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Patent # Description
US-1,003,7893 Method and apparatus for etching wafer with etching gas
A method and apparatus for etching a wafer are provided. The method includes placing a first wafer with a first target material into a first chamber, and...
US-1,003,7891 Manufacturing method of element chip
A manufacturing method of an element chip includes a preparation process of adhering a holding sheet to the first main surface of a substrate so as to prepare...
US-1,003,7890 Method for selectively etching with reduced aspect ratio dependence
A method for selectively etching an etch layer with respect to a mask is provided. An etch process is provided comprising a plurality of etch cycles, wherein...
US-1,003,7889 Cationic particle containing slurries and methods of using them for CMP of spin-on carbon films
The present invention provides methods for chemical mechanical polishing (CMP polishing) spin coated organic polymer films on a semiconductor wafer or substrate...
US-1,003,7888 Three-dimensional nonvolatile memory devices including interposed floating gates
Provided are three-dimensional nonvolatile memory devices and methods of fabricating the same. The memory devices include semiconductor pillars penetrating...
US-1,003,7887 Method for implanting ions into a semiconductor substrate and an implantation system
A method for implanting ions into a semiconductor substrate includes performing a test implantation of ions into a semiconductor substrate. The ions of the test...
US-1,003,7886 Method of manufacturing silicon carbide semiconductor device using graphene and hexagonal boron nitride
A method of manufacturing a silicon carbide semiconductor device having a contact formed between a p-type silicon carbide semiconductor body and a metal...
US-1,003,7885 Atomic layer deposition sealing integration for nanosheet complementary metal oxide semiconductor with...
A semiconductor device including a gate structure present on at least two suspended channel structures, and a composite spacer present on sidewalls of the gate...
US-1,003,7884 Selective atomic layer deposition for gapfill using sacrificial underlayer
Methods and apparatuses for depositing films in high aspect ratio features and trenches on substrates using atomic layer deposition and deposition of a...
US-1,003,7883 Enhanced productivity for an etch system through polymer management
Embodiments described herein generally relate to an apparatus and methods for reducing the deposition of polymers in a semiconductor processing chamber. A...
US-1,003,7882 Method for cleaning wafer
A method for cleaning a wafer that has a pattern of recessed and projected portions formed on a surface thereof and contains at least one element selected from...
US-1,003,7881 Wafer cleaning apparatus and wafer cleaning method using the same
The object of the present invention is to provide a wafer cleaning apparatus that reduces the amount of dissolved oxygen, without using hydrogen peroxide, to be...
US-1,003,7880 Electrostatic ion trap mass spectrometer utilizing autoresonant ion excitation and methods of using the same
Methods of operation of electrostatic ion trap mass spectrometers in which ions are autoresonantly driven at selected higher integer (>2) multiples of ion...
US-1,003,7879 Ion trap design method and ion trap mass spectrometer
In a three-dimensional quadrupole-type ion trap, a shape and an arrangement of the ring electrode and the end cap electrodes 11 and 12 are shifted from an ideal...
US-1,003,7878 Blanking out of pulses in pulsed lasers for LDI mass spectrometers
The invention relates to optically pumped and pulsed solid-state lasers which are used in mass spectrometers in particular for ionization by matrix-assisted...
US-1,003,7877 Ion implantation system having beam angle control in drift and deceleration modes
An ion implantation system has an ion source forming an ion beam. An mass analyzer defines and varies a mass analyzed beam along a beam path. A moveable mass...
US-1,003,7876 Mass spectrometer and method for controlling injection of electron beam thereof
The present invention relates to an electron bean injection control of a mass spectrometer. A mass spectrometer of the present invention includes: a reference...
US-1,003,7875 Probe assembly for attaching a chromatography device to a mass spectrometer
A probe assembly is disclosed comprising an inlet for receiving an eluent from a chromatography device; an outlet for delivering the eluent to an ion source of...
US-1,003,7874 Early detection of hepatocellular carcinoma in high risk populations using MALDI-TOF mass spectrometry
Hepatocellular carcinoma (HCC) is detected in a patient with liver disease. Mass spectrometry data from a blood-based sample from the patient is compared to a...
US-1,003,7873 Automatic determination of demultiplexing matrix for ion mobility spectrometry and mass spectrometry
Multiplexed ion mobility spectrometry (IMS), mass spectrometry (MS) such as time-of-flight mass spectrometry (TOFMS), or hybrid IM-MS is carried out on a...
US-1,003,7872 Generation of discovery ion currents and mass spectrometry and uses thereof
Systems for the generation of discovery ion currents. One of the systems includes a mass spectrometer providing ion current measurement. The system includes a...
US-1,003,7871 Method of manufacturing electron multiplier body, photomultiplier tube, and photomultiplier
A method of manufacturing an electron multiplier body, the method includes a step of preparing a first plate-like member having a surface and a back surface and...
US-1,003,7870 Method for preparing hydrogen plasma annealing treatment, method for performing hydrogen plasma annealing...
A method of performing a surface treatment includes passivating a surface of an insulating part in a reaction chamber, and then performing a hydrogen plasma...
