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Methods and apparatus for identifying small lot size substrate carriers
US7611319
-
Nov 03, 2009
Equipment front end module
US7604449
-
Oct 20, 2009
Variable lot size load port
US7597523
-
Oct 06, 2009
Variable lot size load port
US7585144
-
Sep 08, 2009
Substrate handling chamber with movable substrate carrier loading platform
US7585142
-
Sep 08, 2009
Load port configurations for small lot size substrate carriers
US7578647
-
Aug 25, 2009
Vacuum interface between a mini-environment pod and a piece of equipment
US7568875
-
Aug 04, 2009
Invertible front opening unified pod
US20090081014
-
Mar 26, 2009
Method of handling clamshell containers containing a particulate aliquot
US20090010750
-
Jan 08, 2009
Pod cover removing-installing apparatus
US20080206028
-
Aug 28, 2008
Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system
US7416998
-
Aug 26, 2008
Method and arrangement for emptying big bags
US7374387
-
May 20, 2008
Load port door with simplified foup door sensing and retaining mechanism
US20080112784
-
May 15, 2008
Pod cover removing-installing apparatus
US7344349
-
Mar 18, 2008
Apparatus for opening/closing cover of thin-film disc containing cassette
US20070253798
-
Nov 01, 2007
Removable cover assembly with pivoting covers and hoisting pins
US7278546
-
Oct 09, 2007
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
US7258520
-
Aug 21, 2007
Inspection apparatus for liquid crystal display panels
US20070154294
-
Jul 05, 2007
Apparatus for loading substrate of liquid crystal display
US20070154293
-
Jul 05, 2007
Displaced wafer detection systems
US20070154291
-
Jul 05, 2007
Methods and apparatus for opening and closing substrate carriers
US20070140822
-
Jun 21, 2007
Apparatus and methods for a substrate carrier having an inflatable seal
US20070116545
-
May 24, 2007
Electronic component feeding device and electronic component counting apparatus having the same
US7219823
-
May 22, 2007
Disc cassette delidder and feeder system for data storage devices
US7165303
-
Jan 23, 2007
Apparatus for loading and unloading a supply of plates in an automated plate handler
US20060245870
-
Nov 02, 2006
Pod cover removing-installing apparatus
US20060239803
-
Oct 26, 2006
Pod cover removing-installing apparatus
US7112027
-
Sep 26, 2006
Device for the detection of substrates stacked with a specific spacing
US7109509
-
Sep 19, 2006
Material spreading device
US7104478
-
Sep 12, 2006
Multi-axial positioning mechanism for a fims system port door
US7102124
-
Sep 05, 2006
Substrate processing apparatus
US20060182560
-
Aug 17, 2006
Apparatus for loading and unloading a supply of plates in an automated plate handler
US7055431
-
Jun 06, 2006
Package take-out apparatus, package container thereof and unwrapping apparatus
US7048489
-
May 23, 2006
Enclosed container lid opening/closing system and enclosed container lid opening/closing method
US20060088406
-
Apr 27, 2006
Substrate carrier having door latching and substrate clamping mechanisms
US20060072992
-
Apr 06, 2006
Removable cover assembly with pivoting covers and hoisting pins
US20060006188
-
Jan 12, 2006
Wafer processing apparatus capable of mapping wafers
US6984839
-
Jan 10, 2006
Mounting/demounting device for wafer carrier lid
US6984097
-
Jan 10, 2006
Load port for clean system
US20050265812
-
Dec 01, 2005
Automatic feeder for carrier-supported contacts
US6966738
-
Nov 22, 2005
Small lot size substrate carriers
US20050232734
-
Oct 20, 2005
System for handling components at a component mounting machine
US6948541
-
Sep 27, 2005
Electronic part feeder
US6926797
-
Aug 09, 2005
Automatic opening device for solid material package, preparation device for photographic-processing solution, and photographic-processing device
US20050163601
-
Jul 28, 2005
Part feeder
US6910514
-
Jun 28, 2005
Latching mechanism for locking/unlocking the door of a wafer container
US6902063
-
Jun 07, 2005
Drive-section-isolated foup opener
US20050111943
-
May 26, 2005
Front-opening unified pod auto-loading structure
US6896470
-
May 24, 2005
Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
US20050095098
-
May 05, 2005
System and method for unloading a viscous product from a bag
US6860696
-
Mar 01, 2005
items / page
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Cluster
:
10
50
100
250
500
Substrate carriers (8)
Load (9)
Pod (8)
Mechanism (5)
Lot size (5)
Wafer (5)
Container (5)
Equipment (3)
Handling (3)
Part feeder (2)
Front (2)
Lid (2)
Bag (2)
Foup (2)
Package (2)
Material (2)
Cassette - disc (2)
Opener (2)
Removable-cover-assembly-pivoting-covers-hoisting-pins (2)
Detection (2)
Component (2)
Containing (2)
Processing apparatus (2)
Liquid crystal display (2)