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Patent # Description
US-9,887,092 Etching method, etching apparatus, and storage medium
Provided is an etching method including: an etching step of performing an etching processing using an etching liquid on a workpiece accommodated in an etching...
US-9,887,091 Wafer processing method
A method of processing a wafer includes: a grinding step of grinding a back surface of the wafer to form, on the back side of the wafer, a recess corresponding...
US-9,887,090 Metal gate structure
A method comprises depositing a dielectric layer on sidewalls and a bottom of a trench of a gate structure, depositing a metal layer on the dielectric layer,...
US-9,887,089 Semiconductor structures having T-shaped electrodes
A semiconductor structure having a T-shaped electrode. The electrode has a top portion and a narrower stem portion extending from the top portion to a surface...
US-9,887,088 Method for fabricating semiconductor device
A method for fabricating semiconductor device includes the steps of: providing a substrate having a memory region defined thereon; forming a trench in the...
US-9,887,087 Semiconductor and other materials by thermal neutron transmutation
A method of manufacturing p-n junction in semiconductor material such that small dimensions of such junctions are maintained, and associated lattice...
US-9,887,086 Method for manufacturing a wide bandgap junction barrier schottky diode
A method for manufacturing a wide bandgap junction barrier Schottky diode having an anode side and a cathode side is provided, wherein an (n+) doped cathode...
US-9,887,085 Semiconductor device and method for manufacturing the same
A photoresist is exposed to light under a condition that sensitivity of a second portion of the photoresist on a recessed portion of a base layer is higher than...
US-9,887,084 Semiconductor devices and methods of manufacture thereof
A method includes depositing an insulating layer over a substrate, the substrate including a first semiconductor material. The method also includes forming an...
US-9,887,083 Methods of forming capacitors
A method of forming a capacitor includes depositing a dielectric metal oxide layer of a first phase to a thickness no greater than 75 Angstroms over an inner...
US-9,887,082 Method and apparatus for filling a gap
There is provided a method of filling one or more gaps by providing the substrate in a reaction chamber and introducing a first reactant to the substrate with a...
US-9,887,081 Method for manufacturing insulating film laminated structure
A method for manufacturing an insulating film laminated structure includes a step of forming a first high-k film on a semiconductor substrate, a step of...
US-9,887,080 Method of forming SiOCN material layer and method of fabricating semiconductor device
A method of forming a SiOCN material layer and a method of fabricating a semiconductor device are provided, the method of forming a SiOCN material layer...
US-9,887,079 Supply apparatus and supply method for supplying fluid carbon dioxide
Provided are a supply apparatus and a supply method for supplying fluid carbon dioxide that are energy-saving and efficient. The supply apparatus for supplying...
US-9,887,078 Single-wafer-type cleaning apparatus
A single-wafer-type cleaning apparatus is provided. The single-wafer-type cleaning apparatus is configured to be capable of controlling electrostatic charges...
US-9,887,077 Removal of metal
Methods of removing metal from a portion of a substrate are useful in integrated circuit fabrication. Methods include exposing the substrate to an oxidizing...
US-9,887,076 Method and system for controlling convective flow in a light-sustained plasma
A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a bulb-less gas...
US-9,887,075 Method of generating electric field for manipulating charged particles
A device for manipulating charged particles using an axial electric field as they travel along a longitudinal axis of the device is disclosed. The method...
US-9,887,074 Method and apparatus for mass spectrometry of macromolecular complexes
A method of analyzing macromolecular complex ions, such protein complex ions, by mass spectrometry and apparatus for performing the method, wherein the method...
US-9,887,073 Physical vapor deposition system and physical vapor depositing method using the same
A physical vapor deposition system includes a chamber, a cover plate, a pedestal, and a collimator. The cover plate is disposed on the chamber for holding a...
US-9,887,072 Systems and methods for integrated resputtering in a physical vapor deposition chamber
The present disclosure is directed to a material layer deposition system. The material layer deposition system includes a wafer pedestal configured to support...
US-9,887,071 Multi-zone EPD detectors
The present disclosure relates to a semiconductor body etching apparatus having a multi-zone end point detection system. In some embodiments, the multi-zone end...
US-9,887,070 Plasma processing apparatus and plasma processing method
To control temperature of a sample in plasma processing with high accuracy while securing an electrostatic chucking force 5 without breakdown of an...
US-9,887,069 Controlling ion energy distribution in plasma processing systems
A plasma processing system for processing at least a substrate with plasma. The plasma processing chamber is capable of controlling ion energy distribution. The...
US-9,887,068 Plasma process apparatus
A plasma process apparatus that utilizes plasma so as to perform a predetermined process on a substrate, and includes a process chamber that houses a substrate...
