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Patent # Description
2017/0365475 LASER DOPING APPARATUS AND LASER DOPING METHOD
The laser doping apparatus may irradiate a predetermined region of a semiconductor material with a pulse laser beam to perform doping. The laser doping...
2017/0365474 DEPOSITING A PASSIVATION LAYER ON A GRAPHENE SHEET
Embodiments of the disclosed technology include depositing a passivation layer onto a surface of a wafer that may include a graphene layer. The passivation...
2017/0365472 CUT LAST SELF-ALIGNED LITHO-ETCH PATTERNING
The present disclosure relates to a method of performing a semiconductor fabrication process. The method may be performed by forming a spacer material having...
2017/0365471 MASK SUBSTRATE STRUCTURE
The present disclosure relates to lithographic masks and, more particularly, to a lithographic mask substrate structure and methods of manufacture. The mask...
2017/0365470 DEVICE SUBSTRATE, METHOD OF MANUFACTURING DEVICE SUBSTRATE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
According to one embodiment, a device substrate includes a multilayer film that includes a film constituting a device element and is disposed on a substrate. A...
2017/0365469 SEMICONDUCTOR DEVICE STRUCTURE AND METHODS OF ITS PRODUCTION
The present document discloses a semiconductor device structure (1) comprising a SiC substrate (11), an In.sub.x1Al.sub.y1Ga.sub.1-x1-y1N buffer layer (13),...
2017/0365468 PRE-CLEAN OF SILICON GERMANIUM FOR PRE-METAL CONTACT AT SOURCE AND DRAIN AND PRE-HIGH K AT CHANNEL
The present disclosure generally relates to methods for removing contaminants and native oxides from substrate surfaces. The method includes exposing a surface...
2017/0365467 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
There is provided a method of manufacturing a semiconductor device, which includes: forming a first seed layer containing silicon and germanium on a substrate...
2017/0365466 FILM FORMING METHOD AND ALUMINUM NITRIDE FILM FORMING METHOD FOR SEMICONDUCTOR APPARATUS
The present disclosure provides a film forming method and an aluminum nitride film forming method for a semiconductor device. The film forming method for a...
2017/0365465 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR MANUFACTURING APPARATUS
There is provided a method of manufacturing a semiconductor device, which includes: forming a silicon film inside a recess formed in a surface of a workpiece...
2017/0365464 Compound Semiconductor Substrate and Method of Forming a Compound Semiconductor Substrate
A method of forming a compound semiconductor substrate includes providing a crystalline base substrate having a first semiconductor material and a main...
2017/0365463 EPITAXIAL SILICON CARBIDE SINGLE CRYSTAL WAFER AND PROCESS FOR PRODUCING THE SAME
An epitaxial silicon carbide single crystal wafer having a small depth of shallow pits and having a high quality silicon carbide single crystal thin film and a...
2017/0365462 REMOTE PLASMA BASED DEPOSITION OF OXYGEN DOPED SILICON CARBIDE FILMS
Disclosed are methods and systems for providing oxygen doped silicon carbide. A layer of oxygen doped silicon carbide can be provided under process conditions...
2017/0365461 DISPLAY DEVICE, DRIVING METHOD OF THE SAME, AND ELECTRONIC DEVICE
A display device which can display a clear image and can display an image with low power consumption is provided. The display device includes an arithmetic...
2017/0365460 METHOD AND A PROCESSING DEVICE FOR PROCESSING AT LEAST ONE CARRIER
A processing device including: a chamber to accommodate at least one carrier in a processing region of the chamber, an inlet structure disposed over the...
2017/0365459 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM
To reduce a hydroxy group in a silicon oxide film formed at a low temperature and obtain a silicon oxide film with an excellent film quality, (a) accommodating...
2017/0365458 Adduct-Based System and Methods for Analysis and Identification of Mass Spectrometry Data
A system and method to screen a plurality of molecules in datasets obtained from mass spectroscopy, including selecting and receiving at least one dataset of...
2017/0365457 Ion Trap Mass Spectrometer
An apparatus 41 and operation method are provided for an electrostatic trap mass spectrometer with measuring frequency of multiple isochronous ionic...
2017/0365456 Ion Trap Mass Spectrometer
An apparatus 41 and operation method are provided for an electrostatic trap mass spectrometer with measuring frequency of multiple isochronous ionic...
2017/0365455 CONCENTRIC APCI SURFACE IONIZATION ION SOURCE, ION GUIDE, AND METHOD OF USE
A concentric APCI surface ionization probe, supersonic sampling tube, and method for use of the concentric APCI surface ionization probe and supersonic...
2017/0365454 CHEMICALLY MODIFIED ION MOBILITY SEPARATION APPARATUS AND METHOD
An ion mobility spectrometry apparatus and method wherein ions are selected using an AC gate, then separated along a drift axis while providing a drift gas...
2017/0365453 Methods of Performing Ion-Ion Reactions in Mass Spectrometry
A method is described that produces product ions for mass analysis, the method comprising the steps of: introducing precursor ions into an RF electric field...
2017/0365452 Method of Calibrating Ion Signals
A method of mass or ion mobility spectrometry is disclosed comprising: providing an ion source for generating analyte ions and reference ions; providing a mass...
2017/0365451 SPUTTERING APPARATUS AND METHOD FOR FORMING SEMICONDUCTOR FILM USING SPUTTERING APPARATUS
A novel sputtering apparatus capable of separating functions can be provided. A sputtering apparatus is capable of forming a semiconductor film and includes a...
2017/0365450 CLEANING PROCESS FOR REMOVING BORON-CARBON RESIDUALS IN PROCESSING CHAMBER AT HIGH TEMPERATURE
Embodiments of the invention generally relate to methods for removing a boron-carbon layer from a surface of a processing chamber using water vapor plasma...
