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current-us-classification:361/233
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Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
US20090284823
-
Nov 19, 2009
Electrostatic chuck
US7619870
-
Nov 17, 2009
Electrostatic chuck structure for semiconductor manufacturing apparatus
US7580238
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Aug 25, 2009
Snapdown prevention in voltage controlled mems devices
US7573695
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Aug 11, 2009
Static eliminator and electric discharge module
US7561403
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Jul 14, 2009
Particle trap
US20090147435
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Jun 11, 2009
Using multiple coulomb islands to reduce voltage stress
US20090147434
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Jun 11, 2009
Levitating substrate being charged by a non-volatile device and powered by a charged capacitor or bonding wire
US20090147433
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Jun 11, 2009
Forming large planar structures from substrates using edge coulomb forces
US20090147432
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Jun 11, 2009
Assembling stacked substrates that can form cylindrical inductors and adjustable transformers
US20090147431
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Jun 11, 2009
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Current-status (4)
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Voltage (2)
Structures (2)
Coulomb (2)