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Patent # Description
2018/0033623 METHODS OF PROCESSING A SUBSTRATE, METHODS OF PATTERNING A SUBSTRATE, AND METHODS OF FORMING A HOLE PATTERN IN...
A method for processing a substrate is provided. The method comprises forming a patterned photoresist over a first material, the patterned photoresist...
2018/0033622 DOPED ALD FILMS FOR SEMICONDUCTOR PATTERNING APPLICATIONS
Methods and apparatuses for patterning substrates using a positive patterning scheme are described herein. Methods involve receiving a substrate having a...
2018/0033621 METHOD OF FORMING STRUCTURES WITH V SHAPED BOTTOM ON SILICON SUBSTRATE
The present disclosure generally relate to methods of processing a substrate in an epitaxy chamber. The method includes applying a passivating agent containing...
2018/0033620 ROOM TEMPERATURE METHOD FOR THE PRODUCTION OF ELECTROTECHNICAL THIN LAYERS, THE USE OF SAME, AND A THIN LAYER...
Electrotechnical thin layers which can be used as a heating resistor and/or substrate for conductive layers are produced, in established methods, at high...
2018/0033619 PERFORMING DECOUPLED PLASMA FLUORINATION TO REDUCE INTERFACIAL DEFECTS IN FILM STACK
Embodiments of the present disclosure generally relate to methods for forming a dielectric material on a substrate, and more specifically, to methods for...
2018/0033618 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
A substrate processing apparatus includes: a protrusion portion formed by a side peripheral wall of a processing container which swells outward, and configured...
2018/0033617 ELECTRONIC APPARATUS AND MANUFACTURING METHOD OF THE SAME
According to one embodiment, an electronic apparatus includes a first substrate including a first basement and a first conductive layer, a second substrate...
2018/0033616 METHOD AND APPARATUS FOR FILLING A GAP
According to the invention a method for filling one or more gaps created during manufacturing of a feature on a substrate is provided by providing the...
2018/0033615 SILICON GERMANIUM SELECTIVE OXIDATION PROCESS
Implementations described herein relate to selective oxidation processes for semiconductor device manufacturing. In one implementation, the process includes...
2018/0033614 Compositions and Methods Using Same for Carbon Doped Silicon Containing Films
A composition and method for using the composition in the fabrication of an electronic device are disclosed. Compounds, compositions and methods for depositing...
2018/0033613 Filling Method and Filling Apparatus
This filling method includes a step of depressurizing a processing chamber, a step of bringing a filling material into contact with a surface of a wafer, a...
2018/0033612 MASK BLANK AND PHASE SHIFT MASK USING SAME
A mask blank includes: a light transmitting substrate; a first layer disposed on the light transmitting substrate, and including a chromium compound that...
2018/0033611 CLUSTER TOOL AND MANUFACUTURING METHOD OF SEMICONDUCTOR STRUCTURE USING THE SAME
A cluster tool includes a polyhedral transfer chamber, at least one processing chamber, at least one load lock chamber, and an electron beam (e-beam) source....
2018/0033610 CVD SILICON MONOLAYER FORMATION METHOD AND GATE OXIDE ALD FORMATION ON SEMICONDUCTOR MATERIALS
Methods for depositing silicon include cycling dosing between 1 and 100 cycles of one or more first chlorosilane precursors on a III-V surface at a temperature...
2018/0033609 REMOVAL OF NON-CLEAVED/NON-TRANSFERRED MATERIAL FROM DONOR SUBSTRATE
Embodiments relate to reclaiming a donor substrate that has previously supplied a thin film of material in a layer transfer process. Certain embodiments...
2018/0033608 Method and Apparatus for Forming Nitride Film
A method for forming a nitride film is provided. The method includes preparing a substrate to be processed, the substrate having a first base film formed of a...
2018/0033607 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
A method of manufacturing a semiconductor device is provided. The method includes forming a film on a substrate by causing a first precursor and a second...
