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Patent # Description
2017/0285483 METHOD AND APPARATUS FOR USING PATTERNING DEVICE TOPOGRAPHY INDUCED PHASE
A method including, for an illumination by radiation of a pattern of a lithographic patterning device, obtaining calculated wavefront phase information caused...
2017/0285482 ORGANIC PROCESSING LIQUID AND PATTERN FORMING METHOD
Disclosed herein are an organic processing liquid for resist film patterning which is capable of suppressing the occurrence of defects in resist patterns, and...
2017/0285481 DEVELOPMENT METHOD, DEVELOPMENT DEVICE, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
A development method includes: a development step of supplying a developing solution to a surface of a substrate for manufacturing a semiconductor device after...
2017/0285480 MASK PLATE, EXPOSURE SYSTEM AND EXPOSURE METHOD
A mask plate, an exposure system and an exposure method are disclosed. The mask plate includes a control unit (10) and a liquid crystal cell (20), wherein the...
2017/0285479 CURING SUBSTRATE PRETREATMENT COMPOSITIONS IN NANOIMPRINT LITHOGRAPHY
A nanoimprint lithography method includes disposing a pretreatment composition on a nanoimprint lithography substrate to form a pretreatment coating, and...
2017/0285478 COATING COMPOSITIONS FOR PHOTOLITHOGRAPHY
In a first aspect, methods are provided that comprise: (a) applying a curable composition on a substrate; (b) applying a hardmask composition above the curable...
2017/0285477 PHOTOSENSITIVE RESIN COMPOSITION, CURED FILM, ELEMENT PROVIDED WITH CURED FILM, AND METHOD FOR MANUFACTURING...
To provide a photosensitive resin composition which is capable of forming a pattern with high resolution and obtaining a cured film having excellent heat...
2017/0285476 CHEMICALLY AMPLIFIED POSITIVE-TYPE PHOTOSENSITIVE RESIN COMPOSITION
A chemically amplified positive-type photosensitive resin composition that can be well developed with an aqueous basic solution having low pH, a substrate with...
2017/0285475 NEGATIVE-WORKING PHOTORESIST COMPOSITIONS FOR LASER ABLATION AND USE THEREOF
A composition crosslinkable by broad band UV radiation, which after cross-linking is capable of cold ablation by a UV Excimer Laser emitting between 222 nm and...
2017/0285474 PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE RESIN LAMINATE, RESIN PATTERN PRODUCTION METHOD, CURED FILM,...
The present invention provides a photosensitive resin laminate in which (A) an alkali-soluble polymer, (B) a compound having an ethylenically unsaturated...
2017/0285473 COMPOSITION FOR FORMING INTERLAYER INSULATING FILM, INTERLAYER INSULATING FILM, METHOD FOR FORMING INTERLAYER...
A composition for forming an interlayer insulating film including a polymerizable monomer, an imide compound represented by general formula (z-1), a reaction...
2017/0285472 COMPOSITION FOR FORMING INTERLAYER INSULATING FILM, INTERLAYER INSULATING FILM, METHOD FOR FORMING INTERLAYER...
A composition for forming an interlayer insulating film including a polymerizable monomer, an alkali-soluble elastomer containing a polymerizable group, an...
2017/0285471 FLUORINE-CONTAINING COMPOSITION, SUBSTRATE FOR PATTERN FORMATION, PHOTODEGRADABLE COUPLING AGENT, PATTERN...
Disclosed is a fluorine-containing composition containing a fluorine-containing compound represented by general formula (1) and a fluorine-based solvent. ...
2017/0285470 CHOLATE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME
New photoacid generator compounds ("PAGs") are provided that comprise a cholate moiety and photoresist compositions that comprise such PAG compounds.
2017/0285469 RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN
A resist composition which includes a polymer compound including a structural unit which is derived from an acrylic ester in which the hydrogen atom bonded to...
2017/0285468 PHOTOCURABLE COMPOSITION FOR IMPRINTS, PATTERN FORMING METHOD, AND METHOD FOR MANUFACTURING DEVICE
Provided are a photocurable composition for imprints, having good releasability and temporal stability of the releasability, a pattern forming method, and a...
