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Patent # Description
US-9,766,559 Edge-dominant alignment method in exposure scanner system
An edge-dominant alignment method for use in an exposure scanner system is provided. The method includes the steps of: providing a wafer having a plurality of...
US-9,766,558 Lithographic apparatus with flexible transportation line having varying stiffness between two objects
A positioning apparatus includes a first object and a second object; a positioning system configured to position the first and the second objects with respect...
US-9,766,557 Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
A patterning device support for controlling a temperature of a patterning device can include a movable component. The movable component can include a gas inlet...
US-9,766,556 Lithographic apparatus and device manufacturing method
A gas knife configured to dry a surface in an immersion lithographic apparatus is optimized to remove liquid by ensuring that a pressure gradient is built up in...
US-9,766,555 Exposure apparatus, exposure method, and method for producing device
An exposure apparatus includes a projection system having a final element that projects exposure light to an upper surface of a substrate through liquid between...
US-9,766,554 Method and apparatus for estimating focus and dose of an exposure process
A structure in semiconductor fabrication includes at least a first periodic asymmetric feature and a periodic asymmetric second feature. The first feature...
US-9,766,553 Illumination optical unit for projection lithography
The disclosure provides an illumination optical unit for projection lithography, which illuminates an object field with illumination light. The illumination...
US-9,766,552 Methods and apparatus for calculating electromagnetic scattering properties of a structure and for...
A method of calculating electromagnetic scattering properties of a structure, the structure including materials of differing properties and the structure being...
US-9,766,551 Heat actuated and projected lithography systems and methods
In accordance with an embodiment of the disclosure, a method of patterning can include dividing an image into a set of frame sections; determining a tip pattern...
US-9,766,550 Actuators and microlithography projection exposure systems and methods using the same
An actuator includes a housing, a movable part, and an advancing unit that is at least temporarily connected to the movable part. The advancing unit includes a...
US-9,766,549 Optical apparatus with adjustable action of force on an optical module
The disclosure pertains to an optical apparatus, in particular for microlithography, that includes an optical module, a support structure and a connection...
US-9,766,548 Exposure apparatus, exposure method, and method of manufacturing article
The present invention provides an exposure apparatus including a projection optical system configured to project light from a reticle onto a substrate, a...
US-9,766,547 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method of...
There is provided a pattern forming method, including: (1) forming a film using an actinic ray-sensitive or radiation-sensitive resin composition, (2) exposing...
US-9,766,546 Method of producing a resist structure with undercut sidewall
The method comprises the steps of applying a layer of a negative photoresist on a bottom layer, providing the layer of the negative photoresist with a pattern...
US-9,766,545 Methods for small trench patterning using chemical amplified photoresist compositions
A method for forming a pattern on a substrate is described. The method includes providing a substrate, forming a photosensitive layer over the substrate,...
US-9,766,544 Composition for forming topcoat layer and resist pattern formation method employing the same
Provided is a composition for forming a topcoat layer, the composition including a graphene derivative including a hydrophilic group; and a solvent. Also...
US-9,766,543 Liquid treatment method, substrate processing apparatus and non-transitory storage medium
In one embodiment, a liquid treatment method includes (A) imaging a discharging port part of the liquid nozzle each time the discharging process is performed to...
US-9,766,542 Negative chemically-amplified photoresist and imaging method thereof
Provided are a novel negative chemically-amplified photoresist and an imaging method thereof. The negative chemically-amplified photoresist comprises phenol...
US-9,766,541 Positive-type resist composition, method for forming resist pattern, photo-reactive quencher, and polymeric...
A positive-type resist composition which generates an acid upon exposure and whose solubility in an alkali developing solution increases under the action of an...
US-9,766,540 Method of forming photomask
A photomask and a method of forming the same, the photomask including a transparent substrate; a light shielding pattern on the transparent substrate, the light...
US-9,766,539 Method for determining mask pattern, non-transitory recording medium, and information processing apparatus
A method which determines patterns for a plurality of masks to be executed by a processor includes acquiring data on a pattern containing a plurality of pattern...
US-9,766,538 Pellicle frame and a pellicle
A pellicle frame and a pellicle made with it is proposed in which at least one pair of the side bars of the frame are made to have a deflection (bow) which has...
US-9,766,537 Mask
The present disclosure relates to the field of photolithography technologies. Disclosed is a mask comprising a transparent substrate, the transparent substrate...
US-9,766,536 Mask with multilayer structure and manufacturing method by using the same
The present disclosure provides a photolithography mask. The photolithography mask includes a substrate that contains a low thermal expansion material (LTEM). A...
US-9,766,535 Display systems and methods employing wavelength multiplexing of colors
An immersive display system is disclosed that includes screens configured to mitigate reduction in contrast ratio due at least in part to peripheral light...