2018/0033606 METHOD AND APPARATUS FOR FILLING A GAP
There is provided a method of filling one or more gaps by providing the substrate in a reaction chamber and introducing a first reactant to the substrate with...
2018/0033605 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Method for performing cleaning treatment on a substrate having a fine pattern provided with a film formed on the surface, comprises: a silylating step of...
2018/0033604 Method and Apparatus for Injection of Ions into an Electrostatic Ion Trap
A method of injecting ions into an electrostatic trap, comprising: generating ions in an ion source; transporting the ions from the ion source to an ion store...
2018/0033603 SAMPLE ANALYSIS SYSTEMS AND METHODS OF USE THEREOF
The invention generally relates to sample analysis systems and methods of use thereof. In certain aspects, the invention provides a system for analyzing a...
2018/0033602 LOW TEMPERATURE PLASMA PROBE WITH AUXILIARY HEATED GAS JET
A low temperature plasma probe, a mass spectrometry system, and a method for using a low temperature plasma probe are described. In an embodiment, a low...
2018/0033601 Apparatus and Methods for an Atmospheric Sampling Inlet for a Portable Mass Spectrometer
Atmospheric sampling system designed to minimize cross-contamination between successive samples acquired by a portable, or handheld, mass spectrometer....
2018/0033600 DEVICE AND METHOD FOR ANALYSIS OF BIOFLUIDS BY ION GENERATION USING WETTED POROUS MATERIAL
The present disclosure provides a mass spectrometry cartridge and methods of use thereof.
2018/0033599 METHOD OF CREATING SPRAY DEVICE FOR SHEATHLESS CE-MS, SPRAY DEVICE FOR SHEATHLESS CE-MS, AND SHEATHLESS CE-MS...
Processing a capillary distal end into acute-angle, an electrophoretic liquid passing hole through which electrophoretic liquid pass is opened in a flexible...
2018/0033598 Lipid Screening Platform Allowing a Complete Solution for Lipidomics Research
Known lipid molecules of a matrix are grouped into lipid classes and the lipid classes are further grouped into a pass-through group and a mobility separation...
2018/0033597 TECHNIQUES FOR CONTROLLING DISTANCE BETWEEN A SAMPLE AND SAMPLE PROBE WHILE SUCH PROBE LIBERATES ANALYTE FROM A...
A system includes a mass spectrometer and associated sample interfacing equipment. The sample interfacing equipment includes a platform structured to support a...
2018/0033596 Sub-Pulsing During a State
A method for achieving sub-pulsing during a state is described. The method includes receiving a clock signal from a clock source, the clock signal having two...
2018/0033595 SPUTTERING APPARATUS INCLUDING GAS DISTRIBUTION SYSTEM
Some embodiments provide a magnetron sputtering apparatus including a vacuum chamber within which a controlled environment may be established, a target...
2018/0033594 APPARATUS AND METHOD FOR TREATING SUBSTRATE
The substrate treating apparatus includes a process chamber having a treatment space in the interior thereof, a support unit disposed in the process chamber to...
2018/0033593 FINE ALIGNMENT SYSTEM FOR ELECTRON BEAM EXPOSURE SYSTEM
Lithographic apparatuses suitable for, and methodologies involving, complementary e-beam lithography (CEBL) are described. In an example, a method of fine...
2018/0033592 CHARGED PARTICLE BEAM DRAWING METHOD AND CHARGED PARTICLE BEAM DRAWING APPARATUS
In one embodiment, a charged particle beam drawing method includes calculating a resist film reduction amount caused by etching from data representing a...
2018/0033591 SENSING ANALYTICAL INSTRUMENT PARAMETERS, SPECIMEN CHARACTERISTICS, OR BOTH FROM SPARSE DATASETS
Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and...
2018/0033590 STRUCTURE AND METHOD TO MEASURE FOCUS-DEPENDENT PATTERN SHIFT IN INTEGRATED CIRCUIT IMAGING
Various embodiments include measurement structures and methods for measuring integrated circuit (IC) images. In some cases, a measurement structure for use in...
