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United States Patent Application	20060182560
Kind Code	A1
Mitsuyoshi; Ichiro	August 17, 2006

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Foreign Application Data

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Date	Code	Application Number
Jan 28, 2005	JP	JP2005-021361
Nov 17, 2005	JP	JP2005-332651

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Claims

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1. A substrate processing apparatus that performs processing of a substrate, comprising: a substrate processing unit to perform processing of a substrate; a cassette storing and transporting unit that stores and transports a cassette to encase a substrate, and that is disposed side by side with respect to said substrate processing unit; and a first mounting section that mounts said cassette and is disposed side by side with respect to said cassette storing and transporting unit, said cassette storing and transporting unit having: a plurality of shelves to hold a cassette; a second mounting section that mounts a cassette and is disposed between said substrate processing unit and said plurality of shelves; a first transporting section to transport a cassette between said first mounting section and said plurality of shelves; and a second transporting section to transport a cassette between said plurality of shelves and said second mounting section.

2. The substrate processing apparatus according to claim 1, wherein said first transporting section is disposed between said first mounting section and said plurality of shelves, and transports a cassette from a direction of one side of said plurality of shelves to said plurality of shelves.

3. The substrate processing apparatus according to claim 2, wherein said second transporting section is disposed between said substrate processing unit and said plurality of shelves, and transports a cassette from a direction of the other side of said plurality of shelves to said plurality of shelves.

4. The substrate processing apparatus according to claim 3, wherein said first transporting section and said second transporting section have a holding element to hold a cassette from the underside of said cassette; and said plurality of shelves have a passage section to allow said holding element to pass through in the vertical direction.

5. The substrate processing apparatus according to claim 4, wherein said cassette storing and transporting unit mounts a cassette and further has a judging section to judge the situation with regard to a substrate encased in a cassette.

6. The substrate processing apparatus according to claim 5, wherein said first transporting section transports a cassette between said judging section and said first mounting section.

7. The substrate processing apparatus according to claim 6, wherein said cassette storing and transporting unit further having: an alignment section to adjust the position of a substrate; and a third transporting section that takes out substrates one by one from a cassette mounted on said judging section and transports them to said alignment section, and that transports substrates one by one, the position of which is adjusted in said alignment section, to a cassette mounted on said judging section.

8. The substrate processing apparatus according to claim 1, wherein said plurality of shelves are arranged in two dimensions along the vertical direction and the horizontal direction.

9. The substrate processing apparatus according to claim 1, wherein said cassette storing and transporting unit further comprises a lifting mechanism that causes a cassette mounted on said second mounting section to ascend and descend while holding said cassette.

10. The substrate processing apparatus according to claim 5, wherein said judging section has: an opening and closing mechanism to open and close a lid of a cassette existing in said judging section; and a counting mechanism to count the number of substrates encased in a cassette that is opened and closed by said opening and closing mechanism.

11. The substrate processing apparatus according to claim 1, further comprising: an opening and closing mechanism to open and close a lid of a cassette mounted on said second mounting section.

12. The substrate processing apparatus according to claim 11, wherein said substrate processing unit has a transporting mechanism to load and unload a substrate with respect to a cassette mounted on said second mounting section.

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Description

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BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to a substrate processing apparatus that performs processing of a semiconductor substrate, a glass substrate for a liquid crystal display, a glass substrate for a photomask, a substrate for an optical disk, and the like (which are hereinafter referred to as a "substrate"). In particular, the invention relates to an improvement to transport efficiently a cassette in a cassette storing and transporting unit.

[0003] 2. Description of the Background Art

[0004] Conventionally, there has been known a substrate processing apparatus having a cassette storing and transporting unit that stores a cassette encasing a substrate, and transports a cassette to transfer a substrate between substrate processing units. The traditionally known substrate processing apparatus has such an advantage that the depth of a loader 10 can be reduced thereby to decrease its footprint.

[0005] However, in the traditionally known substrate processing apparatus, a transport robot of a loader section is disposed between a storage shelf and a load port. Therefore, when a cassette is transferred between the load port and the loader section, it is necessary to withdraw the transport robot into a suitable position.

[0006] In the conventionally known substrate processing apparatus, one transport robot performs transportation between the storage shelf and an opener. Hence, the transportation from the storage shelf to the opener, and the transportation from the opener to the storage shelf cannot be executed almost simultaneously.

SUMMARY OF THE INVENTION

[0007] The present invention is directed to a substrate processing apparatus that performs processing of a substrate.

[0008] According to the present invention, the substrate processing apparatus includes a substrate processing unit, a cassette storing and transporting unit, and a first mounting section. The substrate processing unit performs processing of a substrate. The cassette storing and transporting unit stores and transports a cassette to encase a substrate, and is disposed side by side with respect to the substrate processing unit. The first mounting section that mounts the cassette and is disposed side by side with respect to the cassette storing and transporting unit. The cassette storing and transporting unit has a plurality of shelves to hold a cassette, a second mounting section that mounts a cassette and is disposed between the substrate processing unit and the plurality of shelves, a first transporting section that transports a cassette between the first mounting section and the plurality of shelves, and a second transporting section that transports a cassette between the plurality of shelves and the second mounting section.

[0009] The transportation between the first mounting section and the plurality of shelves which is executed by the first transporting section, and the transportation between the second mounting section and the plurality of shelves which is executed by the second transporting section can be executed in parallel with each other. This can improve the throughput in the cassette storing and transporting unit, and in the substrate processing apparatus as well.

[0010] Preferably, the first transporting section is disposed between the first mounting section and the plurality of shelves, and transports a cassette to the plurality of shelves from a direction of one side of the plurality of shelves.

[0011] This provides for ease of access to a cassette on the first mounting section and on the plurality of shelves.

[0012] Preferably, the second transporting section is disposed between the substrate processing unit and the plurality of shelves, and transports a cassette to the plurality of shelves from a direction of the other side of the plurality of shelves.

[0013] Parallel operation of the respective transporting sections can be set without consideration of spatial interference between the first transporting section and the second transporting section.

[0014] Preferably, the first and second transporting sections have a holding element that holds a cassette from the underside of the cassette, and the plurality of shelves have a passage section that allows the holding element to pass through in the vertical direction.

[0015] The time required for a cassette transfer operation can be reduced thereby to improve the throughput in the cassette storing and transporting unit, and in the substrate processing apparatus as well.

[0016] Accordingly, an object of the present invention is to provide a substrate processing apparatus that can transport efficiently a cassette in a cassette storing and transporting unit.

[0017] These and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

[0018] FIG. 1 is a perspective view showing the overall construction of a substrate processing apparatus according to first and second preferred embodiments of the present invention;

[0019] FIG. 2 is a perspective view showing the construction of an FOUP in the first and second preferred embodiments;

[0020] FIG. 3 is a top view of a loader and unloader section in the first preferred embodiment;

[0021] FIG. 4 is a front view of the loader and unloader section in the first preferred embodiment;

[0022] FIG. 5 is a sectional view of a shelf member and an FOUP;

[0023] FIG. 6 is a top view of the neighborhood of the shelf member;

[0024] FIG. 7 is a top view of a loader and unloader section according to the second preferred embodiment;

[0025] FIG. 8 is a front view of the loader and unloader section in the second preferred embodiment;

[0026] FIG. 9 is a side view of a second opening and closing mechanism and a transporting mechanism in the first and second preferred embodiments; and

[0027] FIG. 10 is a side view of first and second opening and closing mechanisms in the first and second preferred embodiments.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

1. First Preferred Embodiment

[0029] FIG. 1 is a perspective view showing the overall construction of a substrate processing apparatus 1 in a first preferred embodiment. The substrate processing apparatus 1 is an apparatus that takes out, from an FOUP (front opening unified pod) 80, a set of a plurality of substrates (lots) encased in the FOUP 80, and that performs substrate processings in sequence with respect to the plurality of substrates, for example, etching with chemical solution such as hydrofluoric acid, and rinse with de-ionized water. As shown in FIG. 1, the substrate processing apparatus 1 consists mainly of a load port 10, a loader and unloader section 100, and a substrate processing unit 200. FIG. 1 and the succeeding respective figures are accompanied by an XYZ rectangular coordinate system, where the Z-axis direction is the vertical direction, and an XY plane is a horizontal plane, depending on the necessity for clarifying their respective directional relationships.