2017/0285467 IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus comprising: a...
2017/0285465 PATTERN FORMING METHOD AS WELL AS PRODUCTION METHODS FOR PROCESSED SUBSTRATE, OPTICAL COMPONENT, CIRCUIT BOARD,...
A pattern is formed on a substrate with a layer of a curable composition (A1) containing a component (a1) serving as a polymerizable compound on a surface of...
2017/0285464 PATTERN FORMING METHOD AS WELL AS PRODUCTION METHODS FOR PROCESSED SUBSTRATE, OPTICAL COMPONENT, CIRCUIT BOARD,...
A pattern is formed on a substrate with forming a layer of a curable composition (A1) containing a component (a1) serving as a polymerizable compound and a...
2017/0285463 PATTERN FORMING METHOD AS WELL AS PRODUCTION METHODS FOR PROCESSED SUBSTRATE, OPTICAL COMPONENT, CIRCUIT BOARD,...
A pattern is formed on a substrate with forming a layer of a curable composition (A1) containing a component (a1) serving as a polymerizable compound (a1) and...
2017/0285462 PATTERN FORMING METHOD AS WELL AS PRODUCTION METHODS FOR PROCESSED SUBSTRATE, OPTICAL COMPONENT, CIRCUIT BOARD,...
A pattern is formed on a substrate with a layer of a curable composition (A1) containing a component (a1) serving as a polymerizable compound on a surface of...
2017/0285461 PELLICLE FILM, PELLICLE FRAME, PELLICLE, AND METHOD FOR PRODUCING SAME
A pellicle is contaminated with dust or the like for various reasons during the production thereof. Especially, there is a problem that the risk that the dust...
2017/0285460 MASK BLANK, METHOD FOR MANUFACTURING MASK BLANK AND TRANSFER MASK
There is provided a mask blank including on a substrate: a thin film for forming a transfer pattern; a resist underlayer formed on the thin film and made of a...
2017/0285459 PHOTOMASK AND METHOD FOR MANUFACTURING COLUMN SPACER FOR COLOR FILTER USING THE SAME
The present invention relates to a photomask and a method for manufacturing a column spacer for a color filter using the same, and according to one aspect of...
2017/0285458 MASK BLANK, PHASE SHIFT MASK, METHOD FOR MANUFACTURING PHASE SHIFT MASK, AND METHOD FOR MANUFACTURING...
A mask blank with phase shift film where changes in transmittance and phase shift to an exposure light of an ArF excimer laser are suppressed. The film...
2017/0285457 LASER ABLATION TOOLING VIA SPARSE PATTERNED MASKS
A sparse patterned mask for use in a laser ablation process to image a substrate. The mask has a plurality of apertures for transmission of light and...
2017/0285456 Stereoscopic Light Recycling Device And Method Of Construction Thereof
A stereoscopic device light recycling device and method of construction thereof is provided. A beam splitter is constructed of substantially orthogonally...
2017/0285455 DIGITAL 3D/360 DEGREE CAMERA SYSTEM
The digital 3D/360.degree. camera system is an omnidirectional stereoscopic device for capturing image data that may be used to create a 3-dimensional model...
2017/0285454 High elastic modulus projection screen substrates
A stiffening strip at selected edges of a screen may enable the use and mounting of a high-elastic modulus substrate screen material. Such screen materials may...
2017/0285453 DMD PROJECTOR WITH TIR PRISM
A projection apparatus comprising a prism assembly 7 including an input sub-prism 1 possessing a first interface surface and an output sub-prism 2 adjacent to...
2017/0285452 ILLUMINATION DEVICE AND DISPLAY UNIT
A first illumination device includes a light source that emits light having directivity, and a uniform illumination optical system including a first fly-eye...
2017/0285451 PROJECTION OPTICAL SYSTEM AND IMAGE PROJECTOR
A projection optical system of the present disclosure projects onto a projection surface (screen) an image ray bundle formed on an image display element, and...
2017/0285450 PROJECTOR AND METHOD FOR CONTROLLING PROJECTOR
A projector including a light source, a power supply section, a power supply control section that controls power supply from the power supply section, a...
