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Patent # Description
US-1,006,8793 Semiconductor structure for preventing generation of void and method for manufacturing the same
A semiconductor structure including a substrate, an isolation structure, a first gate structure, a second gate structure and a protection layer is provided. The...
US-1,006,8792 Method and apparatus for liquid treatment of wafer shaped articles
An apparatus for processing wafer-shaped articles comprises a rotary chuck adapted to hold a wafer shaped article thereon. The rotary chuck comprises a...
US-1,006,8791 Wafer susceptor for forming a semiconductor device and method therefor
In one embodiment, a wafer susceptor is formed to have portion of the susceptor that is positioned between a wafer pocket and an outside edge of the susceptor...
US-1,006,8790 Electrostatic chuck device
An electrostatic chuck device that adsorbs a plate-like specimen with an electrostatic adsorption electrode and cools the plate-like specimen, including an...
US-1,006,8789 Method of using a wafer cassette to charge an electrostatic carrier
A method comprising placing a wafer assembly in a wafer cassette, wherein the wafer assembly includes a wafer and an electrostatic carrier attached to the...
US-1,006,8788 Communication device and method for controlling communication device
A communication device includes a communicator that performs communication via a network, IO ports that connect with a manufacturing apparatus, a packet monitor...
US-1,006,8787 Bowing semiconductor wafers
Methods for processing semiconductor wafers, methods for loading semiconductor wafers into wafer carriers, and semiconductor wafer carriers. The methods and...
US-1,006,8786 Data structures for semiconductor die packaging
At least some embodiments are directed to a system that comprises storage comprising a data structure that cross-references an identifier of a semiconductor...
US-1,006,8785 Wafer loading apparatus of wafer polishing equipment and method for adjusting wafer loading position
An embodiment relates to a wafer loading apparatus of wafer polishing equipment. Provided is the wafer loading apparatus of wafer polishing equipment,...
US-1,006,8784 Indicator used in electronic device manufacturing apparatus and method for designing and/or managing the apparatus
Provided is an indicator that can easily detect whether treatment with at least one member of plasma, ozone, ultraviolet rays, and radical-containing gas is...
US-1,006,8783 Sample holder
A sample holder of the present invention includes a base body formed of ceramic substrates laminated to each other and having an upper surface functioning as a...
US-1,006,8782 Device and method for scribing a bottom-side of a substrate while viewing the top side
A device includes a table surface defining a horizontal plane having an x-axis and a y-axis orthogonal to the x-axis and the x-axis and y-axis lie in the...
US-1,006,8781 Systems and methods for drying high aspect ratio structures without collapse using sacrificial bracing material...
Systems and methods for drying a substrate including a plurality of high aspect ratio (HAR) structures are performed after at least one of wet etching and/or...
US-1,006,8780 Lead frame connected with heterojunction semiconductor body
A semiconductor component includes a semiconductor chip including a first semiconductor body comprising silicon and a second semiconductor body attached to an...
US-1,006,8779 Systems and methods for fabricating a polycrystaline semiconductor resistor on a semiconductor substrate
In accordance with embodiments of the present disclosure, an integrated circuit may include at least one region of shallow-trench isolation field oxide, at...
US-1,006,8778 Plasma processing method and plasma processing apparatus
This plasma processing method includes a film formation step, a plasma processing step and a removal step. In the film formation step, a silicon oxide film is...
US-1,006,8776 Raster-planarized substrate interlayers and methods of planarizing same
An interlayer dielectric material includes a planar surface that exhibits planarity due to raster-patterned decomposition products due to use of a confocal...
US-1,006,8775 Method of bonding supporting substrate with device substrate for fabricating semiconductor device
According to one embodiment, a method for fabricating a semiconductor device is provided. The method for fabricating the semiconductor device includes three...
US-1,006,8774 Semiconductor device and manufacturing method thereof
A method of manufacturing a source structure for a p-type metal-oxide-semiconductor (PMOS) field effect transistor (FET) is provided. In the method, a first...
US-1,006,8773 Contact formation for split gate flash memory
An integrated circuit structure includes a plurality of flash memory cells forming a memory array, wherein each of the plurality of flash memory cells includes...
US-1,006,8772 Recess channel semiconductor non-volatile memory device and fabricating the same
A recess channel semiconductor non-volatile memory (NVM) device is disclosed. The recess channel MOSFET devices by etching into the silicon substrate for the...
US-1,006,8771 System and method for mitigating oxide growth in a gate dielectric
Oxide growth of a gate dielectric layer that occurs between processes used in the fabrication of a gate dielectric structure can be reduced. The reduction in...
US-1,006,8770 Method and structure for semiconductor device having gate spacer protection layer
A method of forming a semiconductor device includes providing a precursor. The precursor includes a substrate; a gate stack over the substrate; a first...
US-1,006,8769 Methods and apparatus for preventing counter-doping during high temperature processing
In a described example method, semiconductor wafer with a backside silicon nitride layer is encapsulated with a diffusion barrier layer prior to a high...
