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Patent # Description
US-9,746,789 Exposure apparatus, and method of manufacturing article
The present invention provides an exposure apparatus which performs a scanning exposure of each of a plurality of shot regions on a substrate, comprising a...
US-9,746,788 Lithographic apparatus and device manufacturing method
A lithographic projection apparatus, including a liquid supply system configured to supply a liquid to a space between a projection system and a movable table;...
US-9,746,787 Holding apparatus, exposure apparatus and manufacturing method of device
A holding apparatus includes a holding portion that includes a first member which contacts a portion of an object, a second member which at least a portion...
US-9,746,786 Overlay mask
An overlay mask includes a plurality of first patterns, a plurality of second patterns and a plurality of third patterns. The first patterns are arranged within...
US-9,746,785 Sub-wavelength segmentation in measurement targets on substrates
Measurement targets for use on substrates, and overlay targets are presented. The targets include an array of first regions alternating with second regions,...
US-9,746,784 Lens heating compensation systems and methods
Methods for calibrating a photolithographic system are disclosed. A cold lens contour for a reticle design and at least one hot lens contour for the reticle...
US-9,746,783 Method for preventing photoresist corner rounding effects
A method for ameliorating corner rounding effects in a photolithographic process is provided. A semiconductor workpiece having an active device region is...
US-9,746,782 Lithographic apparatus and a device manufacturing method
An immersion lithographic apparatus is disclosed that includes a fluid handling system configured to confine immersion liquid to a localized space between a...
US-9,746,781 Exposure apparatus and method for producing device
A liquid immersion exposure apparatus exposes a substrate with an exposure beam via a liquid immersion area formed on a portion of a surface of the substrate....
US-9,746,780 Maskless exposure device, maskless exposure method and display substrate manufactured by the maskless exposure...
A maskless exposure device includes an exposure head including a digital micro-mirror device and an exposure source, the digital micro-mirror device being...
US-9,746,779 Illumination optical unit for projection lithography
An illumination optical unit for projection lithography serves for illuminating an object field, in which an object to be imaged can be arranged, with...
US-9,746,778 EUV exposure apparatus with reflective elements having reduced influence of temperature variation
A projection lens of an EUV-lithographic projection exposure system with at least two reflective optical elements each comprising a body and a reflective...
US-9,746,777 Exposure apparatus and exposure method thereof
An exposure apparatus includes at least one radiation source, a plurality of projection lenses, and a lens switch. The radiation source is operable for...
US-9,746,776 Low surface energy photoresist composition and process
A fluoropolymer-photoresist composition containing fluorinated polymer for containment of liquid inks in the printing of electronic devices. Methods of applying...
US-9,746,775 Method for manufacturing substrate having concave pattern, composition, method for forming conductive film,...
Provided is a method for manufacturing a substrate having a concave pattern to be used for forming a high-definition pattern while suppressing wet-spreading and...
US-9,746,774 Mitigation of EUV shot noise replicating into acid shot noise in photo-sensitized chemically-amplified resist...
A method for mitigating shot noise in extreme ultraviolet (EUV) lithography and patterning of photo-sensitized chemically-amplified resist (PS-CAR) is...
US-9,746,773 Titania-doped quartz glass and making method
Methods for selecting titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at...
US-9,746,772 Resist underlayer film forming composition for lithography containing polyether structure-containing resin
A method for producing a semiconductor device, which includes forming an underlayer film on a semiconductor substrate with a resist underlayer film forming...
US-9,746,771 Laminate body
There is provided a laminate body which is capable of forming an excellent pattern on an organic semiconductor. A laminate body includes at least a...
US-9,746,770 Thermally developable imaging materials and methods
A thermally developable material comprising a support and having thereon at least one non-photosensitive carrier layer comprising: a binder comprising vinyl...
US-9,746,769 Resist composition
The resist composition according to the present invention is a resist composition comprising a solid component comprising a resist base material, and a solvent....
US-9,746,768 Resist overlayer film forming composition for lithography and method for producing semiconductor device using...
There is provided a resist overlayer film forming composition for use in a lithography process in semiconductor device production, which does not intermix with...
US-9,746,767 Photoresist composition and method of manufacturing black matrix using the same
A photoresist composition including 5 wt % to 10 wt % of a binder resin, 5 wt % to 10 wt % of a photopolymerization monomer, 1 wt % to 5 wt % of a ...
US-9,746,766 Composition for nanoimprint and nanoimprint pattern forming method
A composition for nanoimprinting including a siloxane polymer which includes a polymerizable group polymerized by irradiation with light; a polymerization...
US-9,746,765 Exterior decor panel for home appliance and method of manufacturing the same
Manufacturing an exterior decor panel for a home appliance includes laminating a photosensitive dry film on a front surface of a metal sheet, the photosensitive...