US-1,003,7869 Plasma processing devices having multi-port valve assemblies
A plasma processing device may include a plasma processing chamber, a plasma electrode assembly, a wafer stage, a plasma producing gas inlet, a plurality of...
US-1,003,7868 Plasma processing apparatus
The plasma processing apparatus includes: a processing chamber disposed inside a vacuum vessel; a first high-frequency power supply outputting a first...
US-1,003,7867 Inductive plasma source with high coupling efficiency
A method and apparatus are provided for processing a substrate with a radiofrequency inductive plasma in the manufacture of a device. The inductive plasma is...
US-1,003,7866 Charged particle beam apparatus
A charged particle beam apparatus with improved depth of focus and maintained/improved resolution has a charged particle source, an off-axis illumination...
US-1,003,7865 System and method for providing real-time visual feedback to control multiple autonomous nano-robots
The present invention relates to a system and method for providing real-time visual feedback to automatically control actions of multiple autonomous nano-robots...
US-1,003,7864 High voltage shielding and cooling in a charged particle beam generator
The invention relates to a charged particle beam generator. The generator may comprise a high voltage shielding arrangement (201) for shielding components...
US-1,003,7863 Continuous ion beam kinetic energy dissipater apparatus and method of use thereof
The invention comprises a method and apparatus for slowing positively charged particles, comprising the steps of: (1) transporting the positively charged...
US-1,003,7862 Charged particle detecting device and charged particle beam system with same
A charged particle detecting device includes: a holding structure; a first charged particle detector at the terminal portion of the holding structure; a second...
US-1,003,7861 Lamp, method for manufacturing a lamp and use of a holder for such a lamp
A lamp (10), which is particularly a motor vehicle headlight, comprises a burner (12) for emitting light, which is supported by a holder (16) for mechanically...
US-1,003,7860 Ion filter and method of manufacturing same
An ion filter used for an electron multiplier includes an insulating substrate; a first conductive layer formed on one main surface of the substrate; and a...
US-1,003,7859 Over-temperature protection method, over-temperature protection circuit and linear driving circuit thereof
A method of over-temperature protection for a power switch, can include: (i) generating a sensing signal by sensing a temperature of the power switch; (ii)...
US-1,003,7858 Electric switch assembly
A rotary switch assembly, including a rotary contact and a stationary contact, and a rotary actuator for rotating the rotary contact such as to connect with and...
US-1,003,7857 Light emitting keyboard
A light emitting keyboard is provided. The keyboard includes: a plurality of keys, wherein each of the keys has a light source; and a controller, for turning on...
US-1,003,7856 Electrical system, and electrical switching apparatus and guard member therefor
A guard member is for an electrical switching apparatus of an electrical system. The electrical system includes at least one electrical conductor. The...
US-1,003,7855 Ultracapacitor with a novel doped carbon
Doped activated microwave expanded graphite oxide materials and doped monolayer graphene materials, and methods of making these materials. The materials exhibit...
US-1,003,7854 Energy accumulation basket
The present invention relates to an energy accumulation basket, formed by holders provided with multiple housings where there are arranged capacitors held by...
US-1,003,7853 Dye-adsorption method and apparatus thereof
A dye adsorption method and a dye adsorption apparatus is provided in this disclosure. The dye adsorption method includes a dye adsorption step. In the dye...
US-1,003,7852 Capacitor unit and capacitor casing structure
A capacitor unit includes a casing, a heat sink, a heat radiation sheet, and a notch. The casing accommodates the capacitors. The casing includes a positive...
US-1,003,7851 Multilayer ceramic capacitor
A multilayer ceramic capacitor includes a laminated body including an inner layer portion including ceramic dielectric layers and internal electrodes, and outer...
US-1,003,7850 Multilayer film capacitor
A multilayer film capacitor having a composite stack disposed between two electrodes where the composite stack includes at least one thermoplastic conductive...
US-1,003,7849 Ceramic capacitor and methods of manufacture
A capacitor includes a pair of electrodes and a metalized dielectric layer disposed between the pair of electrodes, in which the metalized dielectric layer has...
US-1,003,7848 Inductive rotary transmitter
An inductive rotary transmitter includes a rotor and a stator, which form a rotary transmitter. A rotor winding is arranged on the rotor, and a stator winding...
US-1,003,7847 Apparatus and method for wirelessly receiving power
A wireless power receiver includes a receiving unit configured to wirelessly receive power through a resonance between a source resonator and a target...
US-1,003,7846 Ignition coil for internal combustion engine
An ignition coil for an internal combustion engine includes an annular elastic seal which is tightly attached to a high-voltage tower and a plug installed in...
US-1,003,7845 Variable inductor and method for manufacturing the same
A variable inductor of which variable inductance characteristics can be adjusted is provided. The inductor includes: a magnetic core having a preset shape; and...
US-1,003,7844 Common mode filter
A common mode filter includes a core, and first and second wires wound around the core. Each of the first and second wires includes at least i-1.sup.th turn,...
US-1,003,7843 Electrical device, in particular a coil or a transformer
The invention relates to an electrical device comprising a stack of electrical elements, wherein: a central axis is defined in the stack; each element comprises...
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