US-1,006,8768 Semiconductor device including line patterns
Provided is a semiconductor device. The device includes a plurality of line patterns, which extend in a first direction and are arranged a first space apart...
US-1,006,8767 Method of fabricating semiconductor device
A method for fabricating a semiconductor device includes forming a first mask pattern on a first film to extend in a first direction, forming a first spacer on...
US-1,006,8766 Oxidizing and etching of material lines for use in increasing or decreasing critical dimensions of hard mask lines
A method includes, for example, providing a starting semiconductor structure having a plurality of material lines disposed over a hard mask, and the hard mask...
US-1,006,8765 Multi-step system and method for curing a dielectric film
A multi-step system and method for curing a dielectric film in which the system includes a drying system configured to reduce the amount of contaminants, such...
US-1,006,8764 Selective metal oxide deposition using a self-assembled monolayer surface pretreatment
Embodiments of the invention provide methods for selective film deposition using a surface pretreatment. According to one embodiment, the method includes...
US-1,006,8763 Coating film forming method, coating film forming apparatus, and storage medium
A method of forming a coating film includes horizontally supporting a substrate, supplying a coating solution to a central portion of the substrate and...
US-1,006,8762 Manufacture method of gate insulating film for silicon carbide semiconductor device
Providing a manufacture method of a gate insulating film formed on an SiC substrate having thereon an SiON film, achieving both of the maintenance of an SiON...
US-1,006,8761 Fast modulation with downstream homogenisation
A method of mass spectrometry is disclosed involving scanning a parameter of a first device through which a mixture of components is passed. Different...
US-1,006,8760 MALDI-TOF mass spectrometers with delay time variations and related methods
MALDI-TOF MS systems have solid state lasers and successive and varied delay times between ionization and acceleration (e.g. extraction) to change focus masses...
US-1,006,8759 Mass spectrometry systems with convective flow of buffer gas for enhanced signals and related methods
Mass spectrometry systems include an ionizer, mass analyzer and the detector, with a high pressure chamber holding the mass analyzer and a separate chamber...
US-1,006,8758 Ion mass separation using RF extraction
An apparatus which has the capability of filtering unwanted species from an extracted ion beam without the use of a mass analyzer magnet is disclosed. The...
US-1,006,8757 Strong field photoionization ion source for a mass spectrometer
An ion source for a mass spectrometer comprises: an evacuated chamber having an interior receiving a gaseous sample effluent stream; a source of light pulses of...
US-1,006,8756 Mass spectrometer
The objective of the presently disclosed subject matter is to provide a mass spectrometer that improves the ionic permeability ratio at the entrance to an ion...
US-1,006,8755 Photo-dissociation of proteins and peptides in a mass spectrometer
A method of mass spectrometry is disclosed comprising directing first photons from a laser onto ions located within a 2D or linear ion guide or ion trap. The...
US-1,006,8754 Method of identifying precursor ions
A method of mass spectrometry is disclosed comprising mass selectively transmitting precursor ions from a mass analyzer into a fragmentation or reaction device,...
US-1,006,8753 Systems and methods for identifying precursor ions from product ions using arbitrary transmission windowing
A transmission window that has a constant rate of precursor ion transmission for each precursor ion is stepped across a mass range, producing a series of...
US-1,006,8752 Multiplexed precursor isolation for mass spectrometry
Systems and methods for multiplexed precursor ion selection are provided. A mass isolator includes a selection region of rods, a transmission region of rods,...
US-1,006,8750 Blanking aperture array apparatus, charged particle beam lithography apparatus, and electrode testing method
In one embodiment, a BAA apparatus 204 includes apertures 3, each of which being provided to blank charged particle beams 20. The apparatus 204 further includes...
US-1,006,8748 Scanning an object using multiple mechanical stages
A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple...
US-1,006,8747 Methods and devices for examining an electrically charged specimen surface
A method for examining a specimen surface with a probe of a scanning probe microscope, the specimen surface having an electrical potential distribution. The...
US-1,006,8746 Scanning electron microscope
The present invention relates to a scanning electron microscope realized to observe a test sample by detecting back-scattered electrons scattered and emitted...
US-1,006,8745 Charged particle beam device and sample holder for charged particle beam device
The purpose of the present invention is to provide a charged particle beam device and a sample holder for the charged particle beam device by which it is...
US-1,006,8744 Charged particle optical apparatus for through-the lens detection of particles
Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is...
US-1,006,8743 Ion source devices and methods
An ion source includes a chamber defining an interior cavity for ionization, an electron beam source at a first end of the interior cavity, an inlet for...
US-1,006,8742 Radiation generating tube, radiation generating apparatus, radiography system and manufacturing method thereof
The present invention relates to a radiation generating tube. The radiation generating tube includes an envelope including an insulating tubular member having...
US-1,006,8741 Field emission device and reforming treatment method
In a vacuum chamber (1), an emitter (3) and a target (7) are opposed to each other. A guard electrode (5) is disposed around an outer circumference of an...
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