[0030] Here, the FOUP (cassette) 80 will now be described. FIG. 2 is a perspective view showing the construction of the FOUP 80. A flange 82 is formed on the top of a casing 81 of the FOUP 80. A lifter arm 171 (see FIGS. 3 and 4) grips the flange 82, thereby holding the FOUP 80 in suspension.

[0031] Additionally, a lid 83 is disposed on one surface of the casing 81 (the plane viewed in the direction of an arrow AR1 in FIG. 2). The lid 83 has a lock mechanism with respect to the casing 81. When the lock mechanism is allowed to function with the lid 83 attached to the casing 81, the lid 83 is secured to the casing 81 and the interior of the casing 81 becomes a closed space.

[0032] With this construction, if the FOUP 80 is transported in the exterior of the substrate processing apparatus 1, the lock mechanism is allowed to function with the lid 83 attached to the casing 81, thereby causing the interior of the casing 81 to become a closed space. Therefore, irrespective of the cleanliness of a clean room where the substrate processing apparatus 1 is placed, the interior of the FOUP 80 can be maintained at a high cleanliness.

[0033] On the other hand, the release of the lock mechanism enables the lid 83 to be removed from the casing 81, so that a substrate can be taken out from the interior of the casing 81, and a substrate can be encased in the interior of the casing 81. For example, 25 or 13 substrates are encased in the casing 81 with their respective main surfaces arranged along the horizontal direction.

[0034] The load port (the first mounting section) 10 is a mounting table, on which a transporting apparatus in the exterior of the substrate processing apparatus 1 (e.g., AVG (automatic guided vehicle)), or the FOUP 80 transferred from an operator of the substrate processing apparatus 1 is mounted. As shown in FIG. 1, the load port 10 is disposed side by side with respect to the loader and unloader section 100, and a plurality of (four in accordance with the first preferred embodiment) FOUPs 80 are mounted concurrently on a mounting surface 10a.

[0035] Additionally, as shown in FIGS. 1 and 3, a plurality of (four in accordance with this preferred embodiment) shutters 11 are disposed on a side surface on the load port 10 side in the loader and unloader section 100. Upon opening the shutter 11, there is formed an opening portion that provides communication between the external space of the substrate processing apparatus 1 and the internal space of the loader and unloader section 100.

[0036] This enables a transport robot 130a of the loader and unloader section 100 (see FIGS. 3 and 4) to perform, via the above opening portion, transportation of the FOUP 80 between the load port 10 and the internal space of the loader and unloader section 100. Specifically, the FOUP 80 encasing an untreated substrate is transported from the load port 10 to the loader and unloader section 100. The FOUP 80 encasing a treated substrate after being subjected to processing in the substrate processing unit 200 is transferred from the loader and unloader section 100 to the load port 10.

[0037] The loader and unloader section 100 is used as a cassette storing and transporting unit that temporarily stores in its interior the FOUP 80 mounted on the load port 10, and also transports the FOUP 80 encasing a substrate toward the substrate processing unit 200. As shown in FIG. 1, the loader and unloader section 100 is disposed at a place sandwiched between the load port 10 and the substrate processing unit 200.

[0038] Further, the substrate processing unit 200 has a second opening and closing mechanism 180 and a transporting mechanism 190 that are used in transferring a substrate between a second mounting section 160 and the substrate processing unit 200. The second opening and closing mechanism 180 and the transporting mechanism 190 are disposed in the vicinity of the shutter 161 of the loader and unloader section 100, as shown in FIGS. 3 and 9.

[0039] FIG. 9 is a side view of the second opening and closing mechanism 180 and the transporting mechanism 190 of the substrate processing unit 200. FIG. 10 is a side view of the second opening and closing mechanism 180. The substrate processing unit 200 has in its interior a chemical solution tank to store chemical solution and a rinsing tank to store de-ionized water. A substrate is subjected to a predetermined substrate processing by allowing the substrate to be stored in the chemical solution tank or the rinsing tank.

[0040] The second opening and closing mechanism 180 consists mainly of a latch part 181 and a lifting part 182, as shown in FIGS. 9 and 10. The latch part 181 can be fit in the lid 83 of the FOUP 80. The latch part 181 is attached to one end of a movable portion 182b. When a cylinder 182a of the lifting part 182 causes the movable portion 182b to execute advance and withdrawal motion in the directions indicated by a double-headed arrow AR2 (approximately the Z-axis direction), the latch part 181 ascends and descends in the directions indicated by the arrow AR2 (see FIG. 9). The latch part 181 can also be shifted in the directions indicated by a double-headed arrow AR3 (the Y-axis direction) by a horizontal shifting mechanism (not shown) (see FIG. 10).

[0041] Hence, when the latch part 181 is shifted with it fit in the lid 83 in the directions indicated by the arrow AR2 or AR3, the internal space of the casing 81 of the FOUP 80 mounted on the second mounting section 160 is opened or closed.

[0042] The transporting mechanism 190 consists mainly of a support part 191 and an advance and withdrawal section 192. The transporting mechanism 190 performs loading or unloading of a substrate with respect to a FOUP 80, when the shutter 161 is opened and the lid 83 of the FOUP 80 mounted on the second mounting section 160 is removed.

[0043] The support part 191 consists mainly of a plurality of (25 or 13 in this preferred embodiment) support arms 191a, and a fitting member 191b. The support arms 191a are arranged in the vertical direction (approximately the Z-axis direction) at equally spaced intervals while extending in the horizontal direction (approximately the Y-axis direction), and each of them supports a substrate such that the main surface of the substrate is approximately parallel to an XY plane. The end of each support arm 191a on the substrate processing unit 200 side is attached to the fitting member 191b extending in the vertical direction.

[0044] A lower end of the fitting member 191b is disposed on a movable tray 192a of the advance and withdrawal section 192. The advance and withdrawal section 192 has three trays (movable trays 192a and 192b, and a stationary tray 192c), as shown in FIG. 9. These trays 192a, 192b, and 192c are disposed in top-to-bottom order. The stationary tray 192c of the advance and withdrawal section 192 is attached to a rotary shaft 194 pivoted about a base 193, allowing the advance and withdrawal section 192 to be rotatable about an axis 194c.

[0045] With this construction, in connection with the advance and withdrawal section 192, the movable tray 192b executes advance and withdrawal motion with respect to the stationary tray 192c, and the movable tray 192a executes advance and withdrawal motion with respect to the movable tray 192b, so that the support part 191 shifts between the full-line position and the dotted-line position. As a result, an untreated substrate encased in the interior of the casing of the FOUP 80 is loaded in the substrate processing unit 200 while being supported by the support part 191 of the transporting mechanism 190. The treated substrate subjected to substrate processing in the substrate processing unit 200 is unloaded from the substrate processing unit 200 while being supported by the support part 191, and then encased in the casing 81 of the FOUP 80.

