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Patent # Description
2018/0239265 SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
A support table for a lithographic apparatus, the support table having a support section and a conditioning system, wherein the support section, the...
2018/0239264 MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
An exposure apparatus has a substrate holding member, a first supporting member, a second supporting member, and a driving system. The first supporting member...
2018/0239263 Inspection Apparatus and Methods, Substrates Having Metrology Targets, Lithographic System and Device...
Disclosed is an inspection apparatus for use in lithography. It comprises a support for a substrate carrying a plurality of metrology targets; an optical...
2018/0239262 METHOD OF DETECTING SIZE OF PATTERN FORMED BY PHOTOLITHOGRAPHY
The present invention provides a method for detecting a size of a pattern made by photolithography, which being applied for detecting a size of a pattern...
2018/0239261 EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
An exposure apparatus includes a nozzle member, a nozzle driving system having an actuator by which the nozzle member is moved, and a controller. The nozzle...
2018/0239260 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
An immersion lithography apparatus is disclosed in which liquid is supplied to a space between a projection system and a substrate, and a plate structure is...
2018/0239259 Attenuation Apparatus and Method
An apparatus (60) for adjusting an intensity of radiation. The apparatus comprises a grating (61) for receiving a radiation beam (B.sub.a) and for directing at...
2018/0239258 LITHOGRAPHIC APPARATUS AND METHOD
A lithographic apparatus includes an optical sensor, a movable body, a support, a deflector system, a first drive system and a second drive system. The movable...
2018/0239257 PROCESS RECIPE EVALUATION METHOD, STORAGE MEDIUM, ASSISTING DEVICE FOR PROCESS RECIPE EVALUATION, AND LIQUID...
A method for evaluating a process recipe used in a liquid processing apparatus that performs a liquid processing by supplying a processing liquid from a nozzle...
2018/0239256 Photoresist Stripper Composition for Manufacturing Liquid Crystal Display
The present disclosure relates to a photoresist stripper composition for manufacturing an LCD, and relates to an integrated photoresist stripper composition...
2018/0239255 PATTERN FORMING PROCESS
A pattern is formed by (i) applying a chemically amplified positive resist composition comprising (A) a base resin, (B) a photoacid generator, (C) an organic...
2018/0239254 PHOTORESIST BRIDGING DEFECT REMOVAL BY REVERSE TONE WEAK DEVELOPER
A method for removing photoresist bridging defects includes coating a photoresist layer over a dielectric layer formed over a substrate, applying a first...
2018/0239253 PHOTORESIST BRIDGING DEFECT REMOVAL BY REVERSE TONE WEAK DEVELOPER
A method for removing photoresist bridging defects includes coating a photoresist layer over a dielectric layer formed over a substrate, applying a first...
2018/0239252 REFLECTOR
A reflector (2) comprising a plate (4) supported by a substrate (8), wherein the plate has a reflective surface (5) and is secured to the substrate by adhesive...
2018/0239251 THREE-DIMENSIONAL PRINTING APPARATUS AND METHOD FOR THREE-DIMENSIONAL PRINTING
The three-dimensional printing apparatus includes a tank, a platform, a lighting module, a control unit, a photosensitizer coating unit, and an exposure and...
2018/0239250 RESIST UNDERLAYER FILM FORMING COMPOSITION FOR LITHOGRAPHY CONTAINING HYDROLYZABLE SILANE HAVING CARBONATE SKELETON
A resist underlayer film forming composition for lithography for forming a resist underlayer film that can be used as a hard mask, including: a hydrolyzable...
2018/0239249 RESIST COMPOSITION AND PATTERNING PROCESS
A resist composition comprising a base polymer and a quencher in the form of an iodonium salt of fluorinated aminobenzoic acid, fluorinated nitrobenzoic acid...
2018/0239248 PHOTOSENSITIVE BODY INCLUDING PROTECTIVE LAYER FORMED ON PHOTOSENSITIVE LAYER
A photosensitive body is provided. The photosensitive body includes a photosensitive layer, and a protective layer formed on the photosensitive layer, and the...
2018/0239247 PHOTOSENSITIVE COMPOSITIONS, QUANTUM DOT POLYMER COMPOSITE PRODUCED THEREFROM, AND LAYERED STRUCTURES AND...
A photosensitive composition including a quantum dot; a carboxylic acid group-containing binder; a multi-thiol compound including at least two thiol groups at...
2018/0239246 PHOTOSENSITIVE COMPOSITIONS, PREPARATION METHODS THEREOF, AND QUANTUM DOT POLYMER COMPOSITE PATTERN PRODUCED...
A photosensitive composition, a quantum dot polymer composite pattern prepared therefrom, and a layered structure and an electronic device including the same....
2018/0239245 QUANTUM DOTS, A COMPOSITION OR COMPOSITE INCLUDING THE SAME, AND EN ELECTRONIC DEVICE INCLUDING THE SAME
A photosensitive composition, a quantum dot polymer composite pattern prepared therefrom, and a layered structure and an electronic device including the same....
2018/0239244 Method For Reducing Lithography Defects and Pattern Transfer
An additional non-photoresist layer may be formed on patterned photoresist layers. The additional layer may be preferentially formed on the tops of the...
2018/0239243 Method and Apparatus for Pellicle Removal
A method and apparatus for removing a pellicle from a photomask wherein the adhesive between the pellicle frame and photomask is cooled sufficiently to allow...