2018/0033589 ELECTRON MICROSCOPE WITH MULTIPE TYPES OF INTEGRATED X-RAY DETECTORS ARRANGED IN AN ARRAY
An electron microscope including a vacuum chamber for containing a specimen to be analyzed, an optics column, including an electron source and a final probe...
2018/0033588 CHARGED PARTICLE BEAM DEVICE AND SCANNING ELECTRON MICROSCOPE
A charged particle beam device includes: a charged particle source; an acceleration electric power source connected to the charged particle source for...
2018/0033587 CHARGED PARTICLE BEAM APPARATUS
A charged particle beam apparatus includes a charged particle source, a separator, a charged particle beam irradiation switch, and a control device. The...
2018/0033586 APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE
The invention relates to an apparatus and method for exposing a sample. The apparatus comprises a source for electromagnetic radiation or particles having...
2018/0033585 SUBSTRATE TREATMENT APPARATUS
A substrate treatment apparatus includes a chamber providing a reaction region and including first and second sides facing each other, a module connected to...
2018/0033584 X-RAY SYSTEMS AND METHODS INCLUDING X-RAY ANODES
An anode for an X-ray tube can include a body comprising one or more of a yttrium-oxide derivative, titanium diboride, boron carbide, titanium suboxide,...
2018/0033583 X-RAY SYSTEMS AND METHODS INCLUDING X-RAY ANODES
An anode for an X-ray tube can include a ceramic body, e.g., material that includes yttrium-oxide derivatives. Upon collision with an anode, the kinetic energy...
2018/0033582 X-RAY SOURCE, HIGH-VOLTAGE GENERATOR, ELECTRON BEAM GUN, ROTARY TARGET ASSEMBLY, ROTARY TARGET, AND ROTARY...
Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an...
2018/0033581 X-RAY SOURCE, HIGH-VOLTAGE GENERATOR, ELECTRON BEAM GUN, ROTARY TARGET ASSEMBLY, ROTARY TARGET, AND ROTARY...
Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an...
2018/0033580 X-RAY SOURCE, HIGH-VOLTAGE GENERATOR, ELECTRON BEAM GUN, ROTARY TARGET ASSEMBLY, ROTARY TARGET, AND ROTARY...
Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an...
2018/0033579 X-RAY SOURCE, HIGH-VOLTAGE GENERATOR, ELECTRON BEAM GUN, ROTARY TARGET ASSEMBLY, ROTARY TARGET, AND ROTARY...
Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an...
2018/0033578 FUSE PRODUCTION METHOD, FUSE, CIRCUIT BOARD PRODUCTION METHOD AND CIRCUIT BOARD
A fuse production method includes the steps of forming a liquid film of a dispersion liquid, in which metal nanoparticles are dispersed in a solvent, on a...
2018/0033577 Self-Limiting Electrical Triggering for Initiating Fracture of Frangible Glass
A transient electronic device includes electronic elements (e.g., an SOI- or chip-based IC) and a trigger mechanism disposed on a frangible glass substrate....
2018/0033576 GROUND FAULT CIRCUIT INTERRUPTER (GFCI) SYSTEM AND METHOD
A wiring device including one or more line contact arms electrically connected to a line terminal. Each line contact arm has an upper line contact located on a...
2018/0033575 ELECTROMECHANICAL CIRCUIT BREAKER FOR A BATTERY DISTRIBUTION BOX OF A MOTOR VEHICLE AND BATTERY DISTRIBUTION BOX
Embodiments of the present disclosure provide an electromechanical circuit breaker for a battery distribution box of a motor vehicle. The electromechanical...
2018/0033574 Arrangement for an Electrical Switch Element With a Seal
An electrical switch element is disclosed. The electrical switch element has a switch chamber having contacts and an opening, a propulsion element extending...
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