[0046] Thus, the substrate transferred to the substrate processing unit 200 from the loader and unloader section 100 by the transporting mechanism 190 of the substrate processing unit 200 is then stored in the above-mentioned chemical solution tank or rinsing tank so as to be subjected to a predetermined substrate processing such as rinsing or the like. The substrate after completion of the predetermined processing is then unloaded from the substrate processing unit 200 to the loader and unloader section 100 by the transporting mechanism 190.

[0047] A control unit 50 shown in FIG. 1 has a memory 51 that stores a program, a variable and the like, and a CPU 52 that executes control according to the program stored in the memory 51. Objects to be controlled such as the shutter 11 of the loader and unloader section 100, the transport robot 130, and the lifter 170 (see FIG. 3) are electrically connected to the control unit 50 by a signal line (not shown). Therefore, the CPU 52 causes these objects to be controlled to operate at a predetermined timing according to the program stored in the memory 51.

<1.2. Construction of Loader and Unloader Section>

[0048] FIGS. 3 and 4 are a top view and a front view of the loader and unloader section 100 in the first preferred embodiment, respectively. FIG. 5 is a sectional view of the shelf member 141a and the FOUP 80. FIG. 6 is a top view of the neighborhood of the shelf member 141a. The following is a detail description of the loader and unloader section 100 that is used as a cassette storing and transporting unit.

[0049] As shown in FIGS. 3 and 4, the loader and unloader section 100 consists mainly two transport robots 130 (130a, 130b), a shelf array 140, and two mounting sections (second and third mounting sections 160, 150).

[0050] Referring to FIG. 3, individual elements arranged in the loader and unloader section 100 are arranged along the horizontal direction (approximately the X-axis direction) so as to form three rows. Specifically, the transport robot (a first transporting section) 130a and a third mounting section (a judging section) 150 are disposed on the first row from the load port 10 side. The shelf array 140 is disposed on the second row. The transport robot (a second transporting section) 130b and the second mounting section 160 are disposed on the third row.

[0051] The shelf array 140 is an encasing section to store a plurality of (16 in accordance with the first preferred embodiment) FOUPs 80. In other words, the shelf array 140 stores not only the FOUPs 80 encasing an untreated substrate, but also the empty FOUPs 80, from which the substrate is already taken out. As shown in FIGS. 3 and 4, the shelf array 140 is obtained by arranging in two dimensions a plurality of shelves along the vertical direction (the Z-axis direction) and the horizontal direction (the X-axis direction).

[0052] Each of the plurality of shelves has a pair of shelf members 141a. As shown in FIGS. 5 and 6, each shelf member 141a is in the general shape of an "L", and is attached to the corresponding frame 145 such that the longitudinal direction of the shelf member 141a is approximately parallel to the Y-axis direction. A surface of the shelf member 141a, on which the FOUP 80 is mounted, has a projecting portion 142 that corresponds to a hole portion 85 disposed at a lower part of the FOUP 80. Hence, the FOUP 80 can be stably held on the pair of the shelf members 141a by fitting the projecting portions 142 of a pair of the shelf members 141a into the hole portions 85 of the FOUP 80.

[0053] Thus, in accordance with the first preferred embodiment, the pair of the shelf members 141a are used as a storage shelf to store the FOUP 80, and the region sandwiched between the pair of the shelf members 141a is used as an encasing space 141 to store the FOUP 80.

[0054] Formed between two shelf members 141a constituting a storage shelf is an opening portion 146 that is greater in size than a tip portion 139 of the transport robot 130 (130a, 130b). As shown in FIG. 4, each opening portion 146 is arranged along the vertical direction (the Z-axis direction).

[0055] Therefore, the tip portion 139 of the transport robot 130 ascends and descends in the interior of the shelf array 140 while passing through these opening portions 146. In other words, the opening portions 146 of a plurality of storage shelves in the shelf array 140 function as a passage portion allowing the tip portion 139 to pass through in the vertical direction.

[0056] Referring to FIG. 3, the transport robots 130a and 130b are FOUP transporting sections that are placed on the load port 10 side and the substrate processing unit 200 side, respectively, when viewed from the shelf array 140. That is, the transport robot (the first transporting section) 130a is disposed on the reverse side of the transport robot (the second transporting section) 130b with the shelf array 140 interposed therebetween.

[0057] In the first preferred embodiment, the both robots 130a and 130b have almost the same hardware configuration. In the following description, except where the transport robot 130a is discriminated from the transport robot 130b, the two are simply referred to as a "transport robot 130."

[0058] A tip portion 139 of the transport robot 130 is a holding element to hold the FOUP 80 from the underside, and is in the general shape of a triangle. A projecting portion 139a is disposed in the vicinity of each vertex on the upper surface side of the tip portion 139. Disposed at a lower part of the FOUP 80 are three hole portions 87 that correspond to the projecting portions 139a, respectively (see FIG. 5, in which two of the three hole portions are shown for convenience in plotting). The tip portion 139 is attached to an arm 138a, via a rotary shaft 134b positioned in approximately parallel to the Z-axis, thus allowing it to be rotatable about the rotary shaft 134b. Accordingly, the transport robot 130 stably holds the FOUP 80 by causing the three projecting portions 139a to fit in their respective corresponding hole portions 86 of the FOUP 80, while causing the tip portion 139 to rotate.

[0059] The arm 138a is attached to an arm 138b via the rotary shaft 134c positioned in approximately parallel to the Z-axis, and the arm 138b is attached to an anchor block 136 via the rotary shaft 134a. The anchor block 136 is disposed on a strut 131 extending in the vertical direction (the Z-axis direction) such that it can ascend and descend. The strut 131 is free to slide along a guide rail 132 extending in the horizontal direction (the X-axis direction).

[0060] With this construction, the transport robot 130 (130a, 130b) causes the FOUP 80 held on the tip portion 139 to shift in the horizontal direction along the shelf array 140 and to ascend and descend in the vertical direction. Therefore, the transport robot 130a transports the FOUP 80 among the storage shelf of the shelf array 140, the load port 10, and the third mounting section 150. The transport robot 130b transports the FOUP 80 between the storage shelf of the shelf array 140 and the second mounting section 160.

[0061] The transport robot 130a performs processing of: transporting the FOUP 80 that is loaded through the load port 10, from the load port 10 to the shelf array 140; transporting it from the load port 10 to the third mounting section 150; transporting it from the third mounting section 150 to the shelf array 140; and transporting the FOUP 80 stored in the shelf array 140 to the load port 10.

[0062] The transport robot 130b performs transportation of the FOUP 80 stored in the shelf array 140 from the shelf array 140 to the second mounting section 160; and transportation from the mounting section 150 to the shelf array 140.

[0063] Thus, the transport robots 130a and 130b are disposed oppositely with the shelf array 140 interposed therebetween. This enables a plurality of transportations to be executed almost concurrently, thereby improving the throughput in the load and unloader section 100 as a whole. Except where the transport robots 130a and 130b access to the same storage shelf, they can execute transportation of the FOUP 80 without mutual spatial interference. It is therefore possible to set the operations of the transport robots 130a and 130b without considering the interference between the two.

[0064] Moreover in the first preferred embodiment, the transportation of the FOUP 80 executed between the load port 10 and the substrate processing unit 200 is performed by the two transport robots 130a and 130b of the loader and unloader section 100, instead of the transporting section of the load port 10. Therefore, in the first preferred embodiment, neither of the transport robot 130a nor 130b is required to withdraw when the FOUP 80 is transported from the load port 10 to the substrate processing unit 200. This permits efficient transportation of the FOUP 80.

