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Patent # Description
US-1,003,2630 Method of manufacturing semiconductor device
There is provided a technique for facilitating a patterning process by the DSA appropriately and efficiently. According to the technique described herein, there...
US-1,003,2629 Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
A method of manufacturing a semiconductor device includes: providing a substrate; and forming a film on the substrate by supplying a silicon hydride and a...
US-1,003,2628 Source/drain performance through conformal solid state doping
A method for improving source/drain performance through conformal solid state doping and its resulting device are disclosed. Specifically, the doping takes...
US-1,003,2627 Method for forming stacked nanowire transistors
A method includes forming a first semiconductor stack using an epitaxial growth process, the first semiconductor stack comprising a first plurality of...
US-1,003,2626 Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus,...
A semiconductor device manufacturing method includes: vertically arranging and storing a plurality of substrates in a processing container and forming a...
US-1,003,2625 Method of forming a semiconductor device comprising titanium silicon oxynitride
A method of making a semiconductor device includes forming a titanium nitride layer over a gate dielectric layer. The method further includes performing a...
US-1,003,2624 Substrate support and baffle apparatus
A substrate support apparatus is provided. The apparatus includes a circular base plate and one or more spacers disposed about a circumference of the base...
US-1,003,2623 Method and system for cleaning semiconductor substrate
A cleaning method including a persulphuric acid producing step of causing a cleaning sulfuric acid solution to travel into an electrolyzing section and to...
US-1,003,2622 Light source device
In a light source device, a control unit causes an energy density of a laser light in a lighting start region RS when a laser support light is maintained to be...
US-1,003,2621 Flat gas discharge tube devices and methods
Devices and methods related to flat discharge tubes. In some embodiments, a gas discharge tube (GDT) device can include a first insulator substrate having first...
US-1,003,2620 Broadband light source including transparent portion with high hydroxide content
A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to...
US-1,003,2619 High brightness laser-sustained plasma broadband source
A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including...
US-1,003,2618 Method for determining the structure of a macromolecular assembly
A method of determining the structure of a macromolecular assembly (MMA) comprises the steps of (a) generating precursor ions of an MMA species to be...
US-1,003,2617 RF ion guide with axial fields
RF ion guides are configured as an array of elongate electrodes arranged symmetrically about a central axis, to which RF voltages are applied. The RF electrodes...
US-1,003,2616 Sample introduction device
A sample introduction device comprises a sampling unit, a gas suction pump, adsorption units, a piston cylinder and a desorption cylinder that comprises a...
US-1,003,2615 Systems and methods for single cell culture and analysis by microscopy and MALDI mass spectrometry
Systems and methods for single cell culture and analysis by microscopy and matrix assisted laser desorption ionization mass spectrometry are disclosed. The...
US-1,003,2614 Methods for analysis of lipids using mass spectrometry
A method and apparatus for analyzing samples using mass spectrometry are disclosed. The apparatus includes a reaction device configured to dissociate sample...
US-1,003,2613 Non-parametric methods for mass spectromic relative quantification and analyte differential abundance detection
A method of normalizing data can comprise globally normalizing at least a first and second data distribution by normalizing the proximal compositional...
US-1,003,2612 Two-dimensional separation and imaging technique for the rapid analysis of biological samples
A method of ion mapping is disclosed comprising depositing a sample onto a target surface and separating the sample on the target surface according to a first...
US-1,003,2610 Plasma source
A plasma generating device includes a plasma source having a plasma source hollow body (1) and an electron emission unit (5) for emitting free electrons into...
US-1,003,2609 Low temperature atmospheric pressure plasma applications
Plasma applications are disclosed that operate with helium or argon at atmospheric pressure, and at low temperatures, and with high concentrations of reactive...
US-1,003,2608 Apparatus and method for tuning electrode impedance for high frequency radio frequency and terminating low...
Embodiments of the present invention relate to apparatus for improving uniformity and film stress of films deposited during plasma process of a substrate....
US-1,003,2607 Frequency tuning of a RF-generator within a plasma process
A method of frequency tuning an electrical generator for supplying electrical power to a plasma is provided. Also provided is a plasma processing system and a...
US-1,003,2606 Semiconductor processing with DC assisted RF power for improved control
Semiconductor processing systems are described including a process chamber. The process chamber may include a lid assembly, grid electrode, conductive insert,...
US-1,003,2605 Methods and apparatus for controlling plasma in a plasma processing system
Methods and apparatus for processing a substrate in a multi-frequency plasma processing chamber are disclosed. The base RF signal pulses between a high power...
