Piezoactuator and drive circuit therefor
Abstract
A piezoactuator has a diaphragm, and the diaphragm has flat piezoelectric
elements that oscillate in a longitudinal oscillation mode and a
sinusoidal oscillation mode. A first electrode for detecting oscillation
in the longitudinal oscillation mode, and a second electrode for
detecting the amplitude of oscillation in the sinusoidal oscillation
mode, are disposed on the surface of the diaphragm. When the
piezoactuator is driven with a drive signal, the phase difference of a
first detection signal output from the first electrode and a second
detection signal output from the second electrode is detected. The
frequency at which the detected phase difference becomes the maximum
phase difference is then obtained, and a drive signal of a matching
frequency is applied to the piezoelectric elements.
| Inventors: |
Akahane; Hidehiro (Suwa, JP), Sawada; Akihiro (Suwa, JP), Furuhata; Makoto (Suwa, JP) |
| Assignee: |
Seiko Epson Corporation
(Tokyo,
JP)
|
| Appl. No.:
|
11/591,409 |
| Filed:
|
November 1, 2006 |