[0065] The transportation of the FOUP 80 between the transport robot 130 (130a, 130b) and each storage shelf of the shelf array 140 is executed as follows. That is, when the FOUP 80 is transferred from the transport robot 130 to the storage shelf, first, the tip portion 139 of the transport robot 130 is shifted such that the height position (the position in the Z-axis direction) of a bottom 88 of the FOUP 80 encased at a storage shelf is higher than the height position of a top surface 143 of the shelf member 141a (141b, 141c) (see FIG. 5). Subsequently, the tip portion 139 is allowed to descend such that the projecting portions 142 of a pair of the shelf member 141a (141b, 141c) are fit in the hole portions 85 of the FOUP 80.

[0066] By allowing the tip portion 139 to further descend, the FOUP 80 is mounted on the top surface 143 of the pair of the shelf member 141a (141b, 141c), and the projecting portion 139a of the tip portion 139 is separated from a hole portion 87, thus completing the transfer of the FOUP 80 from the transport robot 130 to the storage shelf.

[0067] On the other hand, when the FOUP 80 is transferred from a storage shelf to the transport robot 130, first, the tip portion 139 of the transport robot 130 is shifted to under the FOUP 80 that is mounted on a storage shelf. Subsequently, the tip portion 139 is allowed to ascend such that the projecting portion 139a of the tip portion 139 is fit in the hole portion 87 of the FOUP 80.

[0068] By allowing the tip portion 139 to further ascend, the FOUP 80 is held by the tip portion 139, and the projecting portion 142 is separated from the hole portion 85, thus completing the transfer of the FOUP 80 from the storage shelf to the transport robot 130.

[0069] Thus, in process of transporting the FOUP 80 between the transport robot 130 and the storage shelf, the FOUP 80 is shifted above the shelf member 141a (141b, 141c). Consequently, the encasing space 141 is set so as to have a greater height than the FOUP 80.

[0070] The second mounting section 160 is used to transfer a substrate encased in the FOUP 80 to the substrate processing unit 200, and disposed on the substrate processing unit 200 side when viewed from the shelf array 140.

[0071] Like the shelf member 141a, the shelf member 141b is a member that is in the general shape of an "L", and has a plurality of (three in accordance with the first preferred embodiment) projecting portions on the plane on the FOUP 80 side. It is disposed such that the longitudinal direction of the shelf member 141b is approximately parallel to the X-axis direction, as shown in FIGS. 3 and 4.

[0072] Additionally, a shutter 161 that can ascend and descend in the directions indicated by a double-headed arrow AR4 (approximately the Z-axis direction, see FIG. 9) is disposed on a side wall on the substrate processing unit 200 side in the vicinity of the second mounting section 160. Upon opening the shutter 161, there is formed an opening portion that provides communication between the internal space of the loader and unloader section 100 and the internal space of the substrate processing unit 200.

[0073] Hence, when the FOUP 80 is mounted on a pair of the shelf members 141b, the second opening and closing mechanism 180 of the substrate processing unit 200 removes the lid 83 of the FOUP 80, while the transporting mechanism 190 of the substrate processing unit 200 takes out an untreated substrate from the FOUP 80, and transports the untreated substrate into the substrate processing unit 200 via the opening portion formed upon opening the shutter 161.

[0074] On the other hand, after the substrate processing unit 200 performs processing such as rinsing and drying with respect to a substrate, the shutter 161 is opened, and the transporting mechanism 190 transports the treated substrate via the opening portion into the FOUP 80, while the second opening and closing mechanism 180 closes the lid 83 of the FOUP 80.

[0075] A lifter 170 of the second mounting section 160 is a lifting section that causes the FOUP 80 mounted on a pair of the shelf members 141b to ascend and descend between a mounting position (the full-line position in FIG. 4) and a withdrawal position (the dash-single-dot-line position in FIG. 4). As shown in FIG. 4, the lifter 170 is disposed above a pair of the shelf members 141b, and has a lifter arm 171.

[0076] The lifter arm 171 grips a flange 82 (a grip portion) formed on the top of the FOUP 80, and releases its grip state. The lifter arm 171 can also ascend and descend along the vertical direction (the Z-axis direction) by a driving mechanism (not shown).

[0077] This enables the second mounting section 160 to raise the empty FOUP 80, from which the substrate is already supplied to the substrate processing unit 200, to the withdrawal position (the dash-single-dot-line position in FIG. 4).

[0078] The transport robot 130b is therefore able to continuously execute the transfer of the FOUP 80 encasing an untreated substrate to the mounting position of the second mounting section 160, and the receipt of the empty FOUP 80 raised to the withdrawal position, from the second mounting section 160. Specifically, only one reciprocating motion of the transport robot 130b between the shelf array 140 and the second mounting section 160 permits the interchange between the FOUP 80 encasing a substrate and the empty FOUP 80. This can further improve the throughput in the processing executed in the loader and unloader section 100.

[0079] The third mounting section 150 is used to execute mapping processing such as confirmation of the number of substrates encased in the FOUP 80 loaded from the load port 10, and is disposed on the load port 10 side when viewed from the shelf array 140. That is, the third mounting section 150 is disposed on the opposite side of the second mounting section 160 with the shelf array 140 interposed therebetween.

[0080] The third mounting section 150 is equipped with a first opening and closing mechanism 185 to open and close the lid 83 of the FOUP 80. The first opening and closing mechanism 185 has the same hardware configuration as the second opening and closing mechanism 180, as shown in FIG. 10. Therefore, the internal space of the casing 81 of the FOUP 80 mounted on the second mounting section 160 is opened or closed by allowing the latch part 181 of the first opening and closing mechanism 185 to shift in the directions indicated by the arrow AR2 or the directions indicated by the arrow AR3, while allowing it to fit in the lid 83.

[0081] Like the shelf members 141a and 141b, a shelf member 141c is a member that is in the general shape of an "L", and has a projecting portion. It is attached such that its longitudinal direction is approximately parallel to the X-axis direction (see FIGS. 3 and 4). The third mounting section 150 further has a counting mechanism 187 to count the number of substrates encased in the interior of the FOUP 80, as shown in FIG. 3.

[0082] Therefore, when the FOUP 80 is mounted on a pair of the shelf members 141c, the opening and closing mechanism removes the lid 83 of the FOUP 80, while the counting mechanism 187 counts the number of substrates encased in the interior of the FOUP 80. Thus, the third mounting section 150 is used as a judging section to judge the situation with regard to the substrates encased in the FOUP 80.

[0083] The lifter 170 of the third mounting section 150 is, as shown in FIG. 4, a lifting section disposed above a pair of the shelf members 141c, and has the same hardware configuration as the lifter 170 of the second mounting section 160. That is, the lifter 170 of the third mounting section 160 causes the FOUP 80 mounted on a pair of the shelf members 141c to ascend and descend between the mounting position (the full-line position in FIG. 4) and the withdrawal position (the dash-single-dot-line position in FIG. 4).

[0084] With this construction, the third mounting section 150 can raise the FOUP 80 after completion of mapping processing to the withdrawal position (the dash-single-dot-line position in FIG. 4), while causing the lifter arm 171 to grip the flange 82.

[0085] The transport robot 130a is therefore able to continuously execute the transfer of the FOUP 80 not subjected to mapping processing to the mounting position of the third mounting section 150, and the receipt of the FOUP 80, after being subjected to mapping processing and raised to the withdrawal position, from the second mounting section 150. Specifically, only one reciprocating motion of the transport robot 130a between the shelf array 140 and the second mounting section 160 permits the interchange between the FOUP 80 after completion of mapping processing and the FOUP 80 not subjected to mapping processing. This can further improve the throughput in the processing executed in the loader and unloader section 100.

[0086] In a conventional loader and unloader section having only one opener section, mapping processing is usually executed in the second mounting section 160 disposed on the substrate processing unit 200 side. That is, the transfer of a substrate to the substrate processing unit 200, and the mapping processing are executed in the second mounting section 160.

