A combination vacuum gauge provides simultaneous absolute and differential pressure measurements over a wide range of pressures ranging from atmospheric pressures to ultrahigh vacuum by processing the readings from an absolute high vacuum gauge (e.g., an ionization gauge and/or a heat-loss sensor), a differential low vacuum gauge providing a differential relative to ambient pressure (e.g., a diaphragm sensor), and a barometric absolute pressure sensor exposed to the ambient atmosphere outside the measurement region. The barometric absolute pressure sensor reading is used to convert the differential vacuum gauge reading from uncalibrated differential pressure to calibrated absolute pressure.
A method and apparatus for measuring gas pressure by combining an ionization gauge with at least one other vacuum sensor. Nonvolatile memory coupled to the vacuum gauge contains calibration parameters unique to each individual sensor based on factory calibration. The nonvolatile memory may contain calibration parameters for a heat-sensitive vacuum sensor to compensate for the temperature gradients generated by the ionization gauge. The calibration parameters are a function of calibration data determined when the ionization gauge is both on and off. The nonvolatile memory may store a window of measurement data of the vacuum gauge that is updated at predetermined time intervals and in response to an event, such as an error event, to aid in investigating the cause of vacuum gauge malfunction or failure.
Refrigerant freezeout is prevented by the use of a controlled bypass flow that causes a warming of the lowest temperature refrigerant in a refrigeration system that achieves very low temperatures by using a mixture of refrigerants comprising at least two refrigerants with boiling points that differ by at least 50.degree. C. This control capability enables reliable operation of the very low temperature system.
A piston includes a circumferential groove having a dynamic split seal ring having a flat axially facing surface, a static seal ring having a flat axially facing surface abutting the flat surface of the dynamic seal ring, and a spring mounted within the groove. The spring exerts an axial force on the static seal ring that serves to distribute the axial load with a static seal over the dynamic split seal, thereby preventing shuttling of the split seal within the groove and restricting the leak path of the seal. Preferably, the static seal ring is a polymer and can be an L-ring, a load ring with a flange that abuts the piston body, or flanged designs. In addition, a load ring can be fitted between the L-ring and the spring. The split seal ring has at least one radial spring mounted within the seal ring to create a radial force on the split seal ring. The piston can also include a sleeve that mounts to the piston body, the sleeve forming a wall of the groove. The piston can be a displacer mounted within a cylinder of a refrigerator.
A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stage array has an open configuration of baffles coated with adsorbent. Substantially all of the adsorbent has a direct line of sight to the radiation shield or to the opening in the radiation shield, and substantially all of the baffles are coated with adsorbent. In one form, the second stage cryopump array comprises an array of discs fanned to define a generally ball shaped envelope.