving object and optical interferometry method for measuring moving object

US7580133 - Aug 25, 2009

Three-dimensional shape measurement method and three-dimensional shape measurement apparatus

US7576869 - Aug 18, 2009

Apparatus for profile irregularity measurement and surface imperfection observation; method of profile irregularity measurement and surface imperfection observation; and inspection method of profile irregularity and surface imperfection

US20090195788 - Aug 06, 2009

Optical interference apparatus

US7570367 - Aug 04, 2009

Phase shifting interferometry with multiple accumulation

US7564568 - Jul 21, 2009

Analyzing surface structure using scanning interferometry

US20090182528 - Jul 16, 2009

Scanning simultaneous phase-shifting interferometer

US7561279 - Jul 14, 2009

Apparatus and method for manufacturing optical objects

US7556554 - Jul 07, 2009

Measurement method, a measurement apparatus, and a computer-readable recording medium

US20090168075 - Jul 02, 2009

Cantilever sensor system and profilers and biosensors using the same

US20090168073 - Jul 02, 2009

Method and apparatus for three-dimensional spectrally encoded imaging

US7551293 - Jun 23, 2009

Coordinate measuring machine with temperature adapting station

US20090153875 - Jun 18, 2009

Interferometric analysis of under-resolved features

US20090147268 - Jun 11, 2009

Method for automated measurement of three-dimensional shape of circuit boards

US7545512 - Jun 09, 2009

Super luminescent diode and manufacturing method thereof

US7541622 - Jun 02, 2009

Methods and systems for white light interferometry and characterization of films

US20090109444 - Apr 30, 2009

Interferometric measuring device

US7525666 - Apr 28, 2009

Compensation of systematic effects in low coherence interferometry

US7522288 - Apr 21, 2009

Apparatus and method of measuring thickness of lingual fur and acquiring vertical section image thereof

US7518734 - Apr 14, 2009

Surface profiling apparatus

US7518733 - Apr 14, 2009

Measuring apparatus, exposure apparatus, and device fabrication method

US20090091723 - Apr 09, 2009

Partially coherent illumination for inverse scattering full-field interferometric synthetic aperture microscopy

US20090086216 - Apr 02, 2009

Defect inspecting apparatus

US7508526 - Mar 24, 2009

Multiple frequency optical mixer and demultiplexer and apparatus for remote sensing

US20090051926 - Feb 26, 2009

Free-form optical surface measuring apparatus and method

US7492468 - Feb 17, 2009

Method and apparatus for performing optical imaging using frequency-domain interferometry

US20090027689 - Jan 29, 2009

Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

US20090015844 - Jan 15, 2009

Laser scanning interferometric surface metrology

US20090002716 - Jan 01, 2009

Surface profile measuring method

US7472042 - Dec 30, 2008

Methods and systems for interferometric analysis of surfaces and related applications

US7456975 - Nov 25, 2008

Measuring the shape, thickness variation, and material inhomogeneity of a wafer

US20080285053 - Nov 20, 2008

Shape measuring apparatus, exposure apparatus, and computer

US20080285052 - Nov 20, 2008

Interferometer and method for measuring characteristics of optically unresolved surface features

US20080266574 - Oct 30, 2008

Apparatus for optical measurement of an object

US7443513 - Oct 28, 2008

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Surface (14)

Interferometry (10)

Measurement (11)

Method FOR measuring (10)

Shape (6)

Method and systems (6)