[0087] Hence, if there is only one opener section, by the time the substrate encased in the FOUP 80 is loaded in the substrate processing unit 200, it needs to be transported between the second mounting section 160 and the shelf array 140 in some cases. This may cause a waste of the process of transportation.

[0088] Furthermore, during the mapping processing, a transporting mechanism 190 on the substrate processing unit 200 side cannot load a substrate from the second mounting section 160 to the substrate processing unit 200. This leads to such a disadvantage that the processing in the second mounting section 160 is a rate-determining factor of the throughput in the processing executed in the loader and unloader section 100.

[0089] On the contrary, in the loader and unloader section 100 of the first preferred embodiment, the second and third mounting sections 160 and 150 can execute concurrently the loading of a substrate into the substrate processing unit 200, and mapping processing. Like the conventional loader and unloader section, it is unnecessary to reciprocate the FOUP 80 between the shelf array 140 and the second mounting section 160 by the time a substrate is loaded in the substrate processing unit 200. This permits a reduction in the time of waiting for another processing in the second mounting section 160, thereby further improving the throughput in the transportation executed in the loader and unloader section 100.

<1.3. Advantages of Substrate Processing Apparatus of First Preferred Embodiment>

[0090] As above described, in the loader and unloader section 100 of the substrate processing apparatus 1 of the first preferred embodiment, the transport robot (the first transport section) 130a is disposed on the load port (the first mounting section) 10 side, and the transport robot (the second transporting section) 130b is disposed on the substrate processing unit 200 side, with the shelf array 140 interposed between the two. This enables the transport robots 130a and 130b to execute transportation of the FOUP 80 without mutual spatial interference, except where they access to the same storage shelf.

[0091] It is therefore possible to further improve the throughput in the transportation executed in the loader and unloader section 100, and the throughput in the substrate processing apparatus 1 as well. Additionally, the operations of the transport robots 130a and 130b can be set without consideration of spatial interference of the transports robots 130a and 130b.

[0092] The loader and unloader section 100 has the two mounting sections (the second and third mounting sections 160 and 150). The mapping processing in the third mounting section 150, and the transfer of a substrate to the substrate processing unit 200 in the second mounting section 160 are executed concurrently. Specifically, like the conventional loader and unloader section, the second mounting section 160 is not required to execute mapping processing, and it may execute only the transfer of a substrate, so that the time of waiting for another processing in the second mounting section 160 can be reduced.

2. Second Preferred Embodiment

[0093] A second preferred embodiment of the present invention will next be described. A substrate processing apparatus in the second preferred embodiment has the same construction as the first preferred embodiment, except that a loader and unloader section 500 further has an aligning section to align substrates in a predetermined direction. In the following description, like components are identified by the same reference numerals as in the substrate processing apparatus of the first preferred embodiment.

<2.1. Construction of Substrate Processing Apparatus>

[0094] FIG. 1 is a perspective view showing the overall construction of a substrate processing apparatus 400 in a second preferred embodiment. The substrate processing apparatus 400 is an apparatus that takes out, from an FOUP (front opening unified pod) 80, a set of a plurality of substrates (lots) encased in the FOUP 80, and that performs substrate processings in sequence with respect to the plurality of substrate, for example, etching with chemical solution such as hydrofluoric acid, and rinse with de-ionized water. As shown in FIG. 1, the substrate processing apparatus 400 consists mainly of a load port 10, a loader and unloader section 500, and a substrate processing unit 200. FIG. 1 and the succeeding respective figures are accompanied by an XYZ rectangular coordinate system, where the Z-axis direction is the vertical direction, and an XY plane is a horizontal plane, depending on the necessity in clarifying their respective directional relationships.

[0095] The load port (the first mounting section) 10 is a mounting table, on which a transporting apparatus in the exterior of the substrate processing apparatus 400 (e.g., AVG (automatic guided vehicle)), or the FOUP 80 transferred from an operator of the substrate processing apparatus 400 is mounted. As shown in FIG. 1, the load port 10 is disposed side by side with respect to the loader and unloader section 500, and a plurality of (four in accordance with the second preferred embodiment) FOUPs 80 are mounted concurrently on a mounting surface 10a.

[0096] Additionally, as shown in FIGS. 1 and 7, a plurality of (four in accordance with the second preferred embodiment) shutters 11 are disposed on a side surface on the load port 10 side in the loader and unloader section 500. Upon opening the shutter 11, there is formed an opening portion that provides communication between the external space of the substrate processing apparatus 400 and the internal space of the loader and unloader section 500.

[0097] This enables a transport robot 130a of the loader and unloader section 500 (see FIGS. 7 and 8) to perform, via the above opening portion, transportation of the FOUP 80 between the load port 10 and the internal space of the loader and unloader section 500. Specifically, the FOUP 80 with an untreated substrate encased is transported from the load port 10 to the loader and unloader section 500. The FOUP 80 with a treated substrate after being subjected to processing in the substrate processing unit 200 is transferred from the loader and unloader section 500 to the load port 10.

[0098] The loader and unloader section 500 is used as a cassette storing and transporting unit that temporarily stores in its interior the FOUP 80 mounted on the load port 10, and also transports the FOUP 80 encasing a substrate toward the substrate processing unit 200. As shown in FIG. 1, the loader and unloader section 500 is disposed at a place sandwiched between the load port 10 and the substrate processing unit 200.

[0099] Further, the substrate processing unit 200 has a second opening and closing mechanism 180 and a transporting mechanism 190 that are used in transferring a substrate between a second mounting section 160 and the substrate processing unit 200. The second opening and closing mechanism 180 and the transporting mechanism 190 are disposed in the vicinity of the shutter 161 of the loader and unloader section 500, as shown in FIGS. 3 and 9.

[0100] FIG. 9 is a side view of the second opening and closing mechanism 180 and the transporting mechanism 190 of the substrate processing unit 200. FIG. 10 is a side view of the second opening and closing mechanism 180. The substrate processing unit 200 has in its interior a chemical solution tank to store chemical solution and a rinsing tank to store de-ionized water. A substrate is subjected to a predetermined substrate processing by allowing the substrate to be stored in the chemical solution tank or the rinsing tank.

[0101] The second opening and closing mechanism 180 consists mainly of a latch part 181 and a lifting part 182, as shown in FIGS. 9 and 10. The latch part 181 can be fit in the lid 83 of the FOUP 80. The latch part 181 is attached to one end of a movable portion 182b. When a cylinder 182a of the lifting part 182 causes the movable portion 182b to execute advance and withdrawal motion in the directions indicated by a double-headed arrow AR2 (approximately the Z-axis direction), the latch part 181 ascends and descends in the directions indicated by the arrow AR2 (see FIG. 9). The latch part 181 can also be shifted in the directions indicated by a double-headed arrow AR3 (the Y-axis direction) by a horizontal shifting mechanism (not shown) (see FIG. 10).

[0102] Hence, when the latch part 181 is shifted with it fit in the lid 83 in the directions indicated by the arrow AR2 or AR3, the internal space of the casing 81 of the FOUP 80 mounted on the second mounting section 160 is opened or closed.

[0103] The transporting mechanism 190 consists mainly of a support part 191 and an advance and withdrawal section 192. The transporting mechanism 190 performs loading or unloading of a substrate with respect to a FOUP 80, when the shutter 161 is opened and the lid 83 of the FOUP 80 mounted on the second mounting section 160 is removed.

