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Patent # Description
2018/0218899 ORIGINAL HOLDING APPARATUS, PATTERN FORMING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
An original holding apparatus of a simple arrangement and an arrangement in which a part does not protrude below an original in a normal operation state is...
2018/0218898 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
There is provided a technique which includes: forming a film containing at least Si, O and N on a substrate in a process chamber by performing a cycle a...
2018/0218897 Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory...
Provided is a technique which includes forming on a substrate an oxide film containing silicon or a metal element and doped with a dopant by performing a cycle...
2018/0218896 SiC WAFER PRODUCING METHOD
A method for producing a wafer from an ingot of single crystal SiC includes an end surface planarizing step of planarizing an end surface of the ingot, a...
2018/0218895 Method for Removing Trapped Ions from a Multipole Device
A method and apparatus for clearing ions from a multipole ion transmission device which includes introducing a DC or RF clear out pulse to one or more of the...
2018/0218894 Ion Mass Separation Using RF Extraction
An apparatus which has the capability of filtering unwanted species from an extracted ion beam without the use of a mass analyzer magnet is disclosed. The...
2018/0218893 TANDEM MASS SPECTROMETER
A precursor ion selected by a quadrupole mass filter is fragmented by imparting a predetermined amount of collision energy (CE) to the ion. Among the thereby...
2018/0218892 ANALYTICAL DEVICE
For every acquisition of a set of mass spectrum data, a mass calibrator (determines the amount of mass discrepancy using the appearance position of a peak...
2018/0218891 Apparatus and Methods For Focussing Electrons
An apparatus for generating and focusing electrons is provided. The apparatus has an emissive material configured to emit an electron, an electron target, and...
2018/0218890 SPUTTERING COIL PRODUCT AND METHOD OF MAKING
A high surface area coil for use with a physical vapor deposition apparatus comprising a first surface. At least a portion of the first surface has a...
2018/0218889 BIASABLE FLUX OPTIMIZER / COLLIMATOR FOR PVD SPUTTER CHAMBER
In some implementations described herein, a collimator that is biasable is provided. The ability to bias the collimator allows control of the electric field...
2018/0218888 PLASMA ETCHING APPARATUS
A plasma etching apparatus includes first, second and third chambers, and a plasma generation device. An inner cross-sectional area and shape of the second...
2018/0218887 PROCESSING APPARATUS FOR PROCESSING TARGET OBJECT
In a processing apparatus, a cooling table in which a coolant is flown includes first to third regions, and a path group of the coolant. The first region is...
2018/0218886 PROCESSING APPARATUS FOR PROCESSING TARGET OBJECT
A cooling table includes a first portion, a second portion, a first path, a second path and a third path. An electrostatic chuck is provided on the first...
2018/0218885 WAFER SUPPORT
A wafer support of the present invention includes shield sheet embedded in the ceramic base between the plasma generation electrode and the heater electrode in...
2018/0218884 SUBSTRATE PROCESSING APPARATUS
There is provided a focus ring that is capable of preventing deposits from adhering to a member having a lower temperature in a gap between two members having...
2018/0218883 Microwave Plasma Source, Microwave Plasma Processing Apparatus and Plasma Processing Method
A microwave plasma source for generating a microwave plasma inside a chamber by radiating a microwave into the chamber, includes: a microwave oscillator for...
2018/0218882 PLASMA PROCESSING METHOD
In a plasma processing method includes a first stage of generating plasma of a first processing gas and a second stage of generating plasma of a second...
2018/0218881 MICROWAVE GENERATORS AND MANUFACTURE OF SYNTHETIC DIAMOND MATERIAL
A microwave generator system for use in a microwave plasma enhanced chemical vapour deposition (MPECVD) system, the microwave generator system comprising: a...
2018/0218880 Microwave Plasma Source, Microwave Plasma Processing Apparatus and Plasma Processing Method
A microwave plasma source that generates a microwave plasma in a processing space in which a target substrate is processed, includes: a microwave generation...
2018/0218879 Advanced Dose-Level Quantization for Multibeam-Writers
In a charged-particle multi-beam writing method a desired pattern is written on a target using a beam of energetic electrically charged particles, by imaging...
2018/0218878 Enhanced FIB-SEM Systems for Large-Volume 3D Imaging
A microscopy system for imaging a sample can include a scanning electron microscope system configured for imaging a surface layer of the sample and a focused...
2018/0218877 IMAGING DEVICE FOR IMAGING AN OBJECT AND FOR IMAGING A STRUCTURAL UNIT IN A PARTICLE BEAM APPARATUS
The system described herein relates to an imaging device for imaging an object in a particle beam apparatus and/or for imaging a structural unit of a particle...
2018/0218876 ION SOURCE
An ion source includes an ion source chamber having a longitudinal axis, the ion source chamber operative to define a plasma therein. The ion source also...
2018/0218875 INNOVATIVE SOURCE ASSEMBLY FOR ION BEAM PRODUCTION
A source assembly for ion beam production is disclosed herein. An example source assembly may include a pair of plates separated by a distance, with each plate...