US-9,746,764 Mask blank and transfer mask
A mask blank, including: a thin film for forming a transfer pattern; a resist underlying film made of a resist underlying composition and provided on the thin...
US-9,746,762 Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank,...
Provided is a conductive film coated substrate, including a conductive film formed thereon. In a relationship between a bearing area (%) and a bearing depth...
US-9,746,761 Integrated furniture system for inconspicuously housing audiovisual equipment
An integrated furniture system inconspicuously houses audiovisual equipment. The system includes a projector cabinet and a columnar supported screen assembly....
US-9,746,760 Video display with photo-luminescent dyes
A video display system includes a light source configured to generate light and a substrate having a plurality of pixels deposited on a first side of the...
US-9,746,759 Lighting apparatus and image projection apparatus for detecting leak light from a light equalizer
A lighting apparatus to focus light emitted from a light source onto an image generation element includes a light equalizer to receive the light emitted from...
US-9,746,758 Illumination optical system and image projection apparatus with the same
An illumination optical system illuminates an image display element and includes a first lens array configured to divide light emitted from a light source, a...
US-9,746,757 Display panel and projection display device
The present disclosure provides a display panel, including: a reflector; a phase retarder configured to change a polarization direction of a light beam passing...
US-9,746,756 Light source system and related projection system employing a light division system and two spatial light...
A light source system (200), comprises: a light-emitting device (1) for emitting a first light and a second light in sequence; a beam splitting system (2) with...
US-9,746,755 Light source device and image projector including the same
A light source device includes a light source section that emits laser light, a reflection and diffusion member that diffuses and reflects the laser light...
US-9,746,754 Projecting type image display apparatus including light source control unit and cooling control unit
An image display apparatus including a light source; a light source control unit configured to control electric power to be supplied to the light source; a...
US-9,746,753 Projector with embedded electric suspension arm
A projector includes a main body, sub-body having an optical engine system, and a telescopic electric suspension arm, of which a first end is fixed in the main...
US-9,746,752 Directional projection display
In some examples, a projection display surface is configured to reflect a first image or image portion in a first direction and a second image or image portion...
US-9,746,751 Camera mount system
A camera mount system having two camera mounts connected to a main rail and moveable longitudinally with respect to each other, for differing lens lengths. One...
US-9,746,750 Optical logic gates and method for generating logic signals using DNA-based nanostructure
An optical logic gate includes: a DNA based nanostructure including DNA and metal nanoparticles coupled to the DNA, the DNA based nanostructure being configured...
US-9,746,749 Lifetime extending and performance improvements of optical fibers via loading
An optical fiber includes a core and a cladding. The optical fiber includes a core material and a cladding material, respectively, wherein the fiber is a...
US-9,746,748 Apparatus and method for generation of high harmonics from silicon
A method and apparatus is disclosed for generating tunable attosecond-scale radiation pulses, with a frequency in range of mid-infrared to ultra-violet, from a...
US-9,746,747 Optical switch, optical switch apparatus and node, and communication network
An optical switch has four optical ports; a first optical waveguide coupled between a first of said ports and a second of the ports; a first switch element...
US-9,746,746 Fast optical switch and its applications in optical communication
A fast optical switch can be fabricated/constructed, when vanadium dioxide (VO.sub.2) ultra thin-film or a cluster of vanadium dioxide particles (less than 0.5...
US-9,746,745 Zoom lens and method for manufacturing the same
A zoom lens is provided, which includes an electrode pattern on a substrate, and a liquid-crystal material on the electrode pattern. The electrode pattern...
US-9,746,744 Method for forming a self-aligned mach-zehnder interferometer
A method of forming a waveguide for a self-aligned Mach-Zehnder-Interferometer. The method includes forming a waveguide on a substrate and providing a first...
US-9,746,743 Electro-optic optical modulator devices and method of fabrication
A novel electro-optic optical modulator device and a related method for creating the novel optical modulator device are disclosed. In one embodiment, the novel...
US-9,746,742 Electro-optic modulator with distributed gain
An electro-optic modulator includes a Mach-Zehnder interferometer having a bias input, an optical input, and an optical output. A first arm comprises an optical...
US-9,746,741 Optical modulator
An aspect of the present invention is an optical modulator including a substrate, a plurality of optical waveguides, and a plurality of modulation electrodes...
US-9,746,740 Registered reflective element for a brightness enhanced TIR display
The brightness of a TIR-based display is enhanced with a registered reflective element by recycling and reflecting light that passes through the dark pupil...
US-9,746,739 See-through dimming panel
A see-through dimming panel includes first and second transparent substrate layers and suspended-particle-device (SPD) layer therebetween. A first transparent...
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