US-9,766,534 Suspension for camera trim enabling thinner camera stack
A camera assembly and a method for mounting it in a portable electronic device are provided. The assembly includes a camera module, and a camera trim coupled...
US-9,766,533 Flash device, and imaging method
A flash device for a camera includes a light source unit and a driving unit. The light source unit includes a plurality of light emitting devices, each of which...
US-9,766,532 Voice coil motor
A VCM is disclosed, the motor including a stator including a first driving unit, a rotor arranged inside the stator, including a second driving unit responding...
US-9,766,531 Shutter device, and imaging apparatus having shutter device
Provided are a detecting unit that detects that a light-shielding member has passed a predetermined position at the time of the light-shielding member moving to...
US-9,766,530 Supercontinuum light source
A supercontinuum light source includes a microstructured optical fiber, and a feeding unit arranged for feeding pump pulses to the microstructured optical...
US-9,766,529 Optical parametric oscillator and second harmonic generator using monoclinic phase Ga.sub.2S.sub.3 crystal
This disclosure provides an optical parametric oscillator, comprising, in a light path, a first lens, a laser crystal, a second lens, a nonlinear optical...
US-9,766,528 Electrochemical devices with plastic substrates
An electrochromic device includes a first flexible or rigid plastic substrate including a front surface, and a rear surface, wherein the rear surface comprises...
US-9,766,527 Electrochromic element, optical filter, lens unit, image pickup apparatus, and window member
Provided is an electrochromic element, including a first electrode, a second electrode, a carrier, and an electrolyte, and an anodic organic electrochromic...
US-9,766,526 Liquid crystal display device
A method of manufacturing, with high mass productivity, liquid crystal display devices having highly reliable thin film transistors with excellent electric...
US-9,766,525 Active-matrix substrate and display device
In an active matrix substrate, each of at least two auxiliary capacitance electrodes contains a first electrode section and a second electrode section, at least...
US-9,766,524 Liquid crystal display device and method for manufacturing same
Provided are a liquid crystal display and a method of manufacturing a liquid crystal display. According to an aspect of the present inventive concept, there is...
US-9,766,523 Liquid crystal display
A liquid crystal display according to an exemplary embodiment of the present disclosure includes: a first substrate; a gate line formed on the first substrate...
US-9,766,522 Display device and method of manufacturing display device
A display device includes a plurality of pixels arranged in a matrix. Each of the plurality of pixels includes a transistor and a pixel electrode arranged above...
US-9,766,521 Method for manufacturing black matrix with easy recognition of alignment mark
The present invention provides a manufacture method of a black matrix. The COA technology is utilized to manufacture the organic photoresist blocks with a...
US-9,766,520 Array substrate, manufacturing method thereof, display panel and display device
The invention discloses array substrate, manufacturing method thereof, display panel and display device, array substrate comprises TFTs, common electrodes,...
US-9,766,519 Array substrate, method of fabricating the same and liquid crystal display panel
An array substrate is disclosed. The array substrate includes a substrate, a first film layer on a side surface of the substrate, an insulation layer on the...
US-9,766,518 Display device with signal lines routed to decrease size of non-display area
A display device includes a display panel, a panel driver, panel-side output terminals, image signal lines, and control signal lines. The terminals are disposed...
US-9,766,517 Display device and display module
To provide a display device or the like that enables stable curing of a resin. The display device includes a first circuit and a second circuit over the same...
US-9,766,516 Display device
A display device includes a plurality of wiring lines that electrically couple a scanning line drive circuit arranged outside a first side of a display area to...
US-9,766,515 Liquid crystal device and electronic apparatus
A liquid crystal includes first and second substrates, the first substrate including intersecting data lines and scan lines. A liquid crystal layer is...
US-9,766,514 Liquid crystal display device with gap spacer and push spacer and method of fabricating the same
Provided are a liquid crystal display (LCD) device with a gap spacer and a push spacer, and a method of fabricating the same. The liquid crystal display device...
US-9,766,513 Pixel array structure and liquid crystal display panel
A pixel array structure includes a plurality of pixel zones arranged in an array that defines a row direction and a column direction perpendicular to each...
US-9,766,512 Liquid crystal display panel
A liquid crystal display panel including an array substrate, an opposite substrate disposed opposite to the array substrate and liquid crystal medium between...
US-9,766,510 Pixel unit and array substrate
The present invention provides a pixel unit and an array substrate. The pixel electrode includes four branch sections to divide the pixel zone into four display...
US-9,766,509 Pixel unit
A pixel unit is provided. The pixel unit includes a first strip main electrode extending to a first edge of the pixel unit. A first strip edge electrode of the...
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