2017/0285449 DISPLAY SHELF MODULES WITH PROJECTORS FOR DISPLAYING PRODUCT INFORMATION AND MODULAR SHELVING SYSTEMS...
Modular shelving systems and display shelves for modular shelving systems are disclosed. In one embodiment, a modular shelving system includes a shelf support...
2017/0285448 HOLOGRAM PROJECTOR
The present invention describes a hologram projector that is used to project three dimensional high definition images on the screen using various electronic...
2017/0285447 USER INTERCHANGEABLE ORNAMENTAL PORTIONS OF ELECTRONIC DEVICES
A method and apparatus is disclosed for the customization of electronic equipment of which portable audio players, portable disc players, portable digital...
2017/0285446 FILTER HOLDER
Filter holder (10) having a tubular overall shape and made of an elastic material, an annular groove (40) being formed on the interior surface of the filter...
2017/0285445 PLATE FOR CAMERA EQUIPMENT
A plate provides clearance between a camera and a quick-release receiver securing the camera to a support.
2017/0285444 CAMERA MODULE AND FOLDED OPTICAL SYSTEM FOR LASER-BASED SPEED GUN
A laser-based speed gun includes a camera module and a folded optical system including an objective lens and an eyepiece lens. The folded optical system...
2017/0285443 CAMERA MODULE AND METHOD FOR CONTROLLING THE SAME
A camera module is provided, including a holder, a base, a bottom, an image sensor, and a first biasing element. The holder holds an optical lens and is...
2017/0285442 OPTICAL CLOCK GENERATOR
An optical clock generator includes a nonlinear cavity unit, a cross-waveguide logic gate unit and a delayer unit; and is of a six-port photonic crystal...
2017/0285441 PHOTONIC CRYSTAL ALL-OPTICAL D-TYPE FLIP-FLOP
A photonic crystal all-optical D-type flip-flop includes an optical switch unit, a photonic crystal structure unit including two signal-input ends, a...
2017/0285440 TE OPTICAL SWITCH WITH HIGH EXTINCTION RATIO BASED ON SLAB PHOTONIC CRYSTALS
The present invention discloses a TEOS with a high extinction ratio based on slab PhCs which comprises an upper slab PhC and a lower slab PhC connected as a...
2017/0285439 TM OPTICAL SWITCH BASED ON SLAB PHOTONIC CRYSTALS WITH HIGH DEGREE OF POLARIZATION AND LARGE EXTINCTION RATIO
The present invention discloses a TMOS based on slab PhCs with a high DOP and a large EXR, which comprises an upper slab PhC and a lower slab PhC; the upper...
2017/0285438 MACH-ZEHNDER MODULATOR, METHOD FOR FABRICATING MACH-ZEHNDER MODULATOR
A Mach-Zehnder modulator includes: a semiconductor structure having a first waveguide portion, a second waveguide portion, and a third waveguide portion, which...
2017/0285437 SILICON MODULATORS AND RELATED APPARATUS AND METHODS
An optical Mach Zehnder modulator is described. The optical Mach Zehnder modulator may comprise a plurality of segments separated by curved waveguides. For...
2017/0285436 DIFFERENTIAL PHASE BIASING MODULATOR APPARATUS AND METHOD
A circuit that allows the control of a parameter in each arm of a Mach-Zehnder interferometer or modulator in push-pull mode using a single control terminal...
2017/0285435 DISPLAY UNIT AND ELECTRONIC APPARATUS
A display unit of the present disclosure includes a display layer and a color filter. The display layer has a plurality of pixels each including an...
2017/0285434 ELECTRONIC PAPER DISPLAY MODULE, METHOD FOR MAKING SAME AND ELECTRONIC PAPER DISPLAY DEVICE
An electronic paper display module includes a substrate, a circuit layer disposed on one side of the substrate, an insulating layer disposed on the substrate...
2017/0285433 MONITORING SITES CONTAINING SWITCHABLE OPTICAL DEVICES AND CONTROLLERS
A site monitoring system may analyze information from sites to determine when a device, a sensor, a controller, or other structure associated with optically...
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