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Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts
US7612893
-
Nov 03, 2009
Apparatus for profile irregularity measurement and surface imperfection observation; method of profile irregularity measurement and surface imperfection observation; and inspection method of profile irregularity and surface imperfection
US20090195788
-
Aug 06, 2009
Apparatus for measuring defects in a glass sheet
US7570366
-
Aug 04, 2009
Monitoring scan mirror motion in electro-optical readers and image projectors
US7497578
-
Mar 03, 2009
Optical system of a microlithographic projection exposure apparatus
US20090015845
-
Jan 15, 2009
Optical system of a microlithographic projection exposure apparatus
US7423765
-
Sep 09, 2008
Vibration-insensitive interferometer
US7405830
-
Jul 29, 2008
Method for determining distortion and/or image surface
US7400388
-
Jul 15, 2008
Interferometer for measurement of dome-like objects
US7375824
-
May 20, 2008
Apparatus and method for in situ and ex situ measurement of spatial impulse response of an optical system using phase-shiftin point-diffraction interferometry
US20080030742
-
Feb 07, 2008
Laser interferometer for repeatable mounting on the wall of a vacuum chamber
US7315380
-
Jan 01, 2008
Scanning interferometer for aspheric surfaces and wavefronts
US7218403
-
May 15, 2007
Interferometer for measurement of dome-like objects
US20070019207
-
Jan 25, 2007
Method for calibrating a radius test bench
US7154612
-
Dec 26, 2006
Method of calibrating an interferometer optics and method of processing an optical element having an aspherical surface
US7123365
-
Oct 17, 2006
Interferometer and interferance measurement method
US7106455
-
Sep 12, 2006
Apparatus for and method of measurement of aspheric surfaces using hologram and concave surface
US7072042
-
Jul 04, 2006
Method of manufacturing an optical element using a hologram
US7061626
-
Jun 13, 2006
Frequency-scanning interferometer with non-specular reference surface
US7057742
-
Jun 06, 2006
Method and system for characterizing aspheric surfaces of optical elements
US6999182
-
Feb 14, 2006
Scanning interferometer for aspheric surfaces and wavefronts
US6972849
-
Dec 06, 2005
Interferometer system for measuring surface shape
US6965435
-
Nov 15, 2005
Reconfigurable interferometer system
US6943896
-
Sep 13, 2005
Scanning interferometer for aspheric surfaces and wavefronts
US20050157311
-
Jul 21, 2005
Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses
US6909510
-
Jun 21, 2005
Method and system for measuring optical characteristics of a sub-component within a composite optical system
US6900896
-
May 31, 2005
Interferometric system for automated radius of curvature measurements
US6894788
-
May 17, 2005
Reconfigurable interferometer system
US20050083537
-
Apr 21, 2005
Frequency transform phase shifting interferometry
US6882432
-
Apr 19, 2005
Scanning interferometer for aspheric surfaces and wavefronts
US6879402
-
Apr 12, 2005
Interferometer and interferance measurement method
US6842255
-
Jan 11, 2005
Methods and apparatus for interferometric dimensional metrology
US6801323
-
Oct 05, 2004
Scanning interferometer for aspheric surfaces and wavefronts
US6781700
-
Aug 24, 2004
Apparatus and method for measuring aspherical optical surfaces and wavefronts
US6771375
-
Aug 03, 2004
Method, system, and computer program product for determining refractive index distribution
US6741362
-
May 25, 2004
Dispersive null-optics for aspheric surface and wavefront metrology
US6717679
-
Apr 06, 2004
Rapid in-situ mastering of an aspheric fizeau
US6714308
-
Mar 30, 2004
Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses
US6704112
-
Mar 09, 2004
Methods and devices for measuring a surface profile of an optical element
US20040036890
-
Feb 26, 2004
Interferometric optical systems having simultaneously scanned optical path length and focus
US20040027576
-
Feb 12, 2004
Surface profile measurement apparatus
US6646748
-
Nov 11, 2003
Profiling method
US6633389
-
Oct 14, 2003
Method and apparatus for measuring aspherical shape and method for manufacturing optical element using them
US6624895
-
Sep 23, 2003
Mirror detection signal generator
US20030152000
-
Aug 14, 2003
Interferometer
US6577400
-
Jun 10, 2003
Scanning interferometer for aspheric surfaces and wavefronts
US20030103215
-
Jun 05, 2003
Conic constant measurement methods for refractive microlenses
US20030053077
-
Mar 20, 2003
Rapid in-situ mastering of an aspheric fizeau
US20030048457
-
Mar 13, 2003
Scanning interferometer for aspheric surfaces and wavefronts
US20030043385
-
Mar 06, 2003
Interferometer system for measuring surface shape
US20030025916
-
Feb 06, 2003
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Cluster
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Interferometer (22)
Surface (20)
Measurement (10)
Methods and apparatus (7)
Methods and system (4)
Mirror - phase shifting (5)
Manufacturing optical element (2)
Hologram (2)
Radius (2)
Metrology (2)
Image (2)
Rapid-in-situ-mastering-aspheric-fizeau - rapid in-situ mastering aspheric fizeau (2)
Interferometry (2)
Methods calibrating (2)