2018/0218874 ELECTRON MICROSCOPE ELECTRON GUN FOR FACILITATING POSITION ADJUSTMENT AND ELECTRON MICROSCOPE INCLUDING SAME
The present invention relates to an electron gun for facilitating position adjustment, and an electron microscope including the same, the electron gun...
2018/0218873 INDUCTIVELY COUPLED PLASMA SOURCE WITH SYMMETRICAL RF FEED AND REACTANCE ELEMENTS
A plasma reactor includes a window assembly, inner, middle and outer coil antennas adjacent the window assembly, inner, middle and outer current distributors...
2018/0218872 PIEZOELECTRIC VACUUM TRANSISTOR
A vacuum transistor includes a substrate and a first terminal formed on the substrate. A piezoelectric element has a second terminal formed on the...
2018/0218871 PIEZOELECTRIC VACUUM TRANSISTOR
A vacuum transistor includes a substrate and a first terminal formed on the substrate. A piezoelectric element has a second terminal formed on the...
2018/0218870 IN-LINE HIGH CURRENT FUSE HOLDER ASSEMBLY
Provided herein are approaches for securing an electrical protection device (e.g., a fuse). In one approach, an apparatus includes a conductor and a terminal...
2018/0218869 THIN FILM FUSE
A thin film fuse is formed by two substantially planar conductors, separated from each other by a thin gap. The conductors and gap are over-coated with a thin,...
2018/0218868 IN-LINE BLADE FUSE SYSTEM
A vertically-oriented blade fuse system requires less surface area on a printed circuit board, provides improved heat dissipation, is less expensive to...
2018/0218867 AUXILIARY SWITCH
An auxiliary switch includes a housing including a first housing part and a second housing part separate from and releasably connected to the first housing...
2018/0218866 OVERLOAD PROTECTION DEVICE FOR COMPRESSOR MOTOR
An overload protection device for a compressor motor and, more specifically, to an overload protection device for a compressor motor, which has an overload...
2018/0218865 CIRCUIT BREAKER ASSEMBLIES WITH CHANGEABLE ORIENTATION
Examples described herein relate to circuit breaker assemblies with changeable orientation. In one example, an apparatus includes a circuit breaker assembly...
2018/0218864 High Voltage DC Relay
A latching relay includes a first coil, a second coil and a common plunger operatively connected between the first and second coils such that activation of the...
2018/0218863 AUXILIARY RELAY OF ELECTROMAGNETIC CONTACTOR
The present invention relates to an auxiliary relay for an electromagnetic contactor, the relay including magnet members provided on both sides of a moving...
2018/0218862 OPERATION COIL DRIVE DEVICE OF ELECTROMAGNETIC CONTACTOR
Operation coil drive device of electromagnetic contactor includes current detector and drive controller. The detector, when switching control is performed on...
2018/0218861 SWITCHING DEVICE COMPRISING A VACUUM TUBE
Disclosed is a switching device comprising a vacuum tube and an adjustable drive for opening, and closing the contacts of the switching device. The switching...
2018/0218860 INSTALLATION SWITCHING APPARATUS HAVING AN EXHAUST AIR DUCT AND A SET SCREW
An installation switching apparatus includes: a housing; at least one contact point; an exhaust air duct which in an upstream portion thereof receives arc...
2018/0218859 DEVICE HAVING INTEGRATED INTERFACE SYSTEM
A portable computer includes a display portion comprising a display, a base portion pivotally coupled to the display portion and including a glass top case....
2018/0218858 KEYBOARD MODULE AND ELECTRONIC DEVICE USING THE SAME
A keyboard module and an electronic device using the keyboard module are provided. The keyboard module includes a housing, a plurality of keys, a micro pump...
2018/0218857 REDUCED LAYER KEYBOARD STACK-UP
Disclosed herein is a stack-up for an input device. The stack-up may include a flexible substrate having a switch and a light source. The switch has at least...
2018/0218856 PUSHBUTTON SWITCH MEMBER
A pushbutton switch includes: a dome-shaped movable contact; and an operation key on a side of the movable contact. Pushing the operation key causes the...
2018/0218855 In-Wall Electrical Control Unit with Openable Switch Cover
An in-wall electrical control unit with openable switch cover has a switch cover attached to a housing of the electrical control unit adjacent to a user...
2018/0218854 PUSH SWITCH
A push switch includes a base member including a depressed accommodating part, a fixed contact member provided and exposed in the accommodating part of the...
2018/0218853 ELECTRICAL CIRCUIT SWITCHING
Systems and techniques are provided for electrical circuit switching. An electrical load may be connected to a voltage supply with current flow entering a...
2018/0218852 ELECTRICAL SERVICE SWITCHING DEVICE HAVING AN EXHAUST AIR OPENING
An electrical service switching device includes: a housing in which at least one contact point is arranged, the housing having a first terminal connection...
2018/0218851 SWITCHING DEVICE
A switching device for low or medium voltage electric power distribution networks, the switching device comprising: at least an electric pole comprising a...
2018/0218850 MULTI-PANEL THICKNESS MOUNTING FOR SWITCH
A mounting switch is described herein. The mounting switch is mounted with a control panel. The mounting switch includes a front having a face and a bezel...
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