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Multi-axis interferometers and methods and systems using multi-axis interferometers
US7548322
-
Jun 16, 2009
Method for automated measurement of three-dimensional shape of circuit boards
US7545512
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Jun 09, 2009
Substrate inspection method, manufacturing method of semiconductor device and substrate inspection apparatus
US7504625
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Mar 17, 2009
Interferometry systems and methods using spatial carrier fringes
US7492469
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Feb 17, 2009
Dual polarization interferometers for measuring opposite sides of a workpiece
US7471396
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Dec 30, 2008
Method and apparatus for tilt corrected lateral shear in a lateral shear plus rotational shear absolute flat test
US7446883
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Nov 04, 2008
Apparatus for measuring defects in a glass sheet
US20080198366
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Aug 21, 2008
Method for calibration and removal of wavefront errors
US7405833
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Jul 29, 2008
Method for determining distortion and/or image surface
US7400388
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Jul 15, 2008
Interferometers for the measurement of large diameter thin wafers
US7388675
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Jun 17, 2008
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Interferometers (3)
Measurement (2)