2017/0365449 RF RETURN STRAP SHIELDING COVER
Embodiments described herein generally relate to a substrate support assembly having a shield cover. In one embodiment, a substrate support assembly is...
2017/0365448 COIL FILAMENT FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SOURCE
A vapor deposition source that includes a substantially vertical plate to which first and second filament posts are coupled. The vapor deposition source also...
2017/0365447 PLASMA GENERATOR APPARATUS
Provided is a plasma generator apparatus for forming a thin film in local plasma atmosphere at a predetermined spatial period. The plasma generator apparatus...
2017/0365446 MICROWAVE SUPPLY APPARATUS, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING METHOD
A microwave supply apparatus includes a waveguide, a circulator, and a matcher, a first port of the circulator receives a microwave from an input end. First...
2017/0365445 PLASMA PROCESSING APPARATUS AND WAVEFORM CORRECTION METHOD
A plasma processing apparatus includes an electrode to which a high frequency for plasma generation is applied and which serves as a mounting table for a...
2017/0365444 Plasma Processing Apparatus
A plasma processing apparatus includes a chamber, a window plate disposed in an upper portion of the chamber and having a fastening hole defined therein, an...
2017/0365443 GAS DISTRIBUTION PLATE ASSEMBLY FOR HIGH POWER PLASMA ETCH PROCESSES
A gas distribution plate assembly for a processing chamber is provided that in one embodiment includes a body made of a metallic material, a base plate...
2017/0365442 Charged Particle Beam System and Method of Aberration Correction
There is provided a charged particle beam system for reducing phase variations in a charged particle beam due to sixth order three-lobe aberration. The charged...
2017/0365441 AUTOMATIC ALIGNMENT FOR HIGH THROUGHPUT ELECTRON CHANNELING CONTRAST IMAGING
An automatic method is provided to align a semiconductor crystalline substrate for electron channeling contrast imaging (ECCI) in regions where an electron...
2017/0365440 APPARATUSES AND METHODS FOR GENERATING DISTRIBUTED X-RAYS IN A SCANNING MANNER
An apparatus and method to generate distributed x-rays. A hot cathode of an electron gun is used in vacuum to generate electron beams having certain initial...
2017/0365439 FIELD EMISSION DEVICE AND REFORMING TREATMENT METHOD
In a vacuum chamber (1), an emitter (3) and a target (7) are opposed to each other. A guard electrode (5) is disposed around an outer circumference of an...
2017/0365438 COMPACT MODULAR CATHODE
Example compact modular electron beam units are provided that can be used to generate electron beams using field emitter elements. A modular electron beam unit...
2017/0365437 FUSE HOLDER AND CARRIER
A fuse holder for holding a fuse is provided. The fuse holder includes a body, a line side connector supported by the body, and a load side connector supported...
2017/0365436 FUSE HOLDER, CARRIER AND ASSOCIATED METHOD
A fuse holder for holding a fuse is provided that includes a body, a line side connector supported by the body, and a load side connector supported by the...
2017/0365435 FUSE BOX FOR MOTOR VEHICLE
The invention relates to a box (10) including a pair of fuses (14) intended for protecting an electrical apparatus. Each of the fuses (24, 26) has a first end...
2017/0365434 HIGH VOLTAGE POWER FUSE INCLUDING FATIGUE RESISTANT FUSE ELEMENT AND METHODS OF MAKING THE SAME
A power fuse includes a housing, first and second conductive terminals extending from the housing, and at least one fatigue resistant fuse element assembly...
2017/0365433 PRESSURE-COMPENSATED FUSE ASSEMBLY
A pressure-compensated fuse assembly may include a first chamber housing a first fluid and a plurality of solid particles. Additionally, the fuse assembly may...
2017/0365432 ELECTROMAGNETIC DEVICE AND ELECTROMAGNETIC RELAY EQUIPPED WITH ELECTROMAGNETIC DEVICE
An electromagnetic device includes: a coil configured to generate a first magnetic flux; a fixed member, a movable member configured to reciprocate to separate...
2017/0365431 ELECTROMAGNETIC DEVICE AND ELECTROMAGNETIC RELAY EQUIPPED WITH ELECTROMAGNETIC DEVICE
An electromagnetic device includes a coil, a fixed member, a movable member configured to reciprocate to separate from the fixed member by a predetermined gap...
2017/0365430 SYSTEM FOR CONTROLLING OPERATION OF A CONTACTOR USING A HIGH SIDE SENSE CIRCUIT AND A LOW SIDE SENSE CIRCUIT
A system for controlling operation of a contactor is provided. The system stops outputting a control signal to open the contactor, and then measures a low side...
2017/0365429 METHOD FOR ADJUSTING A MAGNETIC RELEASE MECHANISM
A method for adjusting a magnetic release mechanism includes steps: a first measurement of the present release current I of the magnetic release mechanism is...
2017/0365428 THERMAL PROTECTOR
A thermal protector includes, in a fixed manner, a first terminal and a second terminal that are respectively connected to external circuits, at lower...
2017/0365427 PCM SWITCH AND METHOD OF MAKING THE SAME
One example includes a method for making a switch. The method includes forming an insulating layer over a substrate. The method also includes forming a...
2017/0365426 COUPLING ELEMENT FOR AN ELECTRIC SWITCHING DEVICE
A coupling element is provided for an electric switching device wherein the coupling element includes a first switching contact for opening and closing an...
2017/0365425 SAFETY SWITCH ASSEMBLY
The invention relates to a safety switch assembly (100) having a switch installation (120) having at least one switching member (12) and at least one actuation...
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