2018/0239242 PELLICLE FRAME, PELLICLE CONTAINING SAME, METHOD FOR PRODUCING PELLICLE FRAME, AND METHOD FOR PRODUCING PELLICLE
The purpose of the present invention is to provide: a pellicle frame which is not susceptible to deterioration even if irradiated with short-wavelength light...
2018/0239241 MASK AND FABRICATION METHOD THEREOF
A mask and a fabrication method thereof are provided. The mask includes: a frame, which includes a hollow portion and a border surrounding the hollow portion;...
2018/0239240 METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY
A method for manufacturing a membrane assembly for EUV lithography, the method comprising: providing a stack comprising a planar substrate and at least one...
2018/0239238 MASK
The present disclosure provides a mask, comprising a light shielding region and a light transmitting region, wherein the mask further includes a diffraction...
2018/0239237 PHOTOMASK AND MANUFACTURING METHOD THEREOF
A photomask is provided. The photomask includes a substrate, a light-blocking main feature, and sub-resolution assist features (SRAFs). The light-blocking main...
2018/0239236 MASK BLANK
A mask blank includes a glass substrate including a first main surface and a second main surface, an absorbing film formed above the first main surface, and a...
2018/0239235 EXTREME ULTRAVIOLET MASK
An extreme ultraviolet (EUV) mask includes: a substrate having a first region and a second region; a reflective layer on the substrate; an absorbing layer on...
2018/0239234 TENSIONED PROJECTION SCREEN ASSEMBLY
A projection screen assembly is disclosed including a projection screen and a projection screen frame. The projection screen frame includes a plurality of...
2018/0239233 ILLUMINATION DEVICE AND IMAGE PROJECTION APPARATUS
An image projection apparatus includes an illumination device, an optical-path forming section, an image forming element, a projection optical section, and an...
2018/0239232 ILLUMINATION DEVICE AND PROJECTOR
An illumination device of the invention includes a light source unit including light emitting devices having light emission surfaces, a collimating system...
2018/0239231 PROJECTION APPARATUS AND LIGHT SOURCE MODULE
A projection apparatus and a light source module are provided. The light source module includes a light-emitting element string, a shunt module, and a control...
2018/0239230 SPATIAL LIGHT MODULATOR IMAGE DISPLAY PROJECTOR APPARATUS WITH SOLID STATE ILLUMINATION LIGHT SOURCES
In described examples, a projector includes a light source to produce first light of a first color. The projector also includes a phosphor to selectively...
2018/0239229 LIGHT SOURCE APPARATUS AND PROJECTOR
A light source apparatus according to an aspect of the invention includes a light source array including a plurality of first light emitting devices and a...
2018/0239228 LIGHT SOURCE DEVICE AND PROJECTOR
A light source device includes: a light emission element; a condensing optical system on which a first component of light emitted from the light emission...
2018/0239227 PROJECTOR AND CONTROL METHOD FOR PROJECTOR
A projector according to the invention includes a discharge lamp, a cooling section, and a control section. The control section is configured to execute a...
2018/0239226 IMAGE DEVICE CAPABLE OF COMPENSATING IMAGE VARIATION
An image device capable of compensating image variation includes at least one image capturer and a compensator. The compensator is electrically connected to...
2018/0239225 PROJECTION APPARATUS
The present application discloses a projection apparatus comprising a housing, a digital micromirror apparatus DMD disposed on an inner sidewall of the...
2018/0239224 PANORAMIC CAMERA SUPPORT
A support for an imaging device includes a first rotatable assembly supportable by a support that rotates in a generally horizontal plane and a horizontal...
2018/0239223 MODERATION OF A DRIVER ASSIST CAMERA ENHANCEMENT VIA A VEHICLE WINDSHIELD
An apparatus for moderating the environment of a driver assist camera comprises (a) a housing in which the driver assist camera is mountable and (b) a bracket...
2018/0239222 LENS ATTACHMENT FOR IMPARTING STRAY LIGHT EFFECTS
A removable camera lens attachment has at least two optical elements, wherein the at least two optical elements are aligned to share an optical axis with a...
2018/0239221 ELECTRONIC APPARATUS FOR DISPLAYING OVERLAY IMAGES
An electronic apparatus that effectively utilizes information detected by a sensor is provided. The electronic apparatus includes a camera, a sensor, a memory,...
2018/0239220 Method for Operating a Light Source for a Camera, Light Source, Camera
A method for operating a light source for a camera, a light source and a camera are disclosed. In an embodiment the method for operating a light source for a...
2018/0239219 EDGE LIGHT DEVICE FOR PHOTOGRAPHY SYSTEM
An edge light device of the present disclosure creates edge light effects, such as spectral highlight or artistic effect, on a subject. The edge light device...
2018/0239218 VIBRATING DEVICE, METHOD FOR DRIVING SAME, AND CAMERA
A vibrating device includes a tubular vibrating body and a lens cover coupled to a first surface of the tubular vibrating body. The tubular vibrating body...
2018/0239217 LENS DRIVE DEVICE, CAMERA MODULE, AND CAMERA MOUNT DEVICE
A lens drive device is provided with a shake-correction drive unit for correcting shake by sliding, in relation to a shake-correction fixed part including a...
2018/0239216 MEDIA-DEFINED OPTICAL LOGIC CIRCUITRY DESIGN
A media-defined optical logic circuit composed of a set of light-transmitting polyhedral prisms arranged so that a pair of adjacent prisms can exchange...
2018/0239215 ACTIVE PRISM STRUCTURE AND FABRICATION METHOD THEREFOR
An active prism structure includes: an isotropic layer made of a photocurable isotropic polymer having a predetermined refractive index n.sub.p and stacked on...
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