US-9,887,067 Boron implanting using a co-gas
An apparatus and methods of improving the ion beam quality of a halogen-based source gas are disclosed. Unexpectedly, the introduction of a noble gas, such as...
US-9,887,066 Systems for controlling a high power ion beam
A system for controlling a high-power ion beam is disclosed, such as for steering, measuring, and/or dissipating the beam's power. In one embodiment, the ion...
US-9,887,065 Low specimen drift TEM holder and cooler for use in microscopy
A low specimen drift holder and cooler for use in microscopy, and a microscope comprising said holder. The present invention is in the field of microscopy,...
US-9,887,064 Stage device and charged particle beam device using the same
To provide a stage device and a charged particle beam device using the same capable of effectively suppressing thermal deformation of a stage generated by...
US-9,887,063 Radiation generating tube, radiation generating apparatus, radiography system and manufacturing method thereof
The present invention relates to a radiation generating tube. The radiation generating tube includes an envelope including an insulating tubular member having...
US-9,887,061 X-ray tube device and method for using X-ray tube device
This X-ray tube device includes an anode and a cathode including an emitter emitting an electron to the anode. The emitter includes an electron emission portion...
US-9,887,060 Ceramic ion source chamber
The IHC ion source comprises an ion source chamber having a cathode and a repeller on opposite ends. The ion source chamber is constructed of a ceramic material...
US-9,887,059 Glass welding method
A glass layer 103 containing a binder, a laser-light-absorbing pigment, and a glass frit 102 is irradiated with laser light L2, so as to gasify the binder and...
US-9,887,058 Power supply circuit
A power supply circuit for electronic equipment that might be affected by overheating or by a fire, the power supply circuit including a bistable switch...
US-9,887,057 Remote activated fuse and circuit
A fuse includes first, second, and third terminals disposed on a substrate. Respective ends of one or more primary conductors of the fuse are connected to one...
US-9,887,056 Method of fabricating a relay
The present invention relates to a relay for an electric vehicle and a method of manufacturing the same, and more particularly, a relay for an electric vehicle...
US-9,887,055 Mechanical fuse device
Disclosed herein are efficient mechanical fuse devices that are capable of functioning at high current levels. These devices comprise mechanical features...
US-9,887,054 Electromagnetic contactor having snap-fit section coupling frames
The electromagnetic contactor includes a first frame in which an operation electromagnet is mounted; a second frame in which a contact mechanism is mounted; and...
US-9,887,053 Controlling relay actuation using load current
In some aspects, a relay control device includes a processor and a timer. The processor is electrically connectable to a relay that controls current flow to a...
US-9,887,052 Light guide plate and light emitting keyboard having the same
A light guide plate includes a light shielding plate body, a light guide plate body and a plurality of light source receiving spaces. The light shielding plate...
US-9,887,051 Remote disconnect switch assembly
Described herein are embodiments of a remote disconnect switch assembly. In one embodiment, the remote disconnect switch assembly comprises: an actuator; a...
US-9,887,050 Circuit breakers with metal arc chutes with reduced electrical conductivity overlay material and related arc chutes
Circuit breakers with a metal arc chute having a base and sidewalls extending outward from the base forming an open cavity, a movable arm holding a movable...
US-9,887,049 Magnetic modular assembly for behavioral studies
A modular assembly set system for use in modular constructions suitable for behavioral research made of a polycarbonate, acrylic or other material walls with...
US-9,887,048 Stretchable supercapacitor and method of manufacturing the same
Provided is a stretchable supercapacitor and a method of manufacturing the same. The stretchable supercapacitor includes a separator between first and second...
US-9,887,047 Negative electrode active material for energy storage devices and method for making the same
The described embodiments provide an energy storage device that includes a positive electrode including an active material that can store and release ions, a...
US-9,887,046 Graphene composites and methods of making and using the same
An graphene composites have reduced graphene oxide and a layered double-hydroxide distributed on the reduced graphene oxide. The composites may also include...
US-9,887,045 Power storage device and manufacturing method thereof
A power storage device has a power storage element and an electrolytic solution. The power storage element includes an anode body, a cathode body opposed to the...
US-9,887,044 Textured current collector foil
The invention relates to a current collector foil for batteries, accumulators or capacitors, comprising a carrier material and at least one electrically...
US-9,887,043 Method of manufacturing dye-sensitized solar cell having light absorption increase means and the solar cell
A dye-sensitized solar cell is provided. The solar cell includes a transparent substrate; a conductive transparent electrode formed on a surface of the...
US-9,887,042 Dielectric material, capacitor and method
A dielectric comprises a matrix and a plurality of isolated, ionomeric domains, defined as micelles herein, distributed within the matrix. A capacitor is...
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