US-1,003,2604 Remote plasma and electron beam generation system for a plasma reactor
Embodiments of an apparatus having an improved coil antenna assembly with a remote plasma source and an electron beam generation system that can provide...
US-1,003,2603 Charged particle beam lithography apparatus and charged particle beam lithography method
A charged particle beam lithography apparatus according to an embodiment includes: a pattern-writing-data data storage processing circuitry configured to store...
US-1,003,2602 Method for imaging wafer with focused charged particle beam in semiconductor fabrication
A method for processing a semiconductor wafer is provided. The method includes positioning the semiconductor wafer in a scanning electron microscope (SEM). The...
US-1,003,2601 Platen support structure
A platen support structure adapted to thermally insulate a heated platen portion from a cold base plate while providing substantially leak-free gas transport...
US-1,003,2600 Charged particle source
This invention provides a charged particle source, which comprises an emitter and means for generating a magnetic field distribution. The magnetic field...
US-1,003,2599 Time-resolved charged particle microscopy
A method of investigating a specimen using charged particle microscopy, comprising the following steps: Using a primary source to produce a pulsed beam of...
US-1,003,2598 X-ray systems and methods including X-ray anodes
An anode for an X-ray tube can include a ceramic body, e.g., material that includes yttrium-oxide derivatives. Upon collision with an anode, the kinetic energy...
US-1,003,2597 X-ray generating tube, X-ray generating apparatus, X-ray imaging system, and anode used therefor
An anode member includes a first metal tube and a second metal tube having a coefficient of thermal expansion that is larger than that of the first metal tube....
US-1,003,2596 Method for assembling an electron exit window and an electron exit window assembly
A method for assembling an electron exit window of an electron beam generating device comprises arranging a foil support plate on a housing of the electron beam...
US-1,003,2595 Robust electrode with septum rod for biased X-ray tube cathode
In the present invention, a cathode assembly for an X-ray tube is provided including a cathode cup, a pair of emitters disposed within the cup and each...
US-1,003,2594 High efficiency hollow cathode and cathode system applying same
The present invention relates to a high efficiency hollow cathode and a cathode system applying the same, and comprises: a tube comprising at least two...
US-1,003,2593 Electron generation apparatus
The present disclosure relates to an electron generation apparatus including a discharge pin module provided with a support plate, discharge pins coupled to the...
US-1,003,2592 Force sensing switch
A force sensing switch for use in an electronic device can include one or more dome switches disposed over a top surface of a deflectable beam. One or more...
US-1,003,2591 Fuse arrangement
A fuse arrangement, including: at least a first terminal, a second terminal, and a fuse, wherein the first terminal and the second terminal may be electrically...
US-1,003,2590 Circuit breakers with shaped neutral busbars and/or load terminals and related methods
Arc Fault Circuit Interrupter (AFCI), Ground Fault Circuit Interrupter (GFCI) or AF/GF circuit breakers which may optionally have relatively small or compact...
US-1,003,2589 Actuating apparatus for a vacuum interrupter and disconnecting arrangement
An actuating device for a vacuum switching tube has a connecting element which can be connected to an electric contact of the vacuum switching tube, an...
US-1,003,2588 Integrated high voltage contactor and service disconnect
An integrated contactor/service disconnect assembly according to an exemplary aspect of the present disclosure includes, among other things, a stationary...
US-1,003,2587 Direct current relay
In some embodiments, a DC relay includes a pair of fixed contacts fixedly installed on one side of a frame, a movable contact movably installed below the pair...
US-1,003,2586 Relay having two electrically parallel contact springs
A relay with two current paths thermally connected in parallel is particularly fail-safe. In case of a failure of one main contact, the additional load current...
US-1,003,2585 Electromagnetic contactor
There is provided an electromagnetic contactor which can easily and inexpensively change the DC operation type to the AC operation type. The electromagnetic...
US-1,003,2584 Robust semiconductor power devices with design to protect transistor cells with slower switching speed
This invention discloses a power switch that includes a fast-switch semiconductor power device and a slow-switch semiconductor power device controllable to turn...
US-1,003,2583 Protective circuit substrate
In a protective circuit substrate having a circuit substrate and a protective element, the protective element including: an insulating substrate; a...
US-1,003,2582 Gas circuit breaker
A pair of fixed arc electrodes are arranged facing each other within a sealed container that is filled with arc-extinguishing gas 1. There are provided: a...
US-1,003,2581 Coupling element for an electric switching device
A coupling element is provided for an electric switching device wherein the coupling element includes a first switching contact for opening and closing an...
US-1,003,2580 Input device having rotatable disk
A device for inputting commands includes a casing, a rotatable disk, and a processor. The rotatable disk can rotate relative to the casing, and has a plurality...
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