[0104] The support part 191 consists mainly of a plurality of (25 or 13 in the second preferred embodiment) support arms 191a, and a fitting member 191b. The support arms 191a are arranged in the vertical direction (approximately the Z-axis direction) at equally spaced intervals while extending in the horizontal direction (approximately the Y-axis direction), and each of them supports a substrate such that the main surface of the substrate is approximately parallel to an XY plane. The end of each support arm 191a on the substrate processing unit 200 side is attached to the fitting member 191b extending in the vertical direction.

[0105] A lower end of the fitting member 191b is disposed on a movable tray 192a of the advance and withdrawal section 192. The advance and withdrawal section 192 has three trays (movable trays 192a and 192b, and a stationary tray 192c), as shown in FIG. 9. These trays 192a, 192b, and 192c are disposed in top-to-bottom order. The stationary tray 192c of the advance and withdrawal section 192 is attached to a rotary shaft 194 pivoted about a base 193, allowing the advance and withdrawal section 192 to be rotatable about an axis 194c.

[0106] With this construction, in the advance and withdrawal section 192, the movable tray 192b executes advance and withdrawal motion with respect to the stationary tray 192c, and the movable tray 192a executes advance and withdrawal motion with respect to the movable tray 192b, so that the support part 191 shifts between the full-line position and the dotted-line position. As a result, an untreated substrate encased in the interior of the casing of the FOUP 80 is loaded in the substrate processing unit 200 while being supported by the support part 191 of the transporting mechanism 190. The treated substrate subjected to substrate processing in the substrate processing unit 200 is unloaded from the substrate processing unit 200 while being supported by the support part 191, and then encased in the casing 81 of the FOUP 80.

[0107] Thus, the substrate transferred to the substrate processing unit 200 from the loader and unloader section 100 by the transporting mechanism 190 of the substrate processing unit 200 is then stored in the above-mentioned chemical solution tank or rinsing tank so as to be subjected to a predetermined substrate processing such as rinsing or the like. The substrate after completion of the predetermined processing is then unloaded from the substrate processing unit 200 to the loader and unloader section 500 by the transporting mechanism 190.

[0108] A control unit 50 shown in FIG. 1 has a memory 51 that stores a program, a variable and the like, and a CPU 52 that executes control according to the program stored in the memory 51. Objects to be controlled such as the shutter 11 of the loader and unloader section 500, the transport robot 130, and the lifter 170 (see FIG. 7) are electrically connected to the control unit 50 by a signal line (not shown). Therefore, the CPU 52 causes these objects to be controlled to operate at a predetermined timing according to the program stored in the memory 51.

<2.2. Construction of Loader and Unloader Section>

[0109] FIGS. 7 and 8 are a top view and a front view of the loader and unloader section 500 in the second preferred embodiment, respectively. FIG. 5 is a sectional view of the shelf member 141a and the FOUP 80. FIG. 6 is a top view of the neighborhood of the shelf member 141a. The following is a detail description of the loader and unloader section 500 that is used as a cassette storing and transporting unit.

[0110] As shown in FIGS. 7 and 8, the loader and unloader section 500 consists mainly two transport robots 130 (130a, 130b) and 530, a shelf array 140, two mounting sections (second and third mounting sections 160, 150), and an alignment section 510.

[0111] Referring to FIG. 7, individual elements arranged in the loader and unloader section 500 are arranged along the horizontal direction (approximately the X-axis direction) so as to form three rows. Specifically, the transport robot (a first transporting section) 130a and a third mounting section (a judging section) 150 are disposed on the first row from the load port 10 side. The shelf array 140, the alignment section 510, and the transport robot 530 are disposed on the second row. The transport robot (a second transporting section) 130b and the second mounting section 160 are disposed on the third row.

[0112] The shelf array 140 is an encasing section to encase a plurality of (14 in accordance with the second preferred embodiment) FOUPs 80. In other words, the shelf array 140 encases not only the FOUPs 80 encasing an untreated substrate, but also the empty FOUPs 80, from which the substrate is already taken out. As shown in FIGS. 7 and 8, the shelf array 140 is obtained by arranging in two dimensions a plurality of shelves along the vertical direction (the Z-axis direction) and the horizontal direction (the X-axis direction).

[0113] Each of the plurality of shelves has a pair of shelf members 141a. As shown in FIGS. 5 and 6, each shelf member 141a is in the general shape of an "L", and is attached to the corresponding frame 145 such that the longitudinal direction of the shelf member 141a is approximately parallel to the Y-axis direction. A surface of the shelf member 141a, on which the FOUP 80 is mounted, has a projecting portion 142 that corresponds to a hole portion 85 disposed at a lower part of the FOUP 80. Hence, the FOUP 80 can be stably held at the pair of the shelf members 141a by fitting the projecting portions 142 of a pair of the shelf members 141a into the hole portions 85 of the FOUP 80.

[0114] Thus, in accordance with the second preferred embodiment, the pair of the shelf members 141a are used as a storage shelf to store the FOUP 80, and the region sandwiched between the pair of the shelf members 141a is used as an encasing space 141 to store the FOUP 80.

[0115] Formed between two shelf members 141a constituting a storage shelf is an opening portion 146 that is greater in size than a tip portion 139 of the transport robot 130 (130a, 130b). As shown in FIG. 8, each opening portion 146 is arranged along the vertical direction (the Z-axis direction).

[0116] Therefore, the tip portion 139 of the transport robot 130 ascends and descends in the interior of the shelf array 140 while passing through these opening portions 146. In other words, the opening portions 146 of a plurality of storage shelves in the shelf array 140 function as a passage portion allowing the tip portion 139 to pass through in the vertical direction.

[0117] Referring to FIG. 7, the transport robots 130a and 130b are FOUP transporting sections that are placed on the load port 10 side and the substrate processing unit 200 side, respectively, when viewed from the shelf array 140. That is, the transport robot (the first transporting section) 130a is disposed on the reverse side of the transport robot (the second transporting section) 130b with the shelf array 140 interposed therebetween.

[0118] A tip portion 139 of the transport robot 130 is a holding element to hold the FOUP 80 from the underside, and is in the general shape of a triangle. A projecting portion 139a is disposed in the vicinity of each vertex on the upper surface side of the tip portion 139. Disposed at a lower part of the FOUP 80 are three hole portions 87 that correspond to the projecting portions 139a, respectively (see FIG. 7, in which two of the three hole portions are shown for convenience in plotting). The tip portion 139 is attached to an arm 138a, via a rotary shaft 134b positioned in approximately parallel to the Z-axis, thus allowing it to be rotatable about the rotary shaft 134b. Accordingly, the transport robot 130 stably holds the FOUP 80 by causing the three projecting portions 139a to fit in their respective corresponding hole portions 86 of the FOUP 80, while causing the tip portion 139 to rotate.

[0119] The arm 138a is attached to an arm 138b via the rotary shaft 134c positioned in approximately parallel to the Z-axis, and the arm 138b is attached to an anchor block 136 via the rotary shaft 134a. The anchor block 136 is disposed on a strut 131 extending in the vertical direction (the Z-axis direction) such that it can ascend and descend. The strut 131 is free to slide along a guide rail 132 extending in the horizontal direction (the X-axis direction).

[0120] With this construction, the transport robot 130 (130a, 130b) causes the FOUP 80 held at the tip portion 139 to shift in the horizontal direction along the shelf array 140 and to ascend and descend in the vertical direction. Therefore, the transport robot 130a transports the FOUP 80 among the storage shelf of the shelf array 140, the load port 10, and the third mounting section 150. The transport robot 130b transports the FOUP 80 between the storage shelf of the shelf array 140 and the second mounting section 160.

[0121] The transport robot 130a performs processing of: transporting the FOUP 80 that is loaded through the load port 10, from the load port 10 to the shelf array 140; transporting it from the load port 10 to the third mounting section 150; transporting it from the third mounting section 150 to the shelf array 140; and transporting the FOUP 80 stored in the shelf array 140 to the load port 10.

[0122] The transport robot 130b performs the transportation of the FOUP 80 stored in the shelf array 140 from the shelf array 140 to the second mounting section 160, and transportation from the mounting section 150 to the shelf array 140.

[0123] Thus, the transport robots 130a and 130b are disposed oppositely with the shelf array 140 interposed therebetween. This enables a plurality of transportations to be executed almost concurrently, thereby improving the throughput in the load and unloader section 500 as a whole. Except where the transport robots 130a and 130b access to the same storage shelf, they execute transportation of the FOUP 80 without mutual spatial interference. It is therefore possible to set the operations of the transport robots 130a and 130b without considering the interference between the two.

[0124] Moreover in the second preferred embodiment, the transportation of the FOUP 80 executed between the load port 10 and the substrate processing unit 200 is performed by the two transport robots 130a and 130b of the loader and unloader section 100, instead of the transporting section of the load port 10. Therefore, in the second preferred embodiment, neither of the transport robot 130a nor 130b is required to withdraw when the FOUP 80 is transported from the load port 10 to the substrate processing unit 200. This permits efficient transportation of the FOUP 80.

[0125] The transportation of the FOUP 80 between the transport robot 130 (130a, 130b) and each storage shelf of the shelf array 140 is executed as follows. That is, when the FOUP 80 is transferred from the transport robot 130 to the storage shelf, first, the tip portion 139 of the transport robot 130 is shifted such that the height position (the position in the Z-axis direction) of the bottom 88 of the FOUP 80 stored at a storage shelf is higher than the height position of a top surface 143 of the shelf member 141a (141b, 141c) (see FIG. 7). Subsequently, the tip portion 139 is allowed to descend such that the projecting portions 142 of a pair of the shelf member 141a (141b, 141c) are fit in the hole portions 85 of the FOUP 80.

[0126] By allowing the tip portion 139 to further descend, the FOUP 80 is mounted on the top surface 143 of the pair of the shelf member 141a (141b, 141c), and the projecting portion 139a of the tip portion 139 is separated from a hole portion 87, thus completing the transfer of the FOUP 80 from the transport robot 130 to the storage shelf.

[0127] On the other hand, when the FOUP 80 is transferred from a storage shelf to the transport robot 130, first, the tip portion 139 of the transport robot 130 is shifted to under the FOUP 80 that is mounted on a storage shelf. Subsequently, the tip portion 139 is allowed to ascend such that the projecting portion 139a of the tip portion 139 is fit in the hole portion 87 of the FOUP 80.

[0128] By allowing the tip portion 139 to further ascend, the FOUP 80 is held by the tip portion 139, and the projecting portion 142 is separated from the hole portion 85, thus completing the transfer of the FOUP 80 from the storage shelf to the transport robot 130.

[0129] Thus, in process of transporting the FOUP 80 between the transport robot 130 and the storage shelf, the FOUP 80 is shifted above the shelf member 141a (141b, 141c). Therefore, the encasing space 141 is set so as to have a greater height than the FOUP 80.

[0130] The second mounting section 160 is used to transfer a substrate encased in the FOUP 80 to the substrate processing unit 200, and disposed on the substrate processing unit 200 side when viewed from the shelf array 140.

[0131] Like the shelf member 141a, the shelf member 141b is a member that is in the general shape of an "L", and has a plurality of (three in accordance with the second preferred embodiment) projecting portions on the plane on the FOUP 80 side. It is disposed such that the longitudinal direction of the shelf member 141b is approximately parallel to the X-axis direction, as shown in FIGS. 7 and 8.

[0132] Additionally, a shutter 161 that can ascend and descend in the directions indicated by a double-headed arrow AR4 (approximately the Z-axis direction, see FIG. 9) is disposed on a side wall on the substrate processing unit 200 side in the vicinity of the second mounting section 160. Upon opening the shutter 161, there is formed an opening portion that provides communication between the internal space of the loader and unloader section 500 and the internal space of the substrate processing unit 200.

[0133] Hence, when the FOUP 80 is mounted on a pair of the shelf members 141b, the second opening and closing mechanism 180 of the substrate processing unit 200 removes the lid 83 of the FOUP 80, while the transporting mechanism 190 of the substrate processing unit 200 takes out an untreated substrate from the FOUP 80, and transports the untreated substrate into the substrate processing unit 200 via the opening portion formed upon opening the shutter 161.

[0134] On the other hand, after the substrate processing unit 200 performs processing such as rinsing and drying with respect to a substrate, the shutter 161 is opened, and the transporting mechanism 190 transports the treated substrate via the opening portion into the FOUP 80, while the second opening and closing mechanism 180 closes the lid 83 of the FOUP 80.

[0135] A lifter 170 of the second mounting section 160 is a lifting section that causes the FOUP 80 mounted on a pair of the shelf members 141b to ascend and descend between a mounting position (the full-line position in FIG. 8) and a withdrawal position (the dash-single-dot-line position in FIG. 8). As shown in FIG. 8, the lifter 170 is disposed above a pair of the shelf members 141b, and has a lifter arm 171.

[0136] The lifter arm 171 grips a flange 82 (a grip portion) formed on the top of the FOUP 80, and releases its grip state. The lifter arm 171 can also ascend and descend along the vertical direction (the Z-axis direction) by a driving mechanism (not shown).

[0137] This enables the second mounting section 160 to raise the empty FOUP 80, from which the substrate is already supplied to the substrate processing unit 200, to the withdrawal position (the dash-single-dot-line position in FIG. 8).

[0138] The transport robot 130b is therefore able to continuously execute the transfer of the FOUP 80 encasing an untreated substrate to the mounting position of the second mounting section 160, and the receipt of the empty FOUP 80 raised to the withdrawal position, from the second mounting section 160. Specifically, only one reciprocating motion of the transport robot 130b between the shelf array 140 and the second mounting section 160 permits the interchange between the FOUP 80 encasing a substrate and the empty FOUP 80. This can further improve the throughput in the processing executed in the loader and unloader section 500.

[0139] The third mounting section 150 is used to execute mapping processing such as confirmation of the number of substrates encased in the FOUP 80 loaded from the load port 10, and is disposed on the load port 10 side when viewed from the shelf array 140. That is, the third mounting section 150 is disposed on the opposite side of the second mounting section 160 with the shelf array 140 interposed therebetween.

[0140] The third mounting section 150 is equipped with a first opening and closing mechanism 185 to open and close the lid 83 of the FOUP 80. The first opening and closing mechanism 185 has the same hardware configuration as the second opening and closing mechanism 180, as shown in FIG. 10. Therefore, the internal space of the casing 81 of the FOUP 80 mounted on the second mounting section 160 is opened or closed by allowing the latch part 181 of the first opening and closing mechanism 185 to shift in the directions indicated by the arrow AR2 or the directions indicated by the arrow AR3, while allowing it to fit in the lid 83.

[0141] Like the shelf members 141a and 141b, a shelf member 141c is a member that is in the general shape of an "L", and has a projecting portion. It is attached such that its longitudinal direction is approximately parallel to the X-axis direction (see FIGS. 7 and 8). The third mounting section 150 further has a counting mechanism 187 to count the number of substrates encased in the interior of the FOUP 80, as shown in FIG. 7.

[0142] Therefore, when the FOUP 80 is mounted on a pair of the shelf members 141c, the opening and closing mechanism 185 removes the lid 83 of the FOUP 80, while the counting mechanism 187 counts the number of substrates encased in the interior of the FOUP 80. Thus, the third mounting section 150 is used as a judging section to judge the situation with regard to the substrates encased in the FOUP 80.

[0143] The lifter 170 of the third mounting section 150 is, as shown in FIG. 8, a lifting section disposed above a pair of the shelf members 141c, and has the same hardware configuration as the lifter 170 of the second mounting section 160. That is, the lifter 170 of the third mounting section 160 causes the FOUP 80 mounted on a pair of the shelf members 141c to ascend and descend between the mounting position (the full-line position in FIG. 8) and the withdrawal position (the dash-single-dot-line position in FIG. 8).

[0144] With this construction, the third mounting section 150 can raise the FOUP 80 after completion of mapping processing to the withdrawal position (the dash-single-dot-line position in FIG. 8), while causing the lifter arm 171 to grip the flange 82.

[0145] The transport robot 130a is therefore able to continuously execute the transfer of the FOUP 80 not subjected to mapping processing to the mounting position of the third mounting section 150, and the receipt of the FOUP 80, after being subjected to mapping processing and raised to the withdrawal position, from the second mounting section 150. Specifically, only one reciprocating motion of the transport robot 130a between the shelf array 140 and the third mounting section 160 permits the interchange between the FOUP 80 after completion of mapping processing and the FOUP 80 not subjected to mapping processing. This can further improve the throughput in the processing executed in the loader and unloader section 500.

[0146] In a conventional loader and unloader section having only one opener section, mapping processing is usually executed in the second mounting section 160 disposed on the substrate processing unit 200 side. That is, the transfer of a substrate to the substrate processing unit 200, and mapping processing are executed in the second mounting section 160.

[0147] Hence, if there is only one opener section, by the time the substrate encased in the FOUP 80 is loaded in the substrate processing unit 200, it needs to be transported between the second mounting section 160 and the shelf array 140 in some cases. This may cause a waste of the process of transportation.

[0148] Furthermore, during the mapping processing, a transporting mechanism 190 on the substrate processing unit 200 side cannot load a substrate from the second mounting section 160 to the substrate processing unit 200. This leads to such a disadvantage that the processing in the second mounting section 160 is a rate-determining factor of the throughput in the processing executed in the loader and unloader section 500.

[0149] On the contrary, in the loader and unloader section 500 of the second preferred embodiment, the second and third mounting sections 160 and 150 can execute concurrently the loading of a substrate into the substrate processing unit 200, and mapping processing. Unlike the conventional loader and unloader section, the loader and unloader section 500 eliminates the need to reciprocate the FOUP 80 between the shelf array 140 and the second mounting section 160 by the time a substrate is loaded in the substrate processing unit 200. This permits a reduction in the time of waiting for another processing in the second mounting section 160, thereby further improving the throughput in the transportation executed in the loader and unloader section 500.

[0150] As shown in FIG. 7, the transport robot (the third transporting section) 530 is disposed at a region that is present along the X-axis direction of the shelf array 140 and sandwiched between the second and third mounting sections 160 and 150 (i.e., the second row). The transport robot 530 is also disposed such that its height position (the Z-axis direction position) is approximately the same as the mounting position of the FOUP 80 in the second and third mounting sections 160 and 150 (the full-line position in FIG. 8).

[0151] The transport robot 530 has a lifter 536, to which an arm 538b is attached via a rotary shaft 534a disposed in approximately parallel to the Z-axis. An arm 538a is attached via a rotary shaft 534c to the arm 538b. A tip portion 539 for transporting substrates one by one is provided via a rotary shaft 534b.

[0152] After the first opening and closing mechanism 185 of the third mounting section opens the lid 83 of the FOUP 80 mounted on the third mounting section 150, a non-contact type detecting section (not shown) detects the orientation flat and the notch position of the substrate in the FOUP 80. Subsequently, the tip portion 539 of the transport robot 530 takes out the substrates one by one from the FOUP 80, and then transports them to the alignment section 510. After the alignment section 510 completes the alignment processing of the substrates, the tip portion 539 of the transport robot 530 takes out the substrates one by one from the alignment section 510, and transports them to the FOUP 80.

[0153] The alignment section 510 is an adjusting section of a so-called single wafer processing that performs alignment processing per substrate. As shown in FIG. 7, the alignment section 510 is placed within the shelf array 140 and adjacent to the transport robot 530, and disposed such that its height position is approximately the same as that of the transport robot 530. Here, the alignment section 510 adjusts the rotary position of a substrate based on an orientation flat and a notch position. At this time, the substrate is rotated based on the detection result obtained by the non-contact type detecting section, and the position of the substrate is adjusted such that the crystal orientation of the substrate becomes a predetermined direction, thereby completing the alignment processing.

[0154] Thus, the alignment processing executed by the loader and unloader section 500 is executed for the substrate that is taken out from the FOUP 80 mounted on the third mounting section 150, and then loaded in the alignment section 510. That is, in executing the alignment processing, no FOUP 80 is mounted on the second mounting section 160.

[0155] This enables the loader and unloader section 500 to concurrently execute the transfer of a substrate from the second mounting section 160 to the substrate processing unit 200, the transfer of substrates one by one between the third mounting section 150 and the alignment section 510, and the alignment processing executed in the alignment section 510. Therefore, the alignment processing can be executed in the loader and unloader section 500, while minimizing the throughput drop of the processing executed in the loader and unloader section 500.

[0156] Moreover, in the alignment section 510, the non-contact type detecting section can detect the orientation flat and the notch position of a substrate, so that the occurrence of particles can be suppressed than a batch type adjusting section. Hence, the alignment section 510 can execute alignment processing while suppressing defects in substrate processing.

<2.3. Advantages of Substrate Processing Apparatus of Second Preferred Embodiment>

[0157] As above described, in the loader and unloader section 500 of the substrate processing apparatus 400 of the second preferred embodiment, the transport robot (the first transport section) 130a is disposed on the load port (the first mounting section) 10 side, and the transport robot (the second transporting section) 130b is disposed on the substrate processing unit 200 side, with the shelf array 140 interposed between the two. This enables the transport robots 130a and 130b to execute concurrent transportation of the FOUP 80 without mutual spatial interference, except where they access to the same storage shelf.

[0158] It is therefore possible to further improve the throughput in the transportation executed in the loader and unloader section 500, and the throughput in the substrate processing apparatus 400 as well. Additionally, the operations of the transport robots 130a and 130b can be set without consideration of spatial interference of the transports robots 130a and 130b.

[0159] The loader and unloader section 500 has the two mounting sections (the second and third mounting sections 160 and 150). The mapping processing in the third mounting section 150, and the transfer of a substrate to the substrate processing unit 200 in the second mounting section 160 are executed concurrently. Specifically, like the conventional loader and unloader section, the second mounting section 160 is not required to execute mapping processing, and it may execute only the transfer of a substrate. It is therefore possible to reduce the time of waiting for another processing in the second mounting section 160, as in the case with the conventional apparatus. This can further improve the throughput in the transportation in the loader and unloader section 500, and in the throughput in the substrate processing apparatus 400 as well.

[0160] Additionally, in the loader and unloader section 500, the transfer of a substrate to the substrate processing unit 200, and alignment processing can be executed concurrently. Therefore, the alignment processing can be executed while minimizing the throughput drop in the loader and unloader section 500 as a whole.

[0161] Furthermore, since the alignment section 510 can detect the orientation flat and the notch position of a substrate by the non-contact type detecting section, the alignment processing can be executed while suppressing defects in substrate processing.

[0162] While the invention has been shown and described in detail, the foregoing description is in all aspects illustrative and not restrictive. It is therefore understood that numerous modifications and variations can be devised without